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晶圆电镀装备研发关键技术及其表界面基础
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作者 冯磊 董经纬 +5 位作者 赖锋 郑佳兴 高润钰 游乐星 方建辉 孙建军 《中国科学:化学》 CAS CSCD 北大核心 2023年第10期1922-1939,共18页
电镀在半导体金属化和封装工艺中扮演着重要的角色.本文综述了晶圆电镀装备的发展历程,针对电镀装备研发中涉及的表界面基础和技术问题,如金属表界面的性质、电极界面的反应、多物理场耦合等对镀层质量和均匀度的影响及其解决方案进行... 电镀在半导体金属化和封装工艺中扮演着重要的角色.本文综述了晶圆电镀装备的发展历程,针对电镀装备研发中涉及的表界面基础和技术问题,如金属表界面的性质、电极界面的反应、多物理场耦合等对镀层质量和均匀度的影响及其解决方案进行了概述.最后对晶圆电镀装备的未来发展进行了展望,希望对我国晶圆电镀装备的研发提供参考. 展开更多
关键词 晶圆电镀 表界面基础 电镀装备 半导体
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Analysis of the complex morphology of sediment particle surface based on electron microscope images 被引量:9
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作者 CHEN ZhiHe FANG HongWei 《Science China(Technological Sciences)》 SCIE EI CAS 2013年第2期280-285,共6页
The morphology of sediment particles plays an important role in interfacial interactions.The difficulties in complex morphological description significantly limit the research on interfacial interactions.In this study... The morphology of sediment particles plays an important role in interfacial interactions.The difficulties in complex morphological description significantly limit the research on interfacial interactions.In this study,images of a single sediment particle extracted from electron microscope photos were used to analyze the gray values and present the probability of shape of the sediment particles.Moreover,the morphological features of the sediment particles were qualitatively described using the fractal method(surface area-volume method).The fractal dimension D of a single sediment particle was calculated to analyze the features and quantitative complexity of the sediment particle morphology.Results indicate that the probability of shape can provide intuitive morphological structure and fully describe the complex morphological characteristics of sediment particle surfaces.The fractal dimension abstractly described the complexity of the morphology of a sediment particle surface and matched well with the experimental results.The methods discussed in this study are suitable for describing the complex morphology of the sediment particle surface and lay the scientific foundation for further research on the interfacial interaction between the sediment particle and the pollutant. 展开更多
关键词 sediment particles surface morphology probability of shape fractal dimension
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