A Maxwellian electron energy distribution function （EEDF） is often assumed when using the optical emission line-ratio method to determine the electron temperature in low- temperature plasmas. However, in many cases,...A Maxwellian electron energy distribution function （EEDF） is often assumed when using the optical emission line-ratio method to determine the electron temperature in low- temperature plasmas. However, in many cases, non-Maxwellian EEDFs can be formed due to the non-local electron heating or the inelastic-collisional energy loss processes. In this work, with a collisional-radiative model, we propose an approach to obtain the non-Maxwellian EEDF with a ＇two-temperature structure＇ from the emission line-ratios of Paschen 2p levels of argon and kryp- ton atoms. For applications of this approach in reactive gas （CF4, O2, etc） discharges that contain argon and krypton, recommendations of some specific emission line-ratios are provided, according to their sensitivities to the EEDF variation. The kinetic processes of the relevant excited atoms are also discussed in detail.展开更多
Armed with four different steady-state collisional-radiative(CR) models,we investigated the effect of dielectronic recombination(DR) on the charge-state distribution in laser-produced silicon plasma. To assess this ef...Armed with four different steady-state collisional-radiative(CR) models,we investigated the effect of dielectronic recombination(DR) on the charge-state distribution in laser-produced silicon plasma. To assess this effect,we performed a series of temporally resolved spectra of highly charged Si ions in the extreme ultraviolet region.Ab initio calculations of the DR rate coefficients were done for Si^(6+)–Si^(4+) ions. We also analyzed the evolution of the collisional ionization, radiative recombination, three-body recombination, photo-ionization, and DR rate coefficients as a function of electron temperature. The electron temperature and electron density for different delay times were obtained by comparing the normalized experimental and simulated spectra. The ion fraction and average charge state from the four different CR models were also obtained. The results indicate that the DR process has a greater influence in the stage of plasma evolution that cannot be neglected in plasma diagnoses.展开更多
This paper proposes a simple collisional-radiative model to characterise capacitively coupled argon plasmas driven by conventional radio frequency in combination with optical emission spectroscopy and Langmuir probe m...This paper proposes a simple collisional-radiative model to characterise capacitively coupled argon plasmas driven by conventional radio frequency in combination with optical emission spectroscopy and Langmuir probe measurements. Two major processes are considered in this model, electron-impact excitation and the spontaneous radiative decay. The diffusion loss term, which is found to be important for the two metastable states （4s[3/2]2, 4s＇[1/2]0）, is also taken into account. Behaviours of representative metastable and radiative states are discussed. Two emission lines （located at 696.5 nm and 750.4 nm） are selected and intensities are measured to obtain populated densities of the corresponding radiative states in the argon plasma. The calculated results agree well with that measured by Langmuir probe, indicating that the current model combined with optical emission spectroscopy is a candidate tool for electron density and temperature measurement in radio frequency capacitively coupled discharges.展开更多
介绍了CRM系统的相关知识,阐述了数据仓库技术在CRM系统中应用的必然性,给出了一个基于数据仓库技术的分析型CRM系统的体系结构图,并且针对某网上书店,以客户购买主题为例,提出了该分析型CRM系统中客户信息数据仓库模型的设计方案,具体...介绍了CRM系统的相关知识,阐述了数据仓库技术在CRM系统中应用的必然性,给出了一个基于数据仓库技术的分析型CRM系统的体系结构图,并且针对某网上书店,以客户购买主题为例,提出了该分析型CRM系统中客户信息数据仓库模型的设计方案,具体阐述了概念模型设计、逻辑模型设计和物理模型设计,并以MS SQL Server 2000平台为基础,给出了具体的实现,在企业引入分析型CRM系统时为构建数据仓库提供了参考依据。展开更多
基金supported by National Natural Science Foundation of China （Nos. 11075093 and 10935006） and the China Postdoctoral Science Foundation （No. 20100480327）
文摘A Maxwellian electron energy distribution function （EEDF） is often assumed when using the optical emission line-ratio method to determine the electron temperature in low- temperature plasmas. However, in many cases, non-Maxwellian EEDFs can be formed due to the non-local electron heating or the inelastic-collisional energy loss processes. In this work, with a collisional-radiative model, we propose an approach to obtain the non-Maxwellian EEDF with a ＇two-temperature structure＇ from the emission line-ratios of Paschen 2p levels of argon and kryp- ton atoms. For applications of this approach in reactive gas （CF4, O2, etc） discharges that contain argon and krypton, recommendations of some specific emission line-ratios are provided, according to their sensitivities to the EEDF variation. The kinetic processes of the relevant excited atoms are also discussed in detail.
基金supported by the National Key Research and Development Program of China (Grant No. 2017YFA0402300)National Natural Science Foundation of China (NSFC) (Grant Nos. 11904293, 11874051)。
文摘Armed with four different steady-state collisional-radiative(CR) models,we investigated the effect of dielectronic recombination(DR) on the charge-state distribution in laser-produced silicon plasma. To assess this effect,we performed a series of temporally resolved spectra of highly charged Si ions in the extreme ultraviolet region.Ab initio calculations of the DR rate coefficients were done for Si^(6+)–Si^(4+) ions. We also analyzed the evolution of the collisional ionization, radiative recombination, three-body recombination, photo-ionization, and DR rate coefficients as a function of electron temperature. The electron temperature and electron density for different delay times were obtained by comparing the normalized experimental and simulated spectra. The ion fraction and average charge state from the four different CR models were also obtained. The results indicate that the DR process has a greater influence in the stage of plasma evolution that cannot be neglected in plasma diagnoses.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.10635010 and 10775103)
文摘This paper proposes a simple collisional-radiative model to characterise capacitively coupled argon plasmas driven by conventional radio frequency in combination with optical emission spectroscopy and Langmuir probe measurements. Two major processes are considered in this model, electron-impact excitation and the spontaneous radiative decay. The diffusion loss term, which is found to be important for the two metastable states （4s[3/2]2, 4s＇[1/2]0）, is also taken into account. Behaviours of representative metastable and radiative states are discussed. Two emission lines （located at 696.5 nm and 750.4 nm） are selected and intensities are measured to obtain populated densities of the corresponding radiative states in the argon plasma. The calculated results agree well with that measured by Langmuir probe, indicating that the current model combined with optical emission spectroscopy is a candidate tool for electron density and temperature measurement in radio frequency capacitively coupled discharges.
文摘介绍了CRM系统的相关知识,阐述了数据仓库技术在CRM系统中应用的必然性,给出了一个基于数据仓库技术的分析型CRM系统的体系结构图,并且针对某网上书店,以客户购买主题为例,提出了该分析型CRM系统中客户信息数据仓库模型的设计方案,具体阐述了概念模型设计、逻辑模型设计和物理模型设计,并以MS SQL Server 2000平台为基础,给出了具体的实现,在企业引入分析型CRM系统时为构建数据仓库提供了参考依据。
