Precise temperature control to decrease movements in positions due to thermal expansion of work pieces is required in the manufacturing processes to achieve nanometer-order accuracy. We analytically examined the effec...Precise temperature control to decrease movements in positions due to thermal expansion of work pieces is required in the manufacturing processes to achieve nanometer-order accuracy. We analytically examined the effect of a method of minimizing movements in positions on a plate with varying generation of noise-heat. Control by monitoring temperature changes caused larger movements in positions than that without control because maximum change in temperature occurred at non-monitoring positions. The best method of minimizing movements in positions due to thermal expansion of a plate with varying generation of noise-heat was model predictive control by the monitoring movements and distributed temperature changes in the control heater according to the effects of the generation of noise-heat. The maximum movement in positions was 6 nm, which was 1/4 times of that without control.展开更多
文摘Precise temperature control to decrease movements in positions due to thermal expansion of work pieces is required in the manufacturing processes to achieve nanometer-order accuracy. We analytically examined the effect of a method of minimizing movements in positions on a plate with varying generation of noise-heat. Control by monitoring temperature changes caused larger movements in positions than that without control because maximum change in temperature occurred at non-monitoring positions. The best method of minimizing movements in positions due to thermal expansion of a plate with varying generation of noise-heat was model predictive control by the monitoring movements and distributed temperature changes in the control heater according to the effects of the generation of noise-heat. The maximum movement in positions was 6 nm, which was 1/4 times of that without control.
