According to the international technology roadmap for semiconductors （ITRS）,32nm technology node will be introduced around 2009. Scaling of CMOS logic devices from 45 to 32nm node has come across significant barrier...According to the international technology roadmap for semiconductors （ITRS）,32nm technology node will be introduced around 2009. Scaling of CMOS logic devices from 45 to 32nm node has come across significant barriers. Overcoming these pitch-scaling induced barriers requires integrating the most advanced process technologies into product manufacturing. This paper reviews and discusses new technology applications that could be potentially integrated into 32nm node in the following areas：extension of immersion lithography,mobility enhancement substrate technology,metal/ high-k （MHK） gate stack, ultra-shallow junction （USJ） and other strain enhancement engineering methods, including stress proximity effect （SPT）, dual stress liner （DSL）, stress memorization technique （SMT）, high aspect ratio process （HARP） for STI and PMD,embedded SiGe （for pFET） and SiC （for nFET） source/drain （S/D） using selective epitaxial growth （SEG） method,metallization for middle of line （MOL） and back-end of line （BEOL） ,and ultra low-k （ULK） integration.展开更多
A 32 Gb/s monolithically integrated electroabsorption modulated laser is fabricated by selective area growth technology. The threshold current of the device is below 13mA. The output power exceeds 10mW at 0V bias when...A 32 Gb/s monolithically integrated electroabsorption modulated laser is fabricated by selective area growth technology. The threshold current of the device is below 13mA. The output power exceeds 10mW at 0V bias when the injection current of the distributed feedback laser is 100mA at 25℃. The side mode suppression ratio is over 50 dB. A 32Gb/s eye diagram is measured with a 3.SVpp nonreturn-to-zero pseudorandom modulation signal at -2.3 V bias. A clearly opening eyediagram with a dynamic extinction ratio of 8.01 dB is obtained.展开更多
This paper describes the incremental PID control algorithm and the basic principles of motor soft start, and introduced STM32F103RB8 basic performance microcontroller, combined with incremental PID control advantages,...This paper describes the incremental PID control algorithm and the basic principles of motor soft start, and introduced STM32F103RB8 basic performance microcontroller, combined with incremental PID control advantages, and gives MCU in motor soft start process control application. Practice shows that the incremental PID applications, simplifying the control ideas to improve the performance of the current loop control, limiting the starting current, smooth start-up speed, and achieved good results motor start.展开更多
文摘According to the international technology roadmap for semiconductors （ITRS）,32nm technology node will be introduced around 2009. Scaling of CMOS logic devices from 45 to 32nm node has come across significant barriers. Overcoming these pitch-scaling induced barriers requires integrating the most advanced process technologies into product manufacturing. This paper reviews and discusses new technology applications that could be potentially integrated into 32nm node in the following areas：extension of immersion lithography,mobility enhancement substrate technology,metal/ high-k （MHK） gate stack, ultra-shallow junction （USJ） and other strain enhancement engineering methods, including stress proximity effect （SPT）, dual stress liner （DSL）, stress memorization technique （SMT）, high aspect ratio process （HARP） for STI and PMD,embedded SiGe （for pFET） and SiC （for nFET） source/drain （S/D） using selective epitaxial growth （SEG） method,metallization for middle of line （MOL） and back-end of line （BEOL） ,and ultra low-k （ULK） integration.
基金Supported by the National High-Technology Research and Development Program of China under Grant Nos 2011AA010303and 2012AA012203the National Basic Research Program of China under Grant No 2011CB301702the National Natural Science Foundation of China under Grant Nos 61321063 and 6132010601
文摘A 32 Gb/s monolithically integrated electroabsorption modulated laser is fabricated by selective area growth technology. The threshold current of the device is below 13mA. The output power exceeds 10mW at 0V bias when the injection current of the distributed feedback laser is 100mA at 25℃. The side mode suppression ratio is over 50 dB. A 32Gb/s eye diagram is measured with a 3.SVpp nonreturn-to-zero pseudorandom modulation signal at -2.3 V bias. A clearly opening eyediagram with a dynamic extinction ratio of 8.01 dB is obtained.
文摘This paper describes the incremental PID control algorithm and the basic principles of motor soft start, and introduced STM32F103RB8 basic performance microcontroller, combined with incremental PID control advantages, and gives MCU in motor soft start process control application. Practice shows that the incremental PID applications, simplifying the control ideas to improve the performance of the current loop control, limiting the starting current, smooth start-up speed, and achieved good results motor start.
