This paper proposes a novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design. The principles of fuzzy reliability and Taguchi design are both introduc...This paper proposes a novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design. The principles of fuzzy reliability and Taguchi design are both introduced and described in detail. Experimental results demonstrate that the signal to noise ratio of the robust design scheme is better than those of the other experimental schemes.Over the full temperature range from -40 to 80°C, the temperature sensitivities of phase margin, gain margin, sensitivity margin,the maximum amplitude of open loop system, bandwidth of closed loop system, and the performance function of the robust design system are all smaller than those of the original design system. Meanwhile, the temperature sensitivity of the bandwidth of the robust design system is improved to 126 from 1075 ppm/°C. Moreover, the bias drift over the full temperature range of the robust design system is improved to 61°/h from 179°/h.展开更多
We propose a novel pressure sensor based on the combination of the ring resonator with two straight waveguides and a two-end fixed beam.The principle of this device is acquiring the system static pressure by monitorin...We propose a novel pressure sensor based on the combination of the ring resonator with two straight waveguides and a two-end fixed beam.The principle of this device is acquiring the system static pressure by monitoring the changes in the transmission wavelength shift of the ring resonator with double waveguides.The numerical results show that the sensitivity of the system is up to 49.3 pm/kPa while the pressure range is 0—300 kPa.The thickness of the fixed beam is an important factor which impacts the sensitivity of the system.This device can provide support for fabricating high sensitivity and low cost micro pressure sensors.展开更多
基金supported by the National Natural Science Foundation of China (Grant Nos. 61434003 & 51505089)
文摘This paper proposes a novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design. The principles of fuzzy reliability and Taguchi design are both introduced and described in detail. Experimental results demonstrate that the signal to noise ratio of the robust design scheme is better than those of the other experimental schemes.Over the full temperature range from -40 to 80°C, the temperature sensitivities of phase margin, gain margin, sensitivity margin,the maximum amplitude of open loop system, bandwidth of closed loop system, and the performance function of the robust design system are all smaller than those of the original design system. Meanwhile, the temperature sensitivity of the bandwidth of the robust design system is improved to 126 from 1075 ppm/°C. Moreover, the bias drift over the full temperature range of the robust design system is improved to 61°/h from 179°/h.
基金supported by the National Natural Science Foundation of China(No.6172044)the Natural Science Foundation of Hebei Province(No.F2012203204)
文摘We propose a novel pressure sensor based on the combination of the ring resonator with two straight waveguides and a two-end fixed beam.The principle of this device is acquiring the system static pressure by monitoring the changes in the transmission wavelength shift of the ring resonator with double waveguides.The numerical results show that the sensitivity of the system is up to 49.3 pm/kPa while the pressure range is 0—300 kPa.The thickness of the fixed beam is an important factor which impacts the sensitivity of the system.This device can provide support for fabricating high sensitivity and low cost micro pressure sensors.
