本文通过模拟 L i Nb O3电光调制器的电传输特性 ,提出了厚电极共面波导 (CPW)行波电极微波损耗的经验公式 ,在此基础上研究了带宽为 16 0 GHz的调制器的微波损耗因素。结果表明 ,辐射损耗将占重要地位 ,而且小的电极尺寸更易实现宽带...本文通过模拟 L i Nb O3电光调制器的电传输特性 ,提出了厚电极共面波导 (CPW)行波电极微波损耗的经验公式 ,在此基础上研究了带宽为 16 0 GHz的调制器的微波损耗因素。结果表明 ,辐射损耗将占重要地位 ,而且小的电极尺寸更易实现宽带调制。展开更多
Three kinds of coplanar waveguides (CPWs) are designed and fabricated on different silicon substrates---common low-resistivity silicon substrate (LRS), LRS with a 3μm-thick silicon oxide interlayer, and high-resi...Three kinds of coplanar waveguides (CPWs) are designed and fabricated on different silicon substrates---common low-resistivity silicon substrate (LRS), LRS with a 3μm-thick silicon oxide interlayer, and high-resistivity silicon (HRS) substrate. The results show that the microwave loss of a CPW on LRS is too high to be used, but it can be greatly reduced by adding a thick interlayer of silicon oxide between the CPW transmission lines and the LRS.A CPW directly on HRS shows a loss lower than 2dB/cm in the range of 0-26GHz and the process is simple,so HRS is a more suitable CPW substrate.展开更多
文摘Three kinds of coplanar waveguides (CPWs) are designed and fabricated on different silicon substrates---common low-resistivity silicon substrate (LRS), LRS with a 3μm-thick silicon oxide interlayer, and high-resistivity silicon (HRS) substrate. The results show that the microwave loss of a CPW on LRS is too high to be used, but it can be greatly reduced by adding a thick interlayer of silicon oxide between the CPW transmission lines and the LRS.A CPW directly on HRS shows a loss lower than 2dB/cm in the range of 0-26GHz and the process is simple,so HRS is a more suitable CPW substrate.