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用于微波/射频集成电路的一种新型低损耗介质——多孔硅及氧化多孔硅厚膜 被引量:5
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作者 龙永福 朱自强 +2 位作者 赖宗声 忻佩胜 石艳玲 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2002年第6期609-613,共5页
提出在单片微波集成电路 (MMIC)中用多孔硅 /氧化多孔硅厚膜作微波无源器件的低损耗介质膜 .研究了厚度为 70μm的多孔硅 /氧化多孔硅厚膜在低阻硅衬底上的形成 ,这层厚膜增加了衬底的电阻率 ,减少了微波的有效介质损耗 .通过测量在低... 提出在单片微波集成电路 (MMIC)中用多孔硅 /氧化多孔硅厚膜作微波无源器件的低损耗介质膜 .研究了厚度为 70μm的多孔硅 /氧化多孔硅厚膜在低阻硅衬底上的形成 ,这层厚膜增加了衬底的电阻率 ,减少了微波的有效介质损耗 .通过测量在低阻硅衬底上形成的氧化多孔硅厚膜上的共平面波导的微波特性 ,证明了在低阻硅衬底上用厚膜氧化多孔硅可以提高共平面传输线 (CPW) 展开更多
关键词 集成电路 微波/射频 多孔硅/氧化多孔硅 介质膜 损耗
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微机械微波/射频开关的制备和功能测量研究 被引量:6
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作者 茅惠兵 忻佩胜 +1 位作者 胡梅丽 赖宗声 《半导体技术》 CAS CSCD 北大核心 2002年第11期11-14,共4页
讨论了微机械微波/射频开关的原理、制备工艺和功能测试。微机械接触式微波/射频开关的基本结构是微波共平面波导,在制备工艺中首先考虑的是工艺兼容性,为此选择以PECVD生长的氮化硅为悬臂梁,聚酰亚胺为牺牲层。功能测试表明,该工艺制... 讨论了微机械微波/射频开关的原理、制备工艺和功能测试。微机械接触式微波/射频开关的基本结构是微波共平面波导,在制备工艺中首先考虑的是工艺兼容性,为此选择以PECVD生长的氮化硅为悬臂梁,聚酰亚胺为牺牲层。功能测试表明,该工艺制备的微机械开关的执行电压只有25V,优于同类微机械开关的指标,同时它具有良好的响应特性。 展开更多
关键词 功能测量 微机械 微波/射频开关 悬臂梁 共平面波导 无线通信设备
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SiGe HBT的发展及其在微波/射频通讯中的应用 被引量:5
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作者 周卫 刘道广 严利人 《微电子学》 CAS CSCD 北大核心 2006年第5期552-558,共7页
经过二十年的发展,SiGe HBT技术已经广泛应用于微波/射频通讯领域。它的快速发展首先得益于外延技术的提高,其次是它与硅工艺完全兼容,特别是与CMOS工艺兼容的特性,以及微波/射频通讯市场的巨大需求。文章简要回顾了SiGe HBT的发展过程... 经过二十年的发展,SiGe HBT技术已经广泛应用于微波/射频通讯领域。它的快速发展首先得益于外延技术的提高,其次是它与硅工艺完全兼容,特别是与CMOS工艺兼容的特性,以及微波/射频通讯市场的巨大需求。文章简要回顾了SiGe HBT的发展过程,认为SiGe技术今后将成为混合信号通讯系统SOC集成的技术平台。 展开更多
关键词 SiGe外延 SIGE HBT SIGE BICMOS 微波/射频通讯
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微波/射频基材产品与市场发展新观察——“EDI CON China2015”覆铜板参展厂商专访记 被引量:2
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作者 祝大同 《覆铜板资讯》 2015年第3期13-19,共7页
本文以"2015年电子设计创新展会"为视角,对全球微波/射频(RF)用基材产品、技术与市场发展现况,作了报道与综述。
关键词 微波/射频 覆铜板 印制电路板(PCB) 聚四氟乙烯(PTFE)
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基于Rydberg原子的超宽频带射频传感器 被引量:10
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作者 焦月春 赵建明 贾锁堂 《物理学报》 SCIE EI CAS CSCD 北大核心 2018年第7期117-125,共9页
Rydberg原子具有极大的极化率和微波跃迁偶极矩,对外界电磁场非常敏感,可实现基于Rydberg原子的超宽频带射频电场的高分辨高灵敏测量.通过Rydberg原子的全光学无损的电磁感应透明探测手段,可以实现基于原子的快速免校准宽频带(0.01-1000... Rydberg原子具有极大的极化率和微波跃迁偶极矩,对外界电磁场非常敏感,可实现基于Rydberg原子的超宽频带射频电场的高分辨高灵敏测量.通过Rydberg原子的全光学无损的电磁感应透明探测手段,可以实现基于原子的快速免校准宽频带(0.01-1000 GHz)外电场的精密测量.对于频率大于1 GHz的微波场,由微波场耦合相邻Rydberg能级形成的Autler-Townes分裂进行测量;而对于频率小于1 GHz的长波射频场,由Rydberg能级的射频边带能级进行测量.这种方法是基于原子能级参数,可溯源到基本物理常量,不依赖于外界参考;且对电场无干扰,易于实现微型化和集成化,具有广泛的应用前景.本文主要综述了基于Rydberg原子的外电场测量的最新研究进展,重点介绍长波长射频场的测量,包括电场强度、频率以及极化方向的测量,详细介绍了其测量原理和探测灵敏度,并讨论了其应用前景及未来发展方向. 展开更多
关键词 RYDBERG原子 微波/射频传感器 量子相干效应
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EXPERIMENTAL STUDY ON SOIL MOISTURE USING DUAL-FREQUENCY MICROWAVE RADIOMETER 被引量:2
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作者 GUAN Zhi ZHAO Kai SONG Dong-sheng 《Chinese Geographical Science》 SCIE CSCD 2006年第1期83-86,共4页
An experiment of measuring soil moisture was carried out by using dual-frequency microwave radiometer designed by the authors. The measured data were analyzed by using statistical regression method and the empirical r... An experiment of measuring soil moisture was carried out by using dual-frequency microwave radiometer designed by the authors. The measured data were analyzed by using statistical regression method and the empirical regression model of retrieving soil moisture in L-band and C-band was developed. The soil moisture in a rainfall event was retrieved using the experiential regression model, which is consistent well with the field sampling value. The results show that when soil moisture is lower than 75%, the brightness temperature is linear with soil moisture. However, when soil moisture is higher than 75%, the brightness temperature is not linear with soil moisture, so it is difficult for microwave radiometer to measure the changes of soil moisture. The experiment verifies the effectiveness and feasibility of microwave remote sensing soil moisture. Although this method for linear regression based on the data measured with the radiometer is simple, and has strong adaptability, generally it has only local application value, and lacks universal applicability for different areas and different conditions. 展开更多
关键词 soil moisture dual-frequency microwave radiometer brightness temperature
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RESEARCH ON CYLINDRICAL BOX TYPE WINDOWS USED TO TRANSMIT HIGH POWER CW 被引量:1
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作者 LinFumin DingYaogen +1 位作者 ShenBin XuShouxi 《Journal of Electronics(China)》 2004年第5期392-400,共9页
The formula for calculating the threshold of average transmitting power of cylindrical TE11 mode window is revised by accurate deduction and a practical method for calculating the temperature increment of the dielectr... The formula for calculating the threshold of average transmitting power of cylindrical TE11 mode window is revised by accurate deduction and a practical method for calculating the temperature increment of the dielectric disk in cylindrical box type window is given. Meanwhile,a typical cylindrical box type window is calculated and used as an example to discuss the power capacity, the special harmfulness and elimination of ghost mode resonance when the window is used to transmit high power Continuous Wave(CW). 展开更多
关键词 High power Continuous Wave(CW) Microwave window Dielectric disk in window RF loss Power capacity Ghost mode
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Microwave Reflectometry on HL-2A Tokamak
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作者 LIU Zetian XIAO Weiwen DING Xuantong CAO Jianyong SHI Zhongbing LI Yingliang LU Jie LUO Cuiwen 《Southwestern Institute of Physics Annual Report》 2005年第1期32-34,共3页
One of the most important electron density diagnostics, microwave reflectometry, has been developed on many large and medium nuclear fusion devices in recent years . Not only the electron density profiles with high te... One of the most important electron density diagnostics, microwave reflectometry, has been developed on many large and medium nuclear fusion devices in recent years . Not only the electron density profiles with high temporal and spatial resolutions, but also the profiles of plasma rotation and turbulence can be obtained with this diagnostic system. 展开更多
关键词 Microwave scanning frequency RF modulation reflection and receiver
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Microwave Diagnostics for Studies of Electromagnetic Scattering by Fluorescent Lamp Plasma
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作者 何湘 陈建平 +4 位作者 吴莹 陈玉东 曾小军 秦海潮 倪晓武 《Journal of Measurement Science and Instrumentation》 CAS 2010年第1期54-57,共4页
This paper rerports a related microwave diagnostic methhod that measures both the electron number density and the electron-neu- tral collision frequency, which are crucial to understand the behavior of microwave trave... This paper rerports a related microwave diagnostic methhod that measures both the electron number density and the electron-neu- tral collision frequency, which are crucial to understand the behavior of microwave traveling in plasma. Arrays of standard commercial fluoresoent lamp placed directly against each other in two rows are used to produce a plasma layer. Attenuations of microwave by plasma layer are studied experimentally in the frequencies of 1--8 C44z using a synthesized signal generator and a spectnnn analyzer. Two wavepolarizations are trader investigation: dectric field of the wave is either parallel ( E -wave) or perpendicular (H-wave) to the fluorescent lamp axis. The electron number density and the electron-neutral collision frequency of fluorescent lamp plasma are obtained by microwave diagnostics, for the purpose of analyzing microwave scattering characteristics by plasma. 展开更多
关键词 PLASMA MICROWAVE microwave diagnostics ATTENUATION ABSORPTION
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