Micro-LEDs(μLEDs)have advantages in terms of brightness,power consumption,and response speed.In addition,they can also be used as micro-sensors implanted in the body via flexible electronic skin.One of the key techni...Micro-LEDs(μLEDs)have advantages in terms of brightness,power consumption,and response speed.In addition,they can also be used as micro-sensors implanted in the body via flexible electronic skin.One of the key techniques involved in the fabrication ofμLED-based devices is transfer printing.Although numerous methods have been proposed for transfer printing,improving the yield ofμLED arrays is still a formidable task.In this paper,we propose a novel method for improving the yield ofμLED arrays transferred by the stamping method,using an innovative design of piezoelectrically driven asymmetric micro-gripper.Traditional grippers are too large to manipulateμLEDs,and therefore two micro-sized cantilevers are added at the gripper tips.AμLED manipulation system is constructed based on the micro-gripper together with a three-dimensional positioning system.Experimental results using this system show that it can be used successfully to manipulateμLED arrays.展开更多
基金support from the Scientific Research Program of the Tianjin Education Commission(No.2019ZD08).
文摘Micro-LEDs(μLEDs)have advantages in terms of brightness,power consumption,and response speed.In addition,they can also be used as micro-sensors implanted in the body via flexible electronic skin.One of the key techniques involved in the fabrication ofμLED-based devices is transfer printing.Although numerous methods have been proposed for transfer printing,improving the yield ofμLED arrays is still a formidable task.In this paper,we propose a novel method for improving the yield ofμLED arrays transferred by the stamping method,using an innovative design of piezoelectrically driven asymmetric micro-gripper.Traditional grippers are too large to manipulateμLEDs,and therefore two micro-sized cantilevers are added at the gripper tips.AμLED manipulation system is constructed based on the micro-gripper together with a three-dimensional positioning system.Experimental results using this system show that it can be used successfully to manipulateμLED arrays.