期刊文献+
共找到1篇文章
< 1 >
每页显示 20 50 100
A Brief Overview of Research on Chemical Molecular Contamination in Cleanrooms
1
作者 Cai Jie 《China Standardization》 2010年第4期10-13,共4页
This review proposes associated standards from abroad regarding chemical contamination of the air, and has analyzed the formation of chemical air pollution, the common contaminants and the testing methods of projects.... This review proposes associated standards from abroad regarding chemical contamination of the air, and has analyzed the formation of chemical air pollution, the common contaminants and the testing methods of projects. This paper demonstrates the capability of China to begin commercial testing of chemical contamination of the air. In addition, it offers technological references of the feasibility for adopting the international standard ISO14644-8:2006. 展开更多
关键词 AIR molecular contamination tests and analysis.
下载PDF
上一页 1 下一页 到第
使用帮助 返回顶部