In the realm of near-infrared spectroscopy,the detection of molecules has been achieved using on-chip waveguides and resonators.In the mid-infrared band,the integration and sensitivity of chemical sensing chips are of...In the realm of near-infrared spectroscopy,the detection of molecules has been achieved using on-chip waveguides and resonators.In the mid-infrared band,the integration and sensitivity of chemical sensing chips are often constrained by the reliance on off-chip light sources and detectors.In this study,we demonstrate an InAs/GaAsSb superlattice mid-infrared waveguide integrated detector.The GaAsSb waveguide layer and the InAs/GaAsSb superlattice absorbing layer are connected through evanescent coupling,facilitating efficient and highquality detection of mid-infrared light with minimal loss.We conducted a simulation to analyze the photoelectric characteristics of the device.Additionally,we investigated the factors that affect the integration of the InAs/GaAs⁃Sb superlattice photodetector and the GaAsSb waveguide.Optimal thicknesses and lengths for the absorption lay⁃er are determined.When the absorption layer has a thickness of 0.3μm and a length of 50μm,the noise equiva⁃lent power reaches its minimum value,and the quantum efficiency can achieve a value of 68.9%.The utilization of waveguide detectors constructed with Ⅲ-Ⅴ materials offers a more convenient means of integrating mid-infra⁃red light sources and achieving photoelectric detection chips.展开更多
We propose a fiber-to-waveguide coupler for side-illuminated p-i-n photodiodes to obtain high responsivity and low polarization dependence that is grown on InP substrate and is suitable for surface hybrid integration ...We propose a fiber-to-waveguide coupler for side-illuminated p-i-n photodiodes to obtain high responsivity and low polarization dependence that is grown on InP substrate and is suitable for surface hybrid integration in low cost modules. The fiber-to-waveguide coupler is based on a diluted waveguide,which is composed of ten periods of undoped 120nm InP/80nm InGaAsP （1.05μm bandgap） multiple layers. Using the semi-vectorial three dimensional beam propagation method （BPM） with the central difference scheme,the coupling efficiency of fiber-to-waveguide under different conditions is simulated and studied,and the optimized conditions for fiber-to-waveguide coupling are obtained. For TE-like and TM-like modes,the calculated maximum coupling efficiency is higher than 94% and 92% ,respectively. The calculated polarization dependence is less than 0. ldB,showing good polarization independence.展开更多
Uncooled In As Sb photoconductors were fabricated. The photoconductors were based on In As0.05Sb0.95 and In As0.09Sb0.91 thick epilayers grown on In As substrates by melt epitaxy(ME). Ge immersion lenses were set on t...Uncooled In As Sb photoconductors were fabricated. The photoconductors were based on In As0.05Sb0.95 and In As0.09Sb0.91 thick epilayers grown on In As substrates by melt epitaxy(ME). Ge immersion lenses were set on the photoconductors. The cutoff wavelength of In As0.09Sb0.91 detectors is obviously extended to 11.5 μm, and that of In As0.05Sb0.95 detectors is 8.3 μm. At room temperature, the peak detectivity of Dλp* at wavelength of 6.8 μm and modulation frequency of 1 200 Hz is 1.08×109 cm·Hz1/2·W-1 for In As0.09Sb0.91 photoconductors, the detectivity D* at wavelength of 9 μm is 7.56×108 cm·Hz1/2·W-1, and that at 11 μm is 3.92×108 cm·Hz1/2·W-1. The detectivity of In As0.09Sb0.91 detectors at the wavelengths longer than 9 μm is about one order of magnitude higher than that of In As0.05Sb0.95 detectors, which rises from the increase of arsenic(As) composition in In As0.09Sb0.91 materials.展开更多
基金Supported by the National Natural Science Foundation of China(NSFC)(61904183,61974152,62104237,62004205)the Youth Innovation Promotion Association of the Chinese Academy of Sciences(Y202057)+1 种基金Shanghai Science and Technology Committee Rising-Star Program(20QA1410500)Shanghai Sail Plans(21YF1455000)。
文摘In the realm of near-infrared spectroscopy,the detection of molecules has been achieved using on-chip waveguides and resonators.In the mid-infrared band,the integration and sensitivity of chemical sensing chips are often constrained by the reliance on off-chip light sources and detectors.In this study,we demonstrate an InAs/GaAsSb superlattice mid-infrared waveguide integrated detector.The GaAsSb waveguide layer and the InAs/GaAsSb superlattice absorbing layer are connected through evanescent coupling,facilitating efficient and highquality detection of mid-infrared light with minimal loss.We conducted a simulation to analyze the photoelectric characteristics of the device.Additionally,we investigated the factors that affect the integration of the InAs/GaAs⁃Sb superlattice photodetector and the GaAsSb waveguide.Optimal thicknesses and lengths for the absorption lay⁃er are determined.When the absorption layer has a thickness of 0.3μm and a length of 50μm,the noise equiva⁃lent power reaches its minimum value,and the quantum efficiency can achieve a value of 68.9%.The utilization of waveguide detectors constructed with Ⅲ-Ⅴ materials offers a more convenient means of integrating mid-infra⁃red light sources and achieving photoelectric detection chips.
文摘We propose a fiber-to-waveguide coupler for side-illuminated p-i-n photodiodes to obtain high responsivity and low polarization dependence that is grown on InP substrate and is suitable for surface hybrid integration in low cost modules. The fiber-to-waveguide coupler is based on a diluted waveguide,which is composed of ten periods of undoped 120nm InP/80nm InGaAsP （1.05μm bandgap） multiple layers. Using the semi-vectorial three dimensional beam propagation method （BPM） with the central difference scheme,the coupling efficiency of fiber-to-waveguide under different conditions is simulated and studied,and the optimized conditions for fiber-to-waveguide coupling are obtained. For TE-like and TM-like modes,the calculated maximum coupling efficiency is higher than 94% and 92% ,respectively. The calculated polarization dependence is less than 0. ldB,showing good polarization independence.
基金supported by the Fundamental Research Funds for the Central Universities in China
文摘Uncooled In As Sb photoconductors were fabricated. The photoconductors were based on In As0.05Sb0.95 and In As0.09Sb0.91 thick epilayers grown on In As substrates by melt epitaxy(ME). Ge immersion lenses were set on the photoconductors. The cutoff wavelength of In As0.09Sb0.91 detectors is obviously extended to 11.5 μm, and that of In As0.05Sb0.95 detectors is 8.3 μm. At room temperature, the peak detectivity of Dλp* at wavelength of 6.8 μm and modulation frequency of 1 200 Hz is 1.08×109 cm·Hz1/2·W-1 for In As0.09Sb0.91 photoconductors, the detectivity D* at wavelength of 9 μm is 7.56×108 cm·Hz1/2·W-1, and that at 11 μm is 3.92×108 cm·Hz1/2·W-1. The detectivity of In As0.09Sb0.91 detectors at the wavelengths longer than 9 μm is about one order of magnitude higher than that of In As0.05Sb0.95 detectors, which rises from the increase of arsenic(As) composition in In As0.09Sb0.91 materials.
