Glancing incidence x-ray fluorescence spectrometry using a single-bounce parabolic capillary is proposed for the analysis of layered samples.The divergence of the x-ray beam was 0.33 mrad.In this paper,we used this in...Glancing incidence x-ray fluorescence spectrometry using a single-bounce parabolic capillary is proposed for the analysis of layered samples.The divergence of the x-ray beam was 0.33 mrad.In this paper,we used this instrumental setup to analyze a Si single crystal and a 50 nm HfO_(2) single-layer film deposited on a Si substrate.展开更多
A method to measure the detailed performance of polycapillary x-ray optics by a pinhole and charge coupled device(CCD)detector was proposed in this study.The pinhole was located between the x-ray source and the polyca...A method to measure the detailed performance of polycapillary x-ray optics by a pinhole and charge coupled device(CCD)detector was proposed in this study.The pinhole was located between the x-ray source and the polycapillary x-ray optics to determine the illuminating region of the incident x-ray beam on the input side of the optics.The CCD detector placed downstream of the polycapillary x-ray optics ensured that the incident x-ray beam controlled by the pinhole irradiated a specific region of the input surface of the optics.The intensity of the output beam of the polycapillary x-ray optics was obtained from the far-field image of the output beam of the optics captured by CCD detector.As an application example,the focal spot size,gain in power density,transmission efficiency,and beam divergence of different parts of a polycapillary focusing x-ray lenses(PFXRL)were measured by a pinhole and CCD detector.Three pinholes with diameters of 500,1000,and 2000μm were used to adjust the diameter of the incident x-ray beam illuminating the PFXRL from 500μm to the entire surface of the input side of the PFXRL.The focal spot size of the PFXRL,gain in power density,transmission efficiency,and beam divergence ranged from 27.1μm to 34.6μm,400 to 3460,26.70%to 5.38%,and 16.8 mrad to 84.86 mrad,respectively.展开更多
基金Project supported by the National Key Research and Development Program of China(Grant No.2021YFF0701202)the National Natural Science Foundation of China(Grant No.11875087)。
文摘Glancing incidence x-ray fluorescence spectrometry using a single-bounce parabolic capillary is proposed for the analysis of layered samples.The divergence of the x-ray beam was 0.33 mrad.In this paper,we used this instrumental setup to analyze a Si single crystal and a 50 nm HfO_(2) single-layer film deposited on a Si substrate.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.11675019,12105020,and 12075031)the Bud Project of Beijing Academy of Science and Technology(Grant No.BGS202106)the National Key Research and Development Program of China(Grant No.2021YFF0701202)
文摘A method to measure the detailed performance of polycapillary x-ray optics by a pinhole and charge coupled device(CCD)detector was proposed in this study.The pinhole was located between the x-ray source and the polycapillary x-ray optics to determine the illuminating region of the incident x-ray beam on the input side of the optics.The CCD detector placed downstream of the polycapillary x-ray optics ensured that the incident x-ray beam controlled by the pinhole irradiated a specific region of the input surface of the optics.The intensity of the output beam of the polycapillary x-ray optics was obtained from the far-field image of the output beam of the optics captured by CCD detector.As an application example,the focal spot size,gain in power density,transmission efficiency,and beam divergence of different parts of a polycapillary focusing x-ray lenses(PFXRL)were measured by a pinhole and CCD detector.Three pinholes with diameters of 500,1000,and 2000μm were used to adjust the diameter of the incident x-ray beam illuminating the PFXRL from 500μm to the entire surface of the input side of the PFXRL.The focal spot size of the PFXRL,gain in power density,transmission efficiency,and beam divergence ranged from 27.1μm to 34.6μm,400 to 3460,26.70%to 5.38%,and 16.8 mrad to 84.86 mrad,respectively.
