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Effect of a Boron Underlayer on the Ordering and Orientation of Sputtered FePt Film
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作者 LI Yong-Le HUANG An-Ping +4 位作者 feng tang-fu CHEN Qiang SHU Xiao-Lin CHEN Jun-Yang CHEN Zi-Yu 《Chinese Physics Letters》 SCIE CAS CSCD 2011年第6期273-275,共3页
FePt multilayer films with a boron underlayer are prepared on Si(100)substrates using magnetron sputtering and vacuum annealing is carried out to obtain the hard magnetic L10 phase.According to the microstructural and... FePt multilayer films with a boron underlayer are prepared on Si(100)substrates using magnetron sputtering and vacuum annealing is carried out to obtain the hard magnetic L10 phase.According to the microstructural and magnetic measurement results,the ordering of the FePt films is facilitated at low annealing temperatures while it is blocked at high ones by introducing boron.Moreover,(001)orientation of the samples is obviously improved by inserting a boron underlayer,which is further confirmed by the MFM analysis.The relevant mechanism is discussed by considering the diffusion of boron atoms and the consequential in-plane tensile stress. 展开更多
关键词 BORON ANNEALING MULTILAYER
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