A low specific on-resistance SO1 LDMOS with a novel junction field plate (JFP) is proposed and investigated theo- retically. The most significant feature of the JFP LDMOS is a PP-N junction field plate instead of a ...A low specific on-resistance SO1 LDMOS with a novel junction field plate (JFP) is proposed and investigated theo- retically. The most significant feature of the JFP LDMOS is a PP-N junction field plate instead of a metal field plate. The unique structure not only yields charge compensation between the JFP and the drift region, but also modulates the surface electric field. In addition, a trench gate extends to the buffed oxide layer (BOX) and thus widens the vertical conduction area. As a result, the breakdown voltage (BV) is improved and the specific on-resistance (Ron,sp) is decreased significantly. It is demonstrated that the BV of 306 V and the Ron,sp of 7.43 mΩ.cm2 are obtained for the JFP LDMOS. Compared with those of the conventional LDMOS with the same dimensional parameters, the BV is improved by 34.8%, and the Ron,sp is decreased by 56.6% simultaneously. The proposed JFP LDMOS exhibits significant superiority in terms of the trade-off between BV and Ron,sp. The novel JFP technique offers an alternative technique to achieve high blocking voltage and large current capacity for power devices.展开更多
An ultra-low specific on-resistance trench gate vertical double-diffused metal-oxide semiconductor with a high-k dielectric-filled extended trench(HK TG VDMOS) is proposed in this paper.The HK TG VDMOS features a hi...An ultra-low specific on-resistance trench gate vertical double-diffused metal-oxide semiconductor with a high-k dielectric-filled extended trench(HK TG VDMOS) is proposed in this paper.The HK TG VDMOS features a high-k(HK) trench below the trench gate.Firstly,the extended HK trench not only causes an assistant depletion of the n-drift region,but also optimizes the electric field,which therefore reduces Ron,sp and increases the breakdown voltage(BV).Secondly,the extended HK trench weakens the sensitivity of BV to the n-drift doping concentration.Thirdly,compared with the superjunction(SJ) vertical double-diffused metal-oxide semiconductor(VDMOS),the new device is simplified in fabrication by etching and filling the extended trench.The HK TG VDMOS with BV = 172 V and Ron,sp = 0.85 mΩ·cm2 is obtained by simulation;its Ron,sp is reduced by 67% and 40% and its BV is increased by about 15% and 5%,in comparison with those of the conventional trench gate VDMOS(TG VDMOS) and conventional superjunction trench gate VDMOS(SJ TG CDMOS).展开更多
An ultralow specific on-resistance (Ron,sp) trench metal-oxide-semiconductor field effect transistor (MOSFET) with an improved off-state breakdown voltage (BV) is proposed. It features a U-shaped gate around the...An ultralow specific on-resistance (Ron,sp) trench metal-oxide-semiconductor field effect transistor (MOSFET) with an improved off-state breakdown voltage (BV) is proposed. It features a U-shaped gate around the drift region and an oxide trench inserted in the drift region (UG MOSFET). In the on-state, the U-shaped gate induces a high density electron accumulation layer along its sidewall, which provides a low-resistance current path from the source to the drain, realizing an ultralow Ron,sp. The value of Ron,sp is almost independent of the drift doping concentration, and thus the UG MOSFET breaks through the contradiction relationship between R p and the off-state BV. Moreover, the oxide trench folds the drift region, enabling the UG MOSFET to support a high BV with a shortened cell pitch. The UG MOSFET achieves an Ron,sp of 2 mΩ·cm^2 and an improved BV of 216 V, superior to the best existing state-of-the-art transistors at the same BV level展开更多
A low specific on-resistance(Ron,sp) integrable silicon-on-insulator(SOI) metal-oxide semiconductor field-effect transistor(MOSFET) is proposed and investigated by simulation.The MOSFET features a recessed drain...A low specific on-resistance(Ron,sp) integrable silicon-on-insulator(SOI) metal-oxide semiconductor field-effect transistor(MOSFET) is proposed and investigated by simulation.The MOSFET features a recessed drain as well as dual gates,which consist of a planar gate and a trench gate extended to the buried oxide layer(BOX)(DGRD MOSFET).First,the dual gates form dual conduction channels,and the extended trench gate also acts as a field plate to improve the electric field distribution.Second,the combination of the trench gate and the recessed drain widens the vertical conduction area and shortens the current path.Third,the P-type top layer not only enhances the drift doping concentration but also modulates the surface electric field distributions.All of these sharply reduce Ron,sp and maintain a high breakdown voltage(BV).The BV of 233 V and Ron,sp of 4.151 mΩ·cm2(VGS = 15 V) are obtained for the DGRD MOSFET with 15-μm half-cell pitch.Compared with the trench gate SOI MOSFET and the conventional MOSFET,Ron,sp of the DGRD MOSFET decreases by 36% and 33% with the same BV,respectively.The trench gate extended to the BOX synchronously acts as a dielectric isolation trench,simplifying the fabrication processes.展开更多
A novel low specific on-resistance (Ron,sp) silicon-on-insulator (SO1) p-channel lateral double-diffused metal-oxide semiconductor (pLDMOS) compatible with high voltage (HV) n-channel LDMOS (nLDMOS) is propo...A novel low specific on-resistance (Ron,sp) silicon-on-insulator (SO1) p-channel lateral double-diffused metal-oxide semiconductor (pLDMOS) compatible with high voltage (HV) n-channel LDMOS (nLDMOS) is proposed. The pLDMOS is built in the N-type SO1 layer with a buried P-type layer acting as a current conduction path in the on-state (BP SOl pLD- MOS). Its superior compatibility with the HV nLDMOS and low voltage (LV) complementary metal-oxide semiconductor (CMOS) circuitry which are formed on the N-SOl layer can be obtained. In the off-state the P-buried layer built in the NSOI layer causes multiple depletion and electric field reshaping, leading to an enhanced (reduced) surface field (RESURF) effect. The proposed BP SO1 pLDMOS achieves not only an improved breakdown voltage (BV) but also a significantly reduced Ron,sp. The BV of the BP SO1 pLDMOS increases to 319 V from 215 V of the conventional SO1 pLDMOS at the same half cell pitch of 25 μm, and Ron,sp decreases from 157 mΩ.cm2 to 55 mΩ.cm2. Compared with the PW SO1 pLDMOS, the BP SO1 pLDMOS also reduces the Ron,sp by 34% with almost the same BV.展开更多
A novel silicon-on-insulator(SOI)metal-oxide-semiconductor field effect transistor(MOSFET)with a high figure of merit(FOM)is proposed.The device features a double-sided charge oxide-trench(DCT)and a trench gate extend...A novel silicon-on-insulator(SOI)metal-oxide-semiconductor field effect transistor(MOSFET)with a high figure of merit(FOM)is proposed.The device features a double-sided charge oxide-trench(DCT)and a trench gate extended to the buried oxide.First,the oxide trench causes multiple-dimensional depletion in the drift region,which not only improves the electric field(E-field)strength,but also enhances the reduced surface field effect.Second,self-adaptive charges are collected in the DCT,which enhances the E-field strength of the trench oxide.Third,the oxide trench folds the drift region along the vertical direction,reducing the device cell pitch.Fourth,one side of the DCT regions acts as the body contact of p-well to reduce cell pitch and specific on-resistance(R_(on,sp))further.Compared with a trench gate lateral double-diffused MOSFET,the DCT MOSFET increases the breakdown voltage(BV)from 53 V to 158 V at the same cell pitch of 3.5μm,or reduces the cell pitch by 60%and Ron,sp by 70%at the same BV.The FOM(FOM=BV^(2)/Ron,sp)of the proposed structure is 23 MW/cm^(2).展开更多
本文提出一种高k介质电导增强SOI LDMOS新结构(HK CE SOI LDMOS),并研究其机理.HK CE SOI LDMOS的特征是在漂移区两侧引入高k介质,反向阻断时,高k介质对漂移区进行自适应辅助耗尽,实现漂移区三维RESURF效应并调制电场,因而提高器件耐压...本文提出一种高k介质电导增强SOI LDMOS新结构(HK CE SOI LDMOS),并研究其机理.HK CE SOI LDMOS的特征是在漂移区两侧引入高k介质,反向阻断时,高k介质对漂移区进行自适应辅助耗尽,实现漂移区三维RESURF效应并调制电场,因而提高器件耐压和漂移区浓度并降低导通电阻.借助三维仿真研究耐压、比导通电阻与器件结构参数之间的关系.结果表明,HK CE SOI LDMOS与常规超结SOI LDMOS相比,耐压提高16%—18%,同时比导通电阻降低13%—20%,且缓解了由衬底辅助耗尽效应带来的电荷非平衡问题.展开更多
An improved breakdown voltage (BV) SOI power MOSFET with a reduced cell pitch is proposed and fabricated. Its breakdown characteristics are investigated numerically and experimentally. The MOSFET features dual trenc...An improved breakdown voltage (BV) SOI power MOSFET with a reduced cell pitch is proposed and fabricated. Its breakdown characteristics are investigated numerically and experimentally. The MOSFET features dual trenches (DTMOS), an oxide trench between the source and drain regions, and a trench gate extended to the buried oxide (BOX). The proposed device has three merits. First, the oxide trench increases the electric field strength in the x-direction due to the lower permittivity of oxide (eox) than that of Si (esi). Furthermore, the trench gate, the oxide trench, and the BOX cause multi-directional depletion, improving the electric field distribution and enhancing the RESURF (reduced surface field) effect. Both increase the BV. Second, the oxide trench folds the drift region along the y-direction and thus reduces the cell pitch. Third, the trench gate not only reduces the on-resistance, but also acts as a field plate to improve the BV. Additionally, the trench gate achieves the isolation between high-voltage devices and the low voltage CMOS devices in a high-voltage integrated circuit (HVIC), effectively saving the chip area and simplifying the isolation process. An 180 V prototype DTMOS with its applied drive IC is fabricated to verify the mechanism.展开更多
A RESURF-enhanced high voltage SOl LDMOS (ER-LDMOS) with an ultralow specific on-resistance (Ron, sp) is proposed. The device features an oxide trench in the drift region, a P-pillar at the sidewall of the trench,...A RESURF-enhanced high voltage SOl LDMOS (ER-LDMOS) with an ultralow specific on-resistance (Ron, sp) is proposed. The device features an oxide trench in the drift region, a P-pillar at the sidewall of the trench, and a buried P-layer (BPL) under the trench. First, the P-pillar adjacent to the P-body not only acts as a vertical junction termination extension (JTE), but also forms a vertical reduced surface field (RESURF) structure with the N- drift region. Both of them optimize the bulk electric field distributions and increase the doping concentration of the drift region. Second, the BPL together with the N-drift region and the buried oxide layer (BOX) exhibits a triple- RESURF effect, which further improves the bulk field distributions and the doping concentration. Additionally, multiple-directional depletion is induced owing to the P-pillar, the BPL, and two MIS-like structures consisting of the N-drift region combined with the oxide trench and the BOX. As a result, a significantly enhanced-RESURF effect is achieved, leading to a high breakdown voltage (BV) and a low Ron, sp. Moreover, the oxide trench folds the drift region in the vertical direction, resulting in a reduced cell pitch and thus Ron, sp. Simulated results show that the ER-LDMOS improves BV by 67% and reduces Ron, sp by 91% compared with the conventional trench LDMOS at the same cell pitch.展开更多
A low specific on-resistance(R on;sp/ SOI NBL TLDMOS(silicon-on-insulator trench LDMOS with an N buried layer) is proposed. It has three features: a thin N buried layer(NBL) on the interface of the SOI layer/bur...A low specific on-resistance(R on;sp/ SOI NBL TLDMOS(silicon-on-insulator trench LDMOS with an N buried layer) is proposed. It has three features: a thin N buried layer(NBL) on the interface of the SOI layer/buried oxide(BOX) layer, an oxide trench in the drift region, and a trench gate extended to the BOX layer.First, on the on-state, the electron accumulation layer forms beside the extended trench gate; the accumulation layer and the highly doping NBL constitute an L-shaped low-resistance conduction path, which sharply decreases the R on;sp. Second, in the y-direction, the BOX's electric field(E-field) strength is increased to 154 V/ m from48 V/ m of the SOI Trench Gate LDMOS(SOI TG LDMOS) owing to the high doping NBL. Third, the oxide trench increases the lateral E-field strength due to the lower permittivity of oxide than that of Si and strengthens the multiple-directional depletion effect. Fourth, the oxide trench folds the drift region along the y-direction and thus reduces the cell pitch. Therefore, the SOI NBL TLDMOS structure not only increases the breakdown voltage(BV), but also reduces the cell pitch and R on;sp. Compared with the TG LDMOS, the NBL TLDMOS improves the BV by 105% at the same cell pitch of 6 m, and decreases the R on;sp by 80% at the same BV.展开更多
基金supported by the National Natural Science Foundation of China(Grant No.61376079)the Postdoctoral Science Foundation of China(GrantNo.2012T50771)the Postdoctoral Science Foundation of Chongqing City,China(Grant No.XM2012004)
文摘A low specific on-resistance SO1 LDMOS with a novel junction field plate (JFP) is proposed and investigated theo- retically. The most significant feature of the JFP LDMOS is a PP-N junction field plate instead of a metal field plate. The unique structure not only yields charge compensation between the JFP and the drift region, but also modulates the surface electric field. In addition, a trench gate extends to the buffed oxide layer (BOX) and thus widens the vertical conduction area. As a result, the breakdown voltage (BV) is improved and the specific on-resistance (Ron,sp) is decreased significantly. It is demonstrated that the BV of 306 V and the Ron,sp of 7.43 mΩ.cm2 are obtained for the JFP LDMOS. Compared with those of the conventional LDMOS with the same dimensional parameters, the BV is improved by 34.8%, and the Ron,sp is decreased by 56.6% simultaneously. The proposed JFP LDMOS exhibits significant superiority in terms of the trade-off between BV and Ron,sp. The novel JFP technique offers an alternative technique to achieve high blocking voltage and large current capacity for power devices.
基金Project supported by the National Natural Science Foundation of China (Grant Nos. 60806025 and 61176069 )the Program for New Century Excellent Talents in University of Ministry of Education of China (Grant No. NCET-11-0062)
文摘An ultra-low specific on-resistance trench gate vertical double-diffused metal-oxide semiconductor with a high-k dielectric-filled extended trench(HK TG VDMOS) is proposed in this paper.The HK TG VDMOS features a high-k(HK) trench below the trench gate.Firstly,the extended HK trench not only causes an assistant depletion of the n-drift region,but also optimizes the electric field,which therefore reduces Ron,sp and increases the breakdown voltage(BV).Secondly,the extended HK trench weakens the sensitivity of BV to the n-drift doping concentration.Thirdly,compared with the superjunction(SJ) vertical double-diffused metal-oxide semiconductor(VDMOS),the new device is simplified in fabrication by etching and filling the extended trench.The HK TG VDMOS with BV = 172 V and Ron,sp = 0.85 mΩ·cm2 is obtained by simulation;its Ron,sp is reduced by 67% and 40% and its BV is increased by about 15% and 5%,in comparison with those of the conventional trench gate VDMOS(TG VDMOS) and conventional superjunction trench gate VDMOS(SJ TG CDMOS).
基金Supported by the National Natural Science Foundation of China under Grant No 61376079the Fundamental Research Funds for the Central Universities under Grant No ZYGX2013J043
文摘An ultralow specific on-resistance (Ron,sp) trench metal-oxide-semiconductor field effect transistor (MOSFET) with an improved off-state breakdown voltage (BV) is proposed. It features a U-shaped gate around the drift region and an oxide trench inserted in the drift region (UG MOSFET). In the on-state, the U-shaped gate induces a high density electron accumulation layer along its sidewall, which provides a low-resistance current path from the source to the drain, realizing an ultralow Ron,sp. The value of Ron,sp is almost independent of the drift doping concentration, and thus the UG MOSFET breaks through the contradiction relationship between R p and the off-state BV. Moreover, the oxide trench folds the drift region, enabling the UG MOSFET to support a high BV with a shortened cell pitch. The UG MOSFET achieves an Ron,sp of 2 mΩ·cm^2 and an improved BV of 216 V, superior to the best existing state-of-the-art transistors at the same BV level
基金Project supported by the National Natural Science Foundation of China (Grant No. 61176069)the Science Foundation from the State Key Laboratory of Electronic Thin Films and Integrated Devices (Grant No. CXJJ201004)the Fund from the National Key Laboratory of Analog Integrated Circuit (Grant No. 9140C090304110C0905)
文摘A low specific on-resistance(Ron,sp) integrable silicon-on-insulator(SOI) metal-oxide semiconductor field-effect transistor(MOSFET) is proposed and investigated by simulation.The MOSFET features a recessed drain as well as dual gates,which consist of a planar gate and a trench gate extended to the buried oxide layer(BOX)(DGRD MOSFET).First,the dual gates form dual conduction channels,and the extended trench gate also acts as a field plate to improve the electric field distribution.Second,the combination of the trench gate and the recessed drain widens the vertical conduction area and shortens the current path.Third,the P-type top layer not only enhances the drift doping concentration but also modulates the surface electric field distributions.All of these sharply reduce Ron,sp and maintain a high breakdown voltage(BV).The BV of 233 V and Ron,sp of 4.151 mΩ·cm2(VGS = 15 V) are obtained for the DGRD MOSFET with 15-μm half-cell pitch.Compared with the trench gate SOI MOSFET and the conventional MOSFET,Ron,sp of the DGRD MOSFET decreases by 36% and 33% with the same BV,respectively.The trench gate extended to the BOX synchronously acts as a dielectric isolation trench,simplifying the fabrication processes.
基金supported by the National Natural Science Foundation of China (Grant No. 61176069)the State Key Laboratory Science Fund of Electronic Thin Films and Integrated Devices of China (Grant No. CXJJ201004)the National Key Laboratory Science Fund of Analog Integrated Circuit,China (Grant No. 9140C090304110C0905)
文摘A novel low specific on-resistance (Ron,sp) silicon-on-insulator (SO1) p-channel lateral double-diffused metal-oxide semiconductor (pLDMOS) compatible with high voltage (HV) n-channel LDMOS (nLDMOS) is proposed. The pLDMOS is built in the N-type SO1 layer with a buried P-type layer acting as a current conduction path in the on-state (BP SOl pLD- MOS). Its superior compatibility with the HV nLDMOS and low voltage (LV) complementary metal-oxide semiconductor (CMOS) circuitry which are formed on the N-SOl layer can be obtained. In the off-state the P-buried layer built in the NSOI layer causes multiple depletion and electric field reshaping, leading to an enhanced (reduced) surface field (RESURF) effect. The proposed BP SO1 pLDMOS achieves not only an improved breakdown voltage (BV) but also a significantly reduced Ron,sp. The BV of the BP SO1 pLDMOS increases to 319 V from 215 V of the conventional SO1 pLDMOS at the same half cell pitch of 25 μm, and Ron,sp decreases from 157 mΩ.cm2 to 55 mΩ.cm2. Compared with the PW SO1 pLDMOS, the BP SO1 pLDMOS also reduces the Ron,sp by 34% with almost the same BV.
基金Supported by the National Natural Science Foundation of China under Grant No 61176069the Program for New Century Excellent Talents in University of Ministry of Education of China(NCET-11-0062).
文摘A novel silicon-on-insulator(SOI)metal-oxide-semiconductor field effect transistor(MOSFET)with a high figure of merit(FOM)is proposed.The device features a double-sided charge oxide-trench(DCT)and a trench gate extended to the buried oxide.First,the oxide trench causes multiple-dimensional depletion in the drift region,which not only improves the electric field(E-field)strength,but also enhances the reduced surface field effect.Second,self-adaptive charges are collected in the DCT,which enhances the E-field strength of the trench oxide.Third,the oxide trench folds the drift region along the vertical direction,reducing the device cell pitch.Fourth,one side of the DCT regions acts as the body contact of p-well to reduce cell pitch and specific on-resistance(R_(on,sp))further.Compared with a trench gate lateral double-diffused MOSFET,the DCT MOSFET increases the breakdown voltage(BV)from 53 V to 158 V at the same cell pitch of 3.5μm,or reduces the cell pitch by 60%and Ron,sp by 70%at the same BV.The FOM(FOM=BV^(2)/Ron,sp)of the proposed structure is 23 MW/cm^(2).
文摘本文提出一种高k介质电导增强SOI LDMOS新结构(HK CE SOI LDMOS),并研究其机理.HK CE SOI LDMOS的特征是在漂移区两侧引入高k介质,反向阻断时,高k介质对漂移区进行自适应辅助耗尽,实现漂移区三维RESURF效应并调制电场,因而提高器件耐压和漂移区浓度并降低导通电阻.借助三维仿真研究耐压、比导通电阻与器件结构参数之间的关系.结果表明,HK CE SOI LDMOS与常规超结SOI LDMOS相比,耐压提高16%—18%,同时比导通电阻降低13%—20%,且缓解了由衬底辅助耗尽效应带来的电荷非平衡问题.
基金Projects supported by the National Natural Science Foundation of China(No.61176069)the Special Financial Gnants from the China Postdoctoral Science Foundation and Chongqing(Nos.2012T50771,XM2012004)
文摘An improved breakdown voltage (BV) SOI power MOSFET with a reduced cell pitch is proposed and fabricated. Its breakdown characteristics are investigated numerically and experimentally. The MOSFET features dual trenches (DTMOS), an oxide trench between the source and drain regions, and a trench gate extended to the buried oxide (BOX). The proposed device has three merits. First, the oxide trench increases the electric field strength in the x-direction due to the lower permittivity of oxide (eox) than that of Si (esi). Furthermore, the trench gate, the oxide trench, and the BOX cause multi-directional depletion, improving the electric field distribution and enhancing the RESURF (reduced surface field) effect. Both increase the BV. Second, the oxide trench folds the drift region along the y-direction and thus reduces the cell pitch. Third, the trench gate not only reduces the on-resistance, but also acts as a field plate to improve the BV. Additionally, the trench gate achieves the isolation between high-voltage devices and the low voltage CMOS devices in a high-voltage integrated circuit (HVIC), effectively saving the chip area and simplifying the isolation process. An 180 V prototype DTMOS with its applied drive IC is fabricated to verify the mechanism.
基金Project supported by the National Natural Science Foundation of China(Nos.61176069,61376079)
文摘A RESURF-enhanced high voltage SOl LDMOS (ER-LDMOS) with an ultralow specific on-resistance (Ron, sp) is proposed. The device features an oxide trench in the drift region, a P-pillar at the sidewall of the trench, and a buried P-layer (BPL) under the trench. First, the P-pillar adjacent to the P-body not only acts as a vertical junction termination extension (JTE), but also forms a vertical reduced surface field (RESURF) structure with the N- drift region. Both of them optimize the bulk electric field distributions and increase the doping concentration of the drift region. Second, the BPL together with the N-drift region and the buried oxide layer (BOX) exhibits a triple- RESURF effect, which further improves the bulk field distributions and the doping concentration. Additionally, multiple-directional depletion is induced owing to the P-pillar, the BPL, and two MIS-like structures consisting of the N-drift region combined with the oxide trench and the BOX. As a result, a significantly enhanced-RESURF effect is achieved, leading to a high breakdown voltage (BV) and a low Ron, sp. Moreover, the oxide trench folds the drift region in the vertical direction, resulting in a reduced cell pitch and thus Ron, sp. Simulated results show that the ER-LDMOS improves BV by 67% and reduces Ron, sp by 91% compared with the conventional trench LDMOS at the same cell pitch.
基金Project supported by the National Natural Science Foundation of China(No.61176069)the Program for New Century Excellent Talentsin University of Ministry of Education of China(No.NCET-11-0062)the China Postdoctoral Science Foundation(No.2012T50771)
文摘A low specific on-resistance(R on;sp/ SOI NBL TLDMOS(silicon-on-insulator trench LDMOS with an N buried layer) is proposed. It has three features: a thin N buried layer(NBL) on the interface of the SOI layer/buried oxide(BOX) layer, an oxide trench in the drift region, and a trench gate extended to the BOX layer.First, on the on-state, the electron accumulation layer forms beside the extended trench gate; the accumulation layer and the highly doping NBL constitute an L-shaped low-resistance conduction path, which sharply decreases the R on;sp. Second, in the y-direction, the BOX's electric field(E-field) strength is increased to 154 V/ m from48 V/ m of the SOI Trench Gate LDMOS(SOI TG LDMOS) owing to the high doping NBL. Third, the oxide trench increases the lateral E-field strength due to the lower permittivity of oxide than that of Si and strengthens the multiple-directional depletion effect. Fourth, the oxide trench folds the drift region along the y-direction and thus reduces the cell pitch. Therefore, the SOI NBL TLDMOS structure not only increases the breakdown voltage(BV), but also reduces the cell pitch and R on;sp. Compared with the TG LDMOS, the NBL TLDMOS improves the BV by 105% at the same cell pitch of 6 m, and decreases the R on;sp by 80% at the same BV.