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Design and implementation of digital closed-loop drive control system of a MEMS gyroscope 被引量:5
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作者 王晓雷 李宏生 杨波 《Journal of Southeast University(English Edition)》 EI CAS 2012年第1期35-40,共6页
In order to effectively control the working state of the gyroscope in drive mode, the drive characteristics of the micro electromechanical system (MEMS) gyroscope are analyzed in principle. A novel drive circuit for... In order to effectively control the working state of the gyroscope in drive mode, the drive characteristics of the micro electromechanical system (MEMS) gyroscope are analyzed in principle. A novel drive circuit for the MEMS gyroscope in digital closed-loop control is proposed, which utilizes a digital phase-locked loop (PLL) in frequency control and an automatic gain control (AGC) method in amplitude control. A digital processing circuit with a field programmable gate array (FPGA) is designed and the experiments are carried out. The results indicate that when the temperature changes, the drive frequency can automatically track the resonant frequency of gyroscope in drive mode and that of the oscillating amplitude holds at a set value. And at room temperature, the relative deviation of the drive frequency is 0.624 ×10^-6 and the oscillating amplitude is 8.0 ×10^-6, which are 0. 094% and 18. 39% of the analog control program, respectively. Therefore, the control solution of the digital PLL in frequency and the AGC in amplitude is feasible. 展开更多
关键词 micro electromechanical system (MEMS) digitalgyroscope drive frequency phase-locked loop (PLL) oscillating amplitude automatic gain control (AGC)
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