Spatial Evolution Study of EEDFs and Plasma Parameters in RF Stochastic Regime by Langmuir Probe

An RF compensated cylindrical Langmuir probe system has been developed and used to characterize an RF capacitive two temperature plasma discharge in a stochastic mode. The novelty of the work presented here is the use of the driven electrode （cathode） without ground shield. Measurements of the electron energy distribution function （EEDF） and plasma parameters were achieved under the following conditions： 50 W of RF power and 5× 10-2 mbar of argon pressure. The probe measurements are performed at 3 cm above the electrode and the probe was shifted radially （r direction） from the center （r = 0 cm） of the inter-electrodes region towards the chamber wall （R = 10.75 cm）. The results show that the EEDF is bi-Maxwellian and its shape remains the same through the scanned region. The farther the probe from the central region, the lower the EEDF maximum. The plasma density is observed to decrease according to a Gaussian profile along the radial direction and falls to 50% of its maximum when close to the cathode edge （r = 5.5 cm）. At the same time the effective electron temperature remains constant for r〈4 cm and increases for r≥4 cm. The high-temperature and low-temperature electrons＇ densities and temperatures are also discussed in the article.

Automated electron temperature fitting of Langmuir probeⅠ-Ⅴtrace in plasmas with multiple Maxwellian EEDFs

An algorithm for automated fitting of the effective electron temperature from a planar Langmuir probe I-V trace taken in a plasma with multiple Maxwellian electron populations is developed through MATLAB coding.The code automatically finds a fitting range suitable for analyzing the temperatures of each of the electron populations.The algorithm is used to analyzeⅠ-Ⅴtraces from both the Institute of Plasma Physics Chinese Academy of Sciences's Diagnostic Test Source device and a similar multi-dipole chamber at the University of Wisconsin-Madison.Ⅰ-Ⅴtraces reconstructed from the parameters fitted by the algorithm not only agree with the measured I-V trace but also reveal physical properties consistent with those found in previous studies.Cylindrical probe traces are also analyzed with the algorithm and it is shown that the major source of error in such attempts is the disruption of the inflection point due to both decreased signal-to-noise ratio and greater sheath expansion.It is thus recommended to use planar probes with radii much greater than the plasma Debye length when signal-to-noise ratio is poor.

A Load-balance and EEDF based strategy for reducing transmission delay of VoIP services in IEEE 802.16e system

To decrease the transmission delay of uplink voice over IP(VoIP)services in IEEE 802.16e sys-tem,a novel strategy which includes a load-balance algorithm and an extended earliest deadline first(EEDF)scheduling algorithm is proposed.Subsequently,this paper analyzes the performance of the pro-posed strategy in terms of transmission delay of VoIP services,system capacity,throughput and compati-bility with IEEE 802 .16e standard.Finally,simulation experiments are carried out to verify the improve-ment of the proposed strategy.The simulation results match well with the theoretical analysis and showthat the proposed strategy reduces the transmission delay of uplink VoIP services and improves the capaci-ty and throughput.These improvements are remarkable especially when the load of system is heavy.

Laboratory observation of electron energy distribution near three-dimensional magnetic nulls

The acceleration of electrons near three-dimensional(3D)magnetic nulls is crucial to the energy conversion mechanism in the 3D magnetic reconnection process.To explore electron acceleration in a 3D magnetic null topology,we constructed a pair of 3D magnetic nulls in the PKU Plasma Test(PPT)device and observed acceleration of electrons near magnetic nulls.This study measured the plasma floating potential and ion density profiles around the 3D magnetic null.The potential wells near nulls may be related to the energy variations of electrons,so we measured the electron distribution functions(EDFs)at different spatial positions.The axial variation of EDF shows that the electrons deviate from the Maxwell distribution near magnetic nulls.With scanning probes that can directionally measure and theoretically analyze based on curve fitting,the variations of EDFs are linked to the changes of plasma potential under 3D magnetic null topology.The kinetic energy of electrons accelerated by the electric field is 6 eV(v_(e)~7v_(Alfvén-e))and the scale of the region where accelerating electrons exist is in the order of serval electron skin depths.

SF_6/N_2和SF_6/CF_4混合气体放电参数计算分析

为研究SF_6混合气体的放电参数特性,文中通过两项近似求解Boltzmann方程得到温度为300 K,不同混合比下SF_6/N_2、SF_6/CF_4的电子能量分布函数(EEDF)、折合电离系数α/N、折合吸附系数η/N和折合有效电离系数(α-η)/N,与其他文献结果对比,验证了该计算方法与放电参数的有效性。结果表明:SF_6/N_2、SF_6/CF_4两种混合气体都随折合场强E/N增大时,在较低电子能量区域的EEDF减小而在较高电子能量区域的EEDF增大,且SF_6/N_2混合气体在电子能量为3 e V附近存在EEDF的骤降现象,该现象与N_2的碰撞参数截面有关,而SF_6/CF_4混合气体不存在此现象;此外,SF_6/N_2、SF_6/CF_4两种混合气体随着折合场强E/N增大,折合电离系数α/N显著增大、折合吸附系数η/N减小,最终折合有效电离反应系数(α-η)/N也均随之增加。

Electron Transport Coefficients and Effective Ionization Coefficients in SF_6-O_2 and SF_6-Air Mixtures Using Boltzmann Analysis

The electron drift velocity, electron energy distribution function （EEDF）, densitynormalized effective ionization coefficient and density-normalized longitudinal diffusion velocity are calculated in SF6-O2 and SFs-Air mixtures. The experimental results from a pulsed Townsend discharge are plotted for comparison with the numerical results. The reduced field strength varies from 40 Td to 500 Td （1 Townsend=10-17 V.cm2） and the SF6 concentration ranges from 10% to 100%. A Boltzmann equation associated with the two-term spherical harmonic expansion approximation is utilized to gain the swarm parameters in steady-state Townsend. Results show that the accuracy of the Boltzlnann solution with a two-term expansion in calculating the electron drift velocity, electron energy distribution function, and density-normalized effective ionization coefficient is acceptable. The effective ionization coefficient presents a distinct relationship with the SF6 content in the mixtures. Moreover, the E/Ncr values in SF6-Air mixtures are higher than those in SF6-O2 mixtures and the calculated value E/Ncr in SF6-O2 and SF6-Air mixtures is lower than the measured value in SFB-N2. Parametric studies conducted on these parameters using the Boltzmann analysis offer substantial insight into the plasma physics, as well as a basis to explore the ozone generation process.

Determination of Non-Maxwellian Electron Energy Distributions in Low-Pressure Plasmas by Using the Optical Emission Spectroscopy and a Collisional-Radiative Model

A Maxwellian electron energy distribution function （EEDF） is often assumed when using the optical emission line-ratio method to determine the electron temperature in low- temperature plasmas. However, in many cases, non-Maxwellian EEDFs can be formed due to the non-local electron heating or the inelastic-collisional energy loss processes. In this work, with a collisional-radiative model, we propose an approach to obtain the non-Maxwellian EEDF with a ＇two-temperature structure＇ from the emission line-ratios of Paschen 2p levels of argon and kryp- ton atoms. For applications of this approach in reactive gas （CF4, O2, etc） discharges that contain argon and krypton, recommendations of some specific emission line-ratios are provided, according to their sensitivities to the EEDF variation. The kinetic processes of the relevant excited atoms are also discussed in detail.

高温混合气体临界击穿场强的计算研究

针对高温混合气体临界击穿场强的计算问题,首先对所采用的零维模型进行了介绍,在此基础之上,对纯空气、空气与PA6蒸气的混合气体、空气与POM蒸气的混合气体在内的不同组分气体介质的临界击穿场强进行了计算,并对计算结果进行了理论上的分析。所涉及到的内容主要包括高温体粒子组分的获取,玻尔兹曼方程的近似求解和电子能量分布函数(EEDF)的计算,碰撞截面数据的选择,电子碰撞电离系数和吸附系数的计算。其中重点在于对波尔兹曼输运方程的近似求解和分析不同气体介质对临界击穿场强的影响。

Influence of the gassing materials on the dielectric properties of air

Influence of the gassing materials, such as PA6, PMMA, and POM on the dielectric properties of air are investigated. In this work, the fundamental electron collision cross section data were carefully selected and validated. Then the species compositions of the air–organic vapor mixtures were calculated based on the Gibbs free energy minimization. Finally, the Townsend ionization coefficient, the Townsend electron attachment coefficient and the critical reduced electric field strength were derived from the calculated electron energy distribution function by solving the Boltzmann transport equation. The calculation results indicated that H;O with large attachment cross sections has a great impact on the critical reduced electric field strength of the air–organic vapor mixtures. On the other hand, the vaporization of gassing materials can help to increase the dielectric properties of air circuit breakers to some degree.

Numerical simulation of super-short pulsed discharge in helium with particle-in-cell Monte Carlo collisions technique

This paper reports that a simulation of glow discharge in pure helium gas at the pressure of 1.333×10^3 Pa under a high-voltage nanosecond pulse is performed by using a one-dimensional particle-in-cell Monte Carlo collisions （PIC-MCC） model. Numerical modelling results show that the cathode sheath is much thicker than that of anode during the pulse discharge, and that there exists the phenomenon of field reversal at relative high pressures near the end of the pulse, which results from the cumulative positive charges due to their finite mobility during the cathode sheath expansion. Moreover, electron energy distribution function （EEDF） and ion energy distribution function （IEDF） have been also observed. In the early stage of the pulse, a large amount of electrons can be accelerated above the ionization threshold energy. However, in the second half of the pulse, as the field in bulk plasma decreases and thereafter the reverse field forms due to the excessive charges in cathode sheath, although the plasma density grows, the high energy part of EEDF decreases. It concludes that the large volume non-equilibrium plasmas can be obtained with high-voltage nanosecond pulse discharges.

Trace-Rare-Gas Optical Emission Spectroscopy of Nitrogen Plasma Generated at a Frequency of 13.56 MHz

Optical emission spectroscopic measurement of trace rare gas is carried out to determine the density of nitrogen （N） atom, in a nitrogen plasma, as a function of filling pressure and RF power applied. 2% of argon, used as an actinometer, is mixed with nitrogen. In order to normalize the changes in the excitation cross section and electron energy distribution function at different operational conditions, the Ar-I emission line at 419.83 nm is used, which is of nearly the same excitation efficiency coefficient as that of the nitrogen emission line at 493.51 nm. It is observed that the emission intensity of the selected argon and atomic nitrogen lines increases with both pressure and RF power, as does the nitrogen atomic density.

Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH_4/Ar Discharge

A one-dimensional fluid/Monte-Carlo（MC）hybrid model is developed to describe capacitively coupled SiH_4/Ar discharge,in which the lower electrode is applied by a RF source and pulse modulated by a square-wave,to investigate the modulation effects of the pulse duty cycle on the discharge mechanism.An electron Monte Carlo simulation is used to calculate the electron energy distribution as a function of position and time phase.Rate coefficients in chemical reactions can then be obtained and transferred to the fluid model for the calculation of electron temperature and densities of different species,such as electrons,ions,and radicals.The simulation results show that,the electron energy distribution f（ε）is modulated evidently within a pulse cycle,with its tail extending to higher energies during the power-on period,while shrinking back promptly in the afterglow period.Thus,the rate coefficients could be controlled during the discharge,resulting in modulation of the species composition on the substrate compared with continuous excitation.Meanwhile,more negative ions,like Si H_3^-and Si H_2^-,may escape to the electrodes owing to the collapse of ambipolar electric fields,which is beneficial to films deposition.Pulse modulation is thus expected to provide additional methods to customize the plasma densities and components.

Correlation ofⅢ/Ⅴsemiconductor etch results with physical parameters of high-density reactive plasmas excited by electron cyclotron resonance

Reactive ion etching is the interaction of reactive plasmas with surfaces. To obtain a detailed understanding of this process, significant properties of reactive composite low-pressure plasmas driven by electron cyclotron resonance（ECR） were investigated and compared with the radial uniformity of the etch rate. The determination of the electronic properties of chlorine-and hydrogen-containing plasmas enabled the understanding of the pressure-dependent behavior of the plasma density and provided better insights into the electronic parameters of reactive etch gases. From the electrical evaluation of I（V） characteristics obtained using a Langmuir probe,plasmas of different compositions were investigated. The standard method of Druyvesteyn to derive the electron energy distribution functions by the second derivative of the I（V）characteristics was replaced by a mathematical model which has been evolved to be more robust against noise, mainly, because the first derivative of the I（V） characteristics is used. Special attention was given to the power of the energy dependence in the exponent. In particular, for plasmas that are generated by ECR with EM modes, the existence of Maxwellian distribution functions is not to be taken as a self-evident fact, but the bi-Maxwellian distribution was proven for Ar-and Kr-stabilized plasmas. In addition to the electron temperature, the global uniform discharge model has been shown to be useful for calculating the neutral gas temperature. To what extent the invasive method of using a Langmuir probe could be replaced with the noninvasive optical method of emission spectroscopy, particularly actinometry, was investigated,and the resulting data exhibited the same relative behavior as the Langmuir data. The correlation with etchrate data reveals the large chemical part of the removal process—most striking when the data is compared with etching in pure argon. Although the relative amount of the radial variation of plasma density and etch rate is approximately ？5%, the etch rate shows a slightly concave shape in contrast to the plasma density.

大气压纳秒脉冲裸电极放电的粒子模拟研究

大气压纳秒脉冲放电由于能量利用率高、可以生成多种活性粒子且容易形成均匀的放电等优势,在等离子体环境、医学等应用方面具有广阔的前景。为此借助于粒子模拟方法,研究了在裸电极条件下,纳秒脉冲放电的演化过程及放电机理。由于电极表面没有覆盖介质,在脉冲电压施加过程中,只能观察到一次放电,放电电流一般在电压下降沿开始时刻附近达到最大值。在电压上升沿及坪区阶段,鞘层电场持续增强,鞘层厚度逐渐变薄,电子能量概率分布函数存在明显的高能尾部,电子与离子数密度可以达到很高的数值;放电的熄灭主要是由于脉冲电压的下降造成的,即使在脉冲电压下降阶段,由于前面阶段放电剧烈鞘层电场非常强,碰撞电离依旧可以持续一定的时间。通过粒子模拟研究脉冲电压驱动的裸电极放电,并与相应的介质阻挡放电比较,有助于深化对纳秒脉冲激励的放电演化过程与内在机理的认识。

负氢离子源中电子能量沉积三维数值模拟研究

本文理论计算了多峰离子源永磁体,采用二体碰撞模型(binary collision)处理电子之间的库仑碰撞,采用空碰撞(null-collision)方法处理电子与氢元素相关粒子,开发了全三维PIC-MCC模拟算法,并利用该算法模拟了多峰离子源中电子沉积过程,分析了多峰磁场对电子的空间和能量分布影响,结果显示:电子的非均匀分布起源于高能电子在引出区的B×▽B漂移.

Three-dimensional particle-in-cell with Monte Carlo collision simulation of the electron energy distribution function in the multi-cusp ion source for proton therapy

For optimization and accurate prediction of the amount of proton production in the multi-cusp ion source, analysis of the electron energy distribution function （EEDF） is necessary. A three dimensional particlein-cell with Monte Carlo collision （PIC-MCC） code based on the CHIPIC software platform are developed. The code is applied to the multi-cusp proton source. The results show that there are two energy distributions in the discharge chamber, and a spatial non-uniformity of electron density due to the B×▽B drift of the top permanent magnets is observed.

探针电流调制法在射频低压等离子体诊断中的应用

应用探针电流调制法设计的三探针用于诊断无内电极放电的射频低压等离子体中的电子能量分布函数。测量了氮气等离子体在压强为０．１３～１３Ｐａ时的电子能量分布函数。由此得到的电子平均能量，与由探针Ｖ－Ｉ特性计算得到的电子平均能量相差不超过５％，证明了本测量系统的可靠性。