Interdigital MnO_(2)/PEDOT Alternating Stacked Microelectrodes for High-Performance On-Chip Microsupercapacitor and Humidity Sensing

For microelectronic devices,the on-chip microsupercapacitors with facile construction and high performance,are attracting researchers'prior consideration due to their high compatibility with modern microsystems.Herein,we proposed interchanging interdigital Au-/MnO_(2)/polyethylene dioxythiophene stacked microsupercapacitor based on a microfabrication process followed by successive electrochemical deposition.The stacked configuration of two pseudocapacitive active microelectrodes meritoriously leads to an enhanced contact area between MnO_(2)and the conductive and electroactive layer of polyethylene dioxythiophene,hence providing excellent electron transport and diffusion pathways of electrolyte ions,resulting in increased pseudocapacitance of MnO_(2)and polyethylene dioxythiophene.The stacked quasi-solid-state microsupercapacitors delivered the maximum specific capacitance of 43 mF cm^(-2)(211.9 F cm^(-3)),an energy density of 3.8μWh cm^(-2)(at a voltage window of 0.8 V)and 5.1μWh cm^(-2)(at a voltage window of 1.0 V)with excellent rate capability(96.6%at 2 mA cm^(-2))and cycling performance of 85.3%retention of initial capacitance after 10000 consecutive cycles at a current density of 5 mA cm^(-2),higher than those of ever reported polyethylene dioxythiophene and MnO_(2)-based planar microsupercapacitors.Benefiting from the favorable morphology,bilayer microsupercapacitor is utilized as a flexible humidity sensor with a response/relaxation time superior to those of some commercially available integrated microsensors.This strategy will be of significance in developing high-performance on-chip integrated microsupercapacitors/microsensors at low cost and environment-friendly routes.

Pushing the Electrochemical Performance Limits of Polypyrrole Toward Stable Microelectronic Devices

Conducting polymers have achieved remarkable attentions owing to their exclusive characteristics,for instance,electrical conductivity,high ionic conductivity,visual transparency,and mechanical tractability.Surface and nanostructure engineering of conjugated conducting polymers offers an exceptional pathway to facilitate their implementation in a variety of scientific claims,comprising energy storage and production devices,flexible and wearable optoelectronic devices.A two-step tactic to assemble high-performance polypyrrole(PPy)-based microsupercapacitor(MSC)is utilized by transforming the current collectors to suppress structural pulverization and increase the adhesion of PPy,and then electrochemical co-deposition of PPy-CNT nanostructures on rGO@Au current collectors is performed.The resulting fine patterned MSC conveyed a high areal capacitance of 65.9 mF cm^(−2)(at a current density of 0.1 mA cm^(−2)),an exceptional cycling performance of retaining 79%capacitance after 10,000 charge/discharge cycles at 5 mA cm^(−2).Benefiting from the intermediate graphene,current collector free PPy-CNT@rGO flexible MSC is produced by a facile transfer method on a flexible substrate,which delivered an areal capacitance of 70.25 mF cm^(−2) at 0.1 mA cm^(−2) and retained 46%of the initial capacitance at a current density of 1.0 mA cm^(−2).The flexible MSC is utilized as a skin compatible capacitive micro-strain sensor with excellent electromechanochemical characteristics.