Femtosecond laser-induced periodic surface structures(LIPSS)have been extensively studied over the past few decades.In particular,the period and groove width of high-spatial-frequency LIPSS(HSFL)is much smaller than t...Femtosecond laser-induced periodic surface structures(LIPSS)have been extensively studied over the past few decades.In particular,the period and groove width of high-spatial-frequency LIPSS(HSFL)is much smaller than the diffraction limit,making it a useful method for efficient nanomanufacturing.However,compared with the low-spatial-frequency LIPSS(LSFL),the structure size of the HSFL is smaller,and it is more easily submerged.Therefore,the formation mechanism of HSFL is complex and has always been a research hotspot in this field.In this study,regular LSFL with a period of 760 nm was fabricated in advance on a silicon surface with two-beam interference using an 800 nm,50 fs femtosecond laser.The ultrafast dynamics of HSFL formation on the silicon surface of prefabricated LSFL under single femtosecond laser pulse irradiation were observed and analyzed for the first time using collinear pump-probe imaging method.In general,the evolution of the surface structure undergoes five sequential stages:the LSFL begins to split,becomes uniform HSFL,degenerates into an irregular LSFL,undergoes secondary splitting into a weakly uniform HSFL,and evolves into an irregular LSFL or is submerged.The results indicate that the local enhancement of the submerged nanocavity,or the nanoplasma,in the prefabricated LSFL ridge led to the splitting of the LSFL,and the thermodynamic effect drove the homogenization of the splitting LSFL,which evolved into HSFL.展开更多
Over the past two decades,femtosecond laser-induced periodic structures(femtosecond-LIPSs)have become ubiquitous in a variety of materials,including metals,semiconductors,dielectrics,and polymers.Femtosecond-LIPSs hav...Over the past two decades,femtosecond laser-induced periodic structures(femtosecond-LIPSs)have become ubiquitous in a variety of materials,including metals,semiconductors,dielectrics,and polymers.Femtosecond-LIPSs have become a useful laser processing method,with broad prospects in adjusting material properties such as structural color,data storage,light absorption,and luminescence.This review discusses the formation mechanism of LIPSs,specifically the LIPS formation processes based on the pump-probe imaging method.The pulse shaping of a femtosecond laser in terms of the time/frequency,polarization,and spatial distribution is an efficient method for fabricating high-quality LIPSs.Various LIPS applications are also briefly introduced.The last part of this paper discusses the LIPS formation mechanism,as well as the high-efficiency and high-quality processing of LIPSs using shaped ultrafast lasers and their applications.展开更多
基金supports from the National Natural Science Foundation of China(12074123,12174108)the Foundation of‘Manufacturing beyond limits’of Shanghai‘Talent Program'of Henan Academy of Sciences.
文摘Femtosecond laser-induced periodic surface structures(LIPSS)have been extensively studied over the past few decades.In particular,the period and groove width of high-spatial-frequency LIPSS(HSFL)is much smaller than the diffraction limit,making it a useful method for efficient nanomanufacturing.However,compared with the low-spatial-frequency LIPSS(LSFL),the structure size of the HSFL is smaller,and it is more easily submerged.Therefore,the formation mechanism of HSFL is complex and has always been a research hotspot in this field.In this study,regular LSFL with a period of 760 nm was fabricated in advance on a silicon surface with two-beam interference using an 800 nm,50 fs femtosecond laser.The ultrafast dynamics of HSFL formation on the silicon surface of prefabricated LSFL under single femtosecond laser pulse irradiation were observed and analyzed for the first time using collinear pump-probe imaging method.In general,the evolution of the surface structure undergoes five sequential stages:the LSFL begins to split,becomes uniform HSFL,degenerates into an irregular LSFL,undergoes secondary splitting into a weakly uniform HSFL,and evolves into an irregular LSFL or is submerged.The results indicate that the local enhancement of the submerged nanocavity,or the nanoplasma,in the prefabricated LSFL ridge led to the splitting of the LSFL,and the thermodynamic effect drove the homogenization of the splitting LSFL,which evolved into HSFL.
基金This work was supported by the National Natural Science Foundation of China(12074123,11804227,91950112)the Ministry of Science and Technology of China(Grant No.2021YFA1401100)the Foundation of‘Manufacturing beyond limits’of Shanghai.
文摘Over the past two decades,femtosecond laser-induced periodic structures(femtosecond-LIPSs)have become ubiquitous in a variety of materials,including metals,semiconductors,dielectrics,and polymers.Femtosecond-LIPSs have become a useful laser processing method,with broad prospects in adjusting material properties such as structural color,data storage,light absorption,and luminescence.This review discusses the formation mechanism of LIPSs,specifically the LIPS formation processes based on the pump-probe imaging method.The pulse shaping of a femtosecond laser in terms of the time/frequency,polarization,and spatial distribution is an efficient method for fabricating high-quality LIPSs.Various LIPS applications are also briefly introduced.The last part of this paper discusses the LIPS formation mechanism,as well as the high-efficiency and high-quality processing of LIPSs using shaped ultrafast lasers and their applications.