High performance micromachining of sapphire by laser induced plasma assisted ablation(LIPAA)using GHz burst mode femtosecond pulses

GHz burst-mode femtosecond(fs)laser,which emits a series of pulse trains with extremely short intervals of several hundred picoseconds,provides distinct characteristics in materials processing as compared with the conventional irradiation scheme of fs laser(single-pulse mode).In this paper,we take advantage of the moderate pulse interval of 205 ps(4.88 GHz)in the burst pulse for high-quality and high-efficiency micromachining of single crystalline sapphire by laser induced plasma assisted ablation(LIPAA).Specifically,the preceding pulses in the burst generate plasma by ablation of copper placed behind the sapphire substrate,which interacts with the subsequent pulses to induce ablation at the rear surface of sapphire substrates.As a result,not only the ablation quality but also the ablation efficiency and the fabrication resolution are greatly improved compared to the other schemes including single-pulse mode fs laser direct ablation,single-pulse mode fs-LIPAA,and nanosecond-LIPAA.

Hierarchical microstructures with high spatial frequency laser induced periodic surface structures possessing different orientations created by femtosecond laser ablation of silicon in liquids

High spatial frequency laser induced periodic surface structures(HSFLs)on silicon substrates are often developed on flat surfaces at low fluences near ablation threshold of 0.1 J/cm2,seldom on microstructures or microgrooves at relatively higher fluences above 1 J/cm^2.This work aims to enrich the variety of HSFLs-containing hierarchical microstructures,by femtosecond laser(pulse duration:457 fs,wavelength:1045 nm,and repetition rate:100 kHz)in liquids(water and acetone)at laser fluence of 1.7 J/cm^2.The period of Si-HSFLs in the range of 110–200 nm is independent of the scanning speeds(0.1,0.5,1 and 2 mm/s),line intervals(5,15 and 20μm)of scanning lines and scanning directions(perpendicular or parallel to light polarization direction).It is interestingly found that besides normal HSFLs whose orientations are perpendicular to the direction of light polarization,both clockwise or anticlockwise randomly tilted HSFLs with a maximal deviation angle of 50°as compared to those of normal HSFLSs are found on the microstructures with height gradients.Raman spectra and SEM characterization jointly clarify that surface melting and nanocapillary waves play important roles in the formation of Si-HSFLs.The fact that no HSFLs are produced by laser ablation in air indicates that moderate melting facilitated with ultrafast liquid cooling is beneficial for the formation of HSFLs by LALs.On the basis of our findings and previous reports,a synergistic formation mechanism for HSFLs at high fluence was proposed and discussed,including thermal melting with the concomitance of ultrafast cooling in liquids,transformation of the molten layers into ripples and nanotips by surface plasmon polaritons(SPP)and second-harmonic generation(SHG),and modulation of Si-HSFLs direction by both nanocapillary waves and the localized electric field coming from the excited large Si particles.

Liquid vortexes and flows induced by femtosecond laser ablation in liquid governing formation of circular and crisscross LIPSS

Orientations of laser induced periodic surface structures(LIPSS)are usually considered to be governed by the laser polarization state.In this work,we unveil that fluid dynamics induced by femtosecond(fs)laser ablation in liquid(fs-LAL)can easily break this polarization restriction to produce irregular circular-LIPSS(CLIPPS)and crisscross-LIPSS(CCLIPSS).Fs laser ablation of silicon in water shows formation of diverse LIPSS depending on ablation conditions.At a high power of 700 mW(repetition rate of 100 kHz,pulse duration of 457 fs and wavelength of 1045 nm),single/twin CLIPSS are produced at the bottom of macropores of several microns in diameter due to the formation of strong liquid vortexes and occurrence of the vortex shedding effect.Theoretical simulations validate our speculation about the formation of liquid vortex with an ultrahigh static pressure,which can induce the microstructure trenches and cracks at the sidewalls for fs-LAL of Si and tungsten(W)in water,respectively.At a low power of 50 mW,weak liquid vortexes are produced,which only give birth to curved LIPSS in the valleys of grooves.Consequently,it is deduced that liquid vortex plays a crucial role in the formation of macropores.Mountain-like microstructures induce complex fluid dynamics which can cause the formation of CCLIPSS on them.It is believed that liquid vortexes and fluid dynamics presented in this work open up new possibilities to diversify the morphologies of LIPSS formed by fs-LAL.

fFabrication of three-dimensional proteinaceous micro- and nano-structures by femtosecond laser cross-linking

Proteins are a class of biomaterials having a vast array of functions, including the catalysis of metabolic reactions, DNA replication, stimuli response and transportation of molecules. Recent progress in laser-based fabrication technologies has enabled the formation of three-dimensional （3D） proteinaceous micro- and nano-structures by femtosecond laser cross-linking, which has expanded the possible applications of proteins. This article reviews the current knowledge andrecent advancements in the femtosecond laser cross-linking of proteins. An overview of previous studies related to fabri-cation using a variety of proteins and detailed discussions of the associated mechanisms are provided. In addition, ad-vances and applications utilizing specific protein functions are introduced. This review thus provides a valuable summaryof the 3D micro- and nano-fabrication of proteins for biological and medical applications.

Femtosecond laser shockwave peening ablation in liquids for hierarchical micro/nanostructuring of brittle silicon and its biological application

This paper presents a new technique,termed femtosecond laser shock peening ablation in liquids(fs-LSPAL),which can realize simultaneous crack micro/nanomanufacturing and hierarchical micro/nanolaser ablation,giving rise to the formation of diverse multiscale hierarchical structures,such as macroporous ratcheted structures and enéchelon microfringes decorated with parabolic nanoripples.Through analysis of surface morphologies,many phenomena have been confirmed to take place during fs-LSPAL,including enéchelon cracks,nanostriation,ripple densification,crack branching,and selective formation of high spatial frequency laser-induced periodic surface structures of 100–200 nm in period.At a high laser power of 700 mW,fs-LSPAL at scanning speeds of 0.2 mm s^-1 and 1 mm s^-1 enables the generation of height-fluctuated and height-homogeneous hierarchical structures,respectively.The height-fluctuated structures can be used to induce‘colony’aggregates of embryonic EB3 stem cells.At 200 mW,fs-LSPAL at 1 mm s^-1 is capable of producing homogeneous tilt macroporous structures with cracked structures interleaved among them,which are the synergistic effects of bubble-induced light refraction/reflection ablation and cracks.As shown in this paper,the conventional laser ablation technique integrated with its self-driven unconventional cracking under extreme conditions expands the horizons of extreme manufacturing and offers more opportunities for complex surface structuring,which can potentially be used for biological applications.

Two-dimensional laser-induced periodic surface structures formed on crystalline silicon by GHz burst mode femtosecond laser pulses

Femtosecond laser pulses with GHz burst mode that consist of a series of trains of ultrashort laser pulses with a pulse interval of several hundred picoseconds offer distinct features in material processing that cannot be obtained by the conventional irradiation scheme of femtosecond laser pulses(single-pulse mode).However,most studies using the GHz burst mode femtosecond laser pulses focus on ablation of materials to achieve high-efficiency and high-quality material removal.In this study,we explore the ability of the GHz burst mode femtosecond laser processing to form laser-induced periodic surface structures(LIPSS)on silicon.It is well known that the direction of LIPSS formed by the single-pulse mode with linearly polarized laser pulses is typically perpendicular to the laser polarization direction.In contrast,we find that the GHz burst mode femtosecond laser(wavelength:1030 nm,intra-pulse duration:220 fs,intra-pulse interval time(intra-pulse repetition rate):205 ps(4.88 GHz),burst pulse repetition rate:200 kHz)creates unique two-dimensional(2D)LIPSS.We regard the formation mechanism of 2D LIPSS as the synergetic contribution of the electromagnetic mechanism and the hydrodynamic mechanism.Specifically,generation of hot spots with highly enhanced electric fields by the localized surface plasmon resonance of subsequent pulses in the bursts within the nanogrooves of one-dimensional LIPSS formed by the preceding pulses creates 2D LIPSS.Additionally,hydrodynamic instability including convection flow determines the final structure of 2D LIPSS.

Enhanced ablation efficiency for silicon by femtosecond laser microprocessing with GHz bursts in MHz bursts(BiBurst)

Ultrashort laser pulses confine material processing to the laser-irradiated area by suppressing heat diffusion,resulting in precise ablation in diverse materials.However,challenges occur when high speed material removal and higher ablation efficiencies are required.Ultrafast burst mode laser ablation has been proposed as a successful method to overcome these limitations.Following this approach,we studied the influence of combining GHz bursts in MHz bursts,known as Bi Burst mode,on ablation efficiency of silicon.Bi Burst mode used in this study consists of multiple bursts happening at a repetition rate of 64 MHz,each of which contains multiple pulses with a repetition rate of 5 GHz.The obtained results show differences between Bi Burst mode and conventional single pulse mode laser ablation,with a remarkable increase in ablation efficiency for the Bi Burst mode,which under optimal conditions can ablate a volume4.5 times larger than the single pulse mode ablation while delivering the same total energy in the process.

GHz bursts in MHz burst(BiBurst) enabling high-speed femtosecond laser ablation of silicon due to prevention of air ionization

For the practical use of femtosecond laser ablation, inputs of higher laser intensity are preferred to attain high-throughput material removal. However, the use of higher laser intensities for increasing ablation rates can have detrimental effects on ablation quality due to excess heat generation and air ionization. This paper employs ablation using BiBurst femtosecond laser pulses, which consist of multiple bursts(2 and 5 bursts) at a repetition rate of 64 MHz, each containing multiple intra-pulses(2–20 pulses) at an ultrafast repetition rate of 4.88 GHz, to overcome these conflicting conditions. Ablation of silicon substrates using the BiBurst mode with 5 burst pulses and 20 intra-pulses successfully prevents air breakdown at packet energies higher than the pulse energy inducing the air ionization by the conventional femtosecond laser pulse irradiation(single-pulse mode). As a result, ablation speed can be enhanced by a factor of23 without deteriorating the ablation quality compared to that by the single-pulse mode ablation under the conditions where the air ionization is avoided.

Underwater persistent bubble-assisted femtosecond laser ablation for hierarchical micro/nanostructuring

In this study,we demonstrate a technique termed underwater persistent bubble assisted femtosecond laser ablation in liquids(UPB-fs-LAL)that can greatly expand the boundaries of surface micro/nanostructuring through laser ablation because of its capability to create concentric circular macrostructures with millimeter-scale tails on silicon substrates.Long-tailed macrostructures are composed of layered fan-shaped(central angles of 45°–141°)hierarchical micro/nanostructures,which are produced by fan-shaped beams refracted at the mobile bubble interface(.50°light tilt,referred to as the vertical incident direction)during UPB-fs-LAL line-by-line scanning.Marangoni flow generated during UPB-fs-LAL induces bubble movements.Fast scanning(e.g.1mms−1)allows a long bubble movement(as long as 2mm),while slow scanning(e.g.0.1mms−1)prevents bubble movements.When persistent bubbles grow considerably(e.g.hundreds of microns in diameter)due to incubation effects,they become sticky and can cause both gas-phase and liquidphase laser ablation in the central and peripheral regions of the persistent bubbles.This generates low/high/ultrahigh spatial frequency laser-induced periodic surface structures(LSFLs/HSFLs/UHSFLs)with periods of 550–900,100–200,40–100 nm,which produce complex hierarchical surface structures.A period of 40 nm,less than 1/25th of the laser wavelength(1030 nm),is the finest laser-induced periodic surface structures(LIPSS)ever created on silicon.The NIR-MIR reflectance/transmittance of fan-shaped hierarchical structures obtained by UPB-fs-LAL at a small line interval(5μm versus 10μm)is extremely low,due to both their extremely high light trapping capacity and absorbance characteristics,which are results of the structures’additional layers and much finer HSFLs.In the absence of persistent bubbles,only grooves covered with HSFLs with periods larger than 100 nm are produced,illustrating the unique attenuation abilities of laser properties(e.g.repetition rate,energy,incident angle,etc)by persistent bubbles with different curvatures.This research represents a straightforward and cost-effective approach to diversifying the achievable hierarchical micro/nanostructures for a multitude of applications.

Hybrid femtosecond laser three-dimensional micro-and nanoprocessing:a review

The extremely high peak intensity associated with ultrashort pulse width of femtosecond(fs)lasers enabled inducing nonlinear multiphoton absorption in materials that are transparent to the laser wavelength.More importantly,focusing the fs laser beam inside the transparent materials confined the nonlinear interaction to within the focal volume only,realizing three-dimensional(3D)micro/nanofabrication.This 3D capability offers three different processing schemes for use in fabrication:undeformative,subtractive,and additive.Furthermore,a hybrid approach of different schemes can create much more complex 3D structures and thereby promises to enhance the functionality of the structures created.Thus,hybrid fs laser 3D microprocessing opens a new door for material processing.This paper comprehensively reviews different types of hybrid fs laser 3D micro/nanoprocessing for diverse applications including fabrication of functional micro/nanodevices.

Will GHz burst mode create a new path to femtosecond laser processing?

The GHz burst mode of femtosecond laser pulses can significantly improve ablation efficiency without deteriorating ablation quality.However,various parameters involved in GHz burst mode make it difficult to optimize the processing for practical implementation.In this Perspective,the author gives the history,current status,and future challenges and prospects of this new strategy to answer the question,'will GHz burst mode create a new path to femtosecond laser processing?'

Label-free trace detection of bio-molecules by liquid-interface assisted surface-enhanced Raman scattering using a microfluidic chip

Surface-enhanced Raman scattering(SERS),owing to its high sensitivity based on localized surface plasmon resonance of nanostructured metals,is recently attracting much attention to be used for biotechnology,such as cell imaging and tumor therapy.On the other hand,the trace detection of bio-molecules with large molecular weight is still challenging because the troublesome treatment of SERS substrate using coupling or cross-linking agents is required.In this paper,we apply liquid interface assisted SERS(LI-SERS)method,which provides unique features of collection and self-immobilization of analyte molecules on the SERS substrate,to realize the label-free trace detection of bio-molecules with detection limits of pM~fM.Specifically,deoxyribonucleic acid(DNA)discrimination and quantitative detection ofβ-Amyloid(Aβ)in trace-concentration are demonstrated to illustrate the ultrahigh sensitivity and versatility of the LI-SERS method.The results suggest LI-SERS is promising for the early-stage diagnosis of diseases such as virus infection and Alzheimer's disease.

Ultrafast lasers—reliable tools for advanced materials processing

The unique characteristics of ultrafast lasers,such as picosecond and femtosecond lasers,have opened up new avenues in materials processing that employ ultrashort pulse widths and extremely high peak intensities.Thus,ultrafast lasers are currently used widely for both fundamental research and practical applications.This review describes the characteristics of ultrafast laser processing and the recent advancements and applications of both surface and volume processing.Surface processing includes micromachining,microand nanostructuring,and nanoablation,while volume processing includes two-photon polymerization and three-dimensional(3D)processing within transparent materials.Commercial and industrial applications of ultrafast laser processing are also introduced,and a summary of the technology with future outlooks are also given.

In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

The high-precision integration of three-dimensional(3D)microoptical components into microfluidics in a customizable manner is crucial for optical sensing,fluorescence analysis,and cell detection in optofluidic applications;however,it remains challenging for current microfabrication technologies.This paper reports the in-channel integration of flexible two-dimensional(2D)and 3D polymer microoptical devices into glass microfluidics by developing a novel technique:flat scaffold-supported hybrid femtosecond laser microfabrication(FSS-HFLM).The scaffold with an optimal thickness of 1–5 μm is fabricated on the lower internal surface of a microfluidic channel to improve the integration of high-precision microoptical devices on the scaffold by eliminating any undulated internal channel surface caused by wet etching.As a proof of demonstration,two types of typical microoptical devices,namely,2D Fresnel zone plates(FZPs)and 3D refractive microlens arrays(MLAs),are integrated.These devices exhibit multicolor focal spots,elongated(>three times)focal length and imaging of the characters‘RIKEN’in a liquid channel.The resulting optofluidic chips are further used for coupling-free white-light cell counting with a success rate as high as 93%.An optofluidic system with two MLAs and a W-filter is also designed and fabricated for more advanced cell filtering/counting applications.

Controllable alignment of elongated microorganisms in 3D microspace using electrofluidic devices manufactured by hybrid femtosecond laser microfabrication

This paper presents a simple technique to fabricate new electrofluidic devices for the three-dimensional(3D)manipulation of microorganisms by hybrid subtractive and additive femtosecond(fs)laser microfabrication(fs laser-assisted wet etching of glass followed by water-assisted fs laser modification combined with electroless metal plating).The technique enables the formation of patterned metal electrodes in arbitrary regions in closed glass microfluidic channels,which can spatially and temporally control the direction of electric fields in 3D microfluidic environments.The fabricated electrofluidic devices were applied to nanoaquariums to demonstrate the 3D electro-orientation of Euglena gracilis(an elongated unicellular microorganism)in microfluidics with high controllability and reliability.In particular,swimming Euglena cells can be oriented along the z-direction(perpendicular to the device surface)using electrodes with square outlines formed at the top and bottom of the channel,which is quite useful for observing the motions of cells parallel to their swimming directions.Specifically,z-directional electric field control ensured efficient observation of manipulated cells on the front side(45 cells were captured in a minute in an imaging area of~160×120μm),resulting in a reduction of the average time required to capture the images of five Euglena cells swimming continuously along the z-direction by a factor of~43 compared with the case of no electric field.In addition,the combination of the electrofluidic devices and dynamic imaging enabled observation of the flagella of Euglena cells,revealing that the swimming direction of each Euglena cell under the electric field application was determined by the initial body angle.

Recent Advances in the Fabrication of Highly Sensitive Surface-Enhanced Raman Scattering Substrates:Nanomolar to Attomolar Level Sensing

Surface-enhanced Raman scattering(SERS)techniques have rapidly advanced over the last two decades,permitting multidisciplinary trace analyses and the potential detection of single molecules.This paper provides a comprehensive review of recent progress in strategies for the fabrication of highly sensitive SERS substrates,as a means of achieving sensing on the attomolar scale.The review examines widely used performance criteria,such as enhancement factors.In addition,femtosecond laser-based techniques are discussed as a versatile tool for the fabrication of SERS substrates.Several approaches for enhancing the performance of SERS sensing devices are also introduced,including photo-induced,transient,and liquid-interface assisted strategies.Finally,substrates for real-time sensing and biological applications are also reviewed to demonstrate the powerful analytical capabilities of these methods and the significant progress in SERS research.

Multilayered skyscraper microchipsfabricated by hybrid “all-in-one”femtosecond laser processing

Multilayered microfluidic channels integrated with functional microcomponents are the general trend of future biochips,which is similar to the history of Si-integrated circuits from the planer to the three-dimensional(3D)configuration,since they offer miniaturization while increasing the integration degree and diversifying the applications in the reaction,catalysis,and cell cultures.In this paper,an optimized hybrid processing technology is proposed to create true multilayered microchips,by which“all-in-one”3D microchips can be fabricated with a successive procedure of 3D glass micromachining by femtosecond-laser-assisted wet etching(FLAE)and the integration of microcomponents into the fabricated microchannels by two-photon polymerization(TPP).To create the multilayered microchannels at different depths in glass substrates(the top layer was embedded at 200μm below the surface,and the underlying layers were constructed with a 200-μm spacing)with high uniformity and quality,the laser power density(13~16.9 TW/cm^(2))was optimized to fabricate different layers.To simultaneously complete the etching of each layer,which is also important to ensure the high uniformity,the control layers(nonlaser exposed regions)were prepared at the upper ends of the longitudinal channels.Solvents with different dyes were used to verify that each layer was isolated from the others.The high-quality integration was ensured by quantitatively investigating the experimental conditions in TPP,including the prebaking time(18~40 h),laser power density(2.52~3.36 TW/cm2)and developing time(0.8~4 h),all of which were optimized for each channel formed at different depths.Finally,the eightlayered microfluidic channels integrated with polymer microstructures were successfully fabricated to demonstrate the unique capability of this hybrid technique.