为了有效简化表面光栅耦合器的制备工艺和降低制备难度,设计了一种互补金属氧化物半导体(CMOS)工艺兼容的高效氮化硅表面光栅耦合器,采用二维时域有限差分(2D-FDTD)算法对耦合器的结构进行了建模、优化和仿真,计算并对比了不同结构的耦...为了有效简化表面光栅耦合器的制备工艺和降低制备难度,设计了一种互补金属氧化物半导体(CMOS)工艺兼容的高效氮化硅表面光栅耦合器,采用二维时域有限差分(2D-FDTD)算法对耦合器的结构进行了建模、优化和仿真,计算并对比了不同结构的耦合器光谱特性。研究结果表明:在标准绝缘体上硅(SOI)晶圆上,借助于CMOS后道工艺,所设计的氮化硅表面光栅耦合器在通信波长1550 nm附近的最高耦合效率为-3.36 d B,-3 d B带宽为101 nm。展开更多
With interfering illumination of Ar++ laser beams (488 nm),surface relief gratings (SRGs) were photo-inscribed on epoxy-based azo polymer (BP-AZ-CN) films.The modulation depth was about 160 nm and the spatial period w...With interfering illumination of Ar++ laser beams (488 nm),surface relief gratings (SRGs) were photo-inscribed on epoxy-based azo polymer (BP-AZ-CN) films.The modulation depth was about 160 nm and the spatial period was about 670 nm.The quartz slides covered with SRG films were assembled to liquid crystal (LC) cell to study the LC alignment behavior.Homogeneous liquid crystal alignment was observed in the surface relief gratings regions of the LC cell.Alignment of LC molecules was monitored by measuring the transmittance passing through the cell between crossed polarizers as a function of the angle of the cell rotating around the experiment optical axis.The transmittance changed periodically with a regular 90° separation of the rotational angle and the pretilt angle of the cell was found to be 3.2°.This alignment technique could have useful applications in the future LC displays.展开更多
文摘为了有效简化表面光栅耦合器的制备工艺和降低制备难度,设计了一种互补金属氧化物半导体(CMOS)工艺兼容的高效氮化硅表面光栅耦合器,采用二维时域有限差分(2D-FDTD)算法对耦合器的结构进行了建模、优化和仿真,计算并对比了不同结构的耦合器光谱特性。研究结果表明:在标准绝缘体上硅(SOI)晶圆上,借助于CMOS后道工艺,所设计的氮化硅表面光栅耦合器在通信波长1550 nm附近的最高耦合效率为-3.36 d B,-3 d B带宽为101 nm。
文摘With interfering illumination of Ar++ laser beams (488 nm),surface relief gratings (SRGs) were photo-inscribed on epoxy-based azo polymer (BP-AZ-CN) films.The modulation depth was about 160 nm and the spatial period was about 670 nm.The quartz slides covered with SRG films were assembled to liquid crystal (LC) cell to study the LC alignment behavior.Homogeneous liquid crystal alignment was observed in the surface relief gratings regions of the LC cell.Alignment of LC molecules was monitored by measuring the transmittance passing through the cell between crossed polarizers as a function of the angle of the cell rotating around the experiment optical axis.The transmittance changed periodically with a regular 90° separation of the rotational angle and the pretilt angle of the cell was found to be 3.2°.This alignment technique could have useful applications in the future LC displays.
