为了减小定位平台在X,Y方向的振动误差,实现高精度定位,搭建了宏微结合精密定位系统,由高性能直线电机驱动,气体静压导轨支撑和导向的宏动平台实现系统的大行程微米级定位,并由安装在宏动平台上的压电陶瓷驱动的微动平台对系统进行定位...为了减小定位平台在X,Y方向的振动误差,实现高精度定位,搭建了宏微结合精密定位系统,由高性能直线电机驱动,气体静压导轨支撑和导向的宏动平台实现系统的大行程微米级定位,并由安装在宏动平台上的压电陶瓷驱动的微动平台对系统进行定位精度补偿。建立了定位系统机电耦合振动模型,采用比例积分微分(proportion integral derivative,简称PID)控制与最小节拍响应控制相结合的策略控制宏动平台,采用前馈-PID控制驱动微动平台,通过电容式微位移传感器实时检测定位系统终端的位置输出信号作为微动台的输入信号,实现定位系统的闭环反馈控制,达到宏动平台的振动误差实时补偿的目的。实验结果显示,所设计的微动补偿平台具有良好的动态特性,定位系统具有良好的误差实时补偿效果,针对X,Y向的振动范围由补偿前的4和3.5μm,补偿后减小到1μm的范围内。结果表明,所研究的振动误差补偿方法可以有效减小定位系统的振动误差,提高系统的定位精度。展开更多
In order to choose the appropriate reference surface on the machined surface roughness of Si Cp/Al composites, the cutting experiments of Si Cp/Al composites were carried out, and the machined surface topography was m...In order to choose the appropriate reference surface on the machined surface roughness of Si Cp/Al composites, the cutting experiments of Si Cp/Al composites were carried out, and the machined surface topography was measured by OLS3000 Confocal laser scanning microscope. The 3D measured data of machined surface topography were analyzed by the area power spectrum density. The result shows that the texture of machined surface topography in milling of Si Cp/Al composites is almost isotropic. This is the reason that the values of Rq at different locations on the same machined surface are obviously different. Through the comparison of performance of different filtering methods, the robust least squares reference surface can be used to extract the surface roughness of SiC p/Al composites effectively.展开更多
文摘为了减小定位平台在X,Y方向的振动误差,实现高精度定位,搭建了宏微结合精密定位系统,由高性能直线电机驱动,气体静压导轨支撑和导向的宏动平台实现系统的大行程微米级定位,并由安装在宏动平台上的压电陶瓷驱动的微动平台对系统进行定位精度补偿。建立了定位系统机电耦合振动模型,采用比例积分微分(proportion integral derivative,简称PID)控制与最小节拍响应控制相结合的策略控制宏动平台,采用前馈-PID控制驱动微动平台,通过电容式微位移传感器实时检测定位系统终端的位置输出信号作为微动台的输入信号,实现定位系统的闭环反馈控制,达到宏动平台的振动误差实时补偿的目的。实验结果显示,所设计的微动补偿平台具有良好的动态特性,定位系统具有良好的误差实时补偿效果,针对X,Y向的振动范围由补偿前的4和3.5μm,补偿后减小到1μm的范围内。结果表明,所研究的振动误差补偿方法可以有效减小定位系统的振动误差,提高系统的定位精度。
基金Projects(51305284,61203208) supported by the National Natural Science Foundation of China
文摘In order to choose the appropriate reference surface on the machined surface roughness of Si Cp/Al composites, the cutting experiments of Si Cp/Al composites were carried out, and the machined surface topography was measured by OLS3000 Confocal laser scanning microscope. The 3D measured data of machined surface topography were analyzed by the area power spectrum density. The result shows that the texture of machined surface topography in milling of Si Cp/Al composites is almost isotropic. This is the reason that the values of Rq at different locations on the same machined surface are obviously different. Through the comparison of performance of different filtering methods, the robust least squares reference surface can be used to extract the surface roughness of SiC p/Al composites effectively.
