resistance,and adhesive strength of vacuum-arc multi-period NbN/Cu coatings is studied.It was found that in thin layers(about 8 nm,in a constant rotation mode),regardless of the change in the pressure of the nitrogen ...resistance,and adhesive strength of vacuum-arc multi-period NbN/Cu coatings is studied.It was found that in thin layers(about 8 nm,in a constant rotation mode),regardless of the change in the pressure of the nitrogen atmosphere,a metastableδ-NbN phase forms(cubic crystal lattice of the NaCl type).At a layer thickness of^40 nm or more,a phase composition changes from the metastableδ-NbN to the equilibriumε-NbN phase with a hexagonal crystal lattice.In the presence of theε-NbN phase in the niobium nitride layers,the highest adhesive strength is achieved with a value of LС5=96.5 N.Corrosion resistance tests have shown that for all the studied samples the corrosion process has mainly an anodic reaction.The highest corrosion resistance was shown by coatings obtained at a pressure of 7·10-4 Torr,with the smallest bias potential of-50 V and the smallest layer thickness;with a thickness of such a coating of about 10 microns,its service life in the environment of the formation of chloride ions is about a year.展开更多
文摘resistance,and adhesive strength of vacuum-arc multi-period NbN/Cu coatings is studied.It was found that in thin layers(about 8 nm,in a constant rotation mode),regardless of the change in the pressure of the nitrogen atmosphere,a metastableδ-NbN phase forms(cubic crystal lattice of the NaCl type).At a layer thickness of^40 nm or more,a phase composition changes from the metastableδ-NbN to the equilibriumε-NbN phase with a hexagonal crystal lattice.In the presence of theε-NbN phase in the niobium nitride layers,the highest adhesive strength is achieved with a value of LС5=96.5 N.Corrosion resistance tests have shown that for all the studied samples the corrosion process has mainly an anodic reaction.The highest corrosion resistance was shown by coatings obtained at a pressure of 7·10-4 Torr,with the smallest bias potential of-50 V and the smallest layer thickness;with a thickness of such a coating of about 10 microns,its service life in the environment of the formation of chloride ions is about a year.
