High-performance midwavelength infrared detectors based on InAsSb nBn design

we report n Bn photodetectors based on In As0.91 Sb0.09 with a 100% cut-off wavelength of 4.75 μm at 300 K. The band of an n Bn detector is similar to that of a standard pin detector, but there is special wide bandgap Al As0.08 Sb0.92 barrier layer in the n Bn detector, in which the depletion region of n Bn detector exists. The n Bn design has many advantages, such as low dark current and high quantum efficiency, because the n Bn design can suppress the generation–recombination(GR)current that is the main composition of standard pin detector dark current. The constant slope of the Arrhenius plot of J0–1/T indicates the absence of the generation–recombination dark current. We fabricate an n Bn detector with a quantum efficiency(QE) maximum of ~ 60% under-0.2-V bias voltage. The In As Sb n Bn detectors may be a competitive candidate for midwavelength infrared detector.

Wet etching and passivation of GaSb-based very long wavelength infrared detectors

The etching and passivation processes of very long wavelength infrared(VLWIR)detector based on the InAs/GaSb/AlSb type-II superlattice have been studied.By studying the effect of each component in the citric acid solution(citric acid,phosphoric acid,hydrogen peroxide,deionized water),the best solution ratio is obtained.After comparing different passivation materials such as sulfide+SiO_(2),Al_(2)O_(3),Si_(3)N_(4) and SU8,it is found that SU8 passivation can reduce the dark current of the device to a greater degree.Combining this wet etching and SU8 passivation,the of VLWIR detector with a mesa diameter of 500μm is about 3.6Ω·cm^(2) at 77 K.

Progress and challenges in blocked impurity band infrared detectors for space-based astronomy

Astronomical detection at infrared wavelengths is crucial in astrophysics due to the critical information in this wavelength range.Blocked impurity band(BIB) infrared detectors are desirable for space-based astronomical observation due to their broad response range, low dark currents, high quantum efficiencies, and excellent radiation resistance. In this review, typical BIB device structures and device physics development are first introduced. Subsequently, we discuss progress in Si-based BIB detectors with different doping types and emphasize their applications in space-based infrared detection. Additionally, we discuss recent efforts on pixel performance optimization, response extension, and higher operating temperature devices. Finally,we conclude by proposing the challenges and perspectives of BIB detectors with improved detection performances.

Development of Low Dark Current SiGe Near-Infrared PIN Photodetectors on 300 mm Silicon Wafers

SiGe offers a low-cost alternative to conventional infrared sensor material systems such as InGaAs, InSb, and HgCdTe for developing near-infrared (NIR) photodetector devices that do not require cooling and can operate with relatively low dark current. As a result of the significant difference in thermal expansion coefficients between germanium (Ge) and silicon (Si), tensile strain incorporated into SiGe detector devices through specialized growth processes can extend their NIR wavelength range of operation. We have utilized high throughput, large-area complementary metal-oxide semiconductor (CMOS) technology to fabricate Ge based p-i-n (PIN) detector devices on 300 mm Si wafers. The two-step device fabrication process, designed to effectively reduce the density of defects and dislocations arising during deposition that form recombination centers which can result in higher dark current, involves low temperature epitaxial deposition of Ge to form a thin p+ seed layer, followed by higher temperature deposition of a thicker Ge intrinsic layer. Phosphorus was then ion-implanted to create devices with n+ regions of various doping concentrations. Secondary ion mass spectroscopy (SIMS) has been utilized to determine the doping profiles and material compositions of the layers. In addition, electrical characterization of the I-V photoresponse of different devices from the same wafer with various n+ region doping concentrations has demonstrated low dark current levels (down to below 1 nA at -1 V bias) and comparatively high photocurrent at reverse biases, with optimal response for doping concentration of 5 × 1019 cm-3.

On-orbit geometric calibration of satellite laser altimeters using infrared detectors and corner-cube retroreflectors

After being launched into orbit,the geometric calibration of a satellite laser altimeter will reduce errors in laser pointing and ranging caused by satellite vibrations during launch,environmental changes,and thermal effects during long-term operation,which guarantees the accuracy of measurement data.In this study,a satellite laser geometric calibration method combining infrared detectors and corner-cube retroreflectors(CCRs)is proposed.First,a CCR-based laser ranging error calibration method was established,and then a laser pointing error calibration model was derived based on a single infrared detector array.Taking GaoFen-7(GF-7)satellite laser beam 2 as the experimental object,laser geometric calibration was realized using an infrared detector and CCR-measured data.Then,the accuracy of the proposed method was compared with that of other calibration methods,the CMLID and the CMSPR.The results show that the accuracy of the proposed calibration method is equivalent to that of the CMLID and higher than that of the CMSPR.Among them,the accuracy of the laser pointing after calibration using the proposed method is better than 0.8 arcsec,and the elevation accuracy of the laser on flat,sloping,and mountainous terrains is better than 0.11 m,0.30 m,and 1.80 m,respectively.

Advantages of QWIP technology in infrared thermal cameras

Standard GaAs/AlGaAs quantum well infrared photodetectors(QWIP)have been seriously considered as atechnological choice for the 3^(rd) generation of thermal imagers in the long wave infrared band(LWIR)for some time.Alternative technology like MCT(HgCdTe)was the technology choice of the 2^(nd) generation because of its high quantum efficiency.In the paper,measurements on the QWIP technology will be presented and a comparison with alternative technology will be done.

Low Crosstalk Three-Color Infrared Detector by Controlling the Minority Carriers Type of InAs/GaSb Superlattices for Middle-Long and Very-Long Wavelength

We report a type-Ⅱ InAs/GaSb superlattice three-color infrared detector for mid-wave （MW）, long-wave （LW）, and very long-wave （VLW） detections. The detector structure consists of three contacts of NIPIN architecture for MW and LW detections, and hetero-junction NIP architecture for VLW detection. It is found that the spectral crosstalks can be significantly reduced by controlling the minority carriers transport via doping beryllium in the two active regions of NIPIN section. The crosstalk detection at MW, LW, and VLW signals are achieved by selecting the bias voltages on the device. At 77K, the cutoff wavelengths of the three-color detection are 5.3μm （at OmV）, 141μm （at 300mV） and 19μm （at -20mV） with the detectivities of 4.6xlO11 cm.Hzl/ZW-1, 2.3×10^10 cm.Hzl/2W-1, and 1.0×10^10cm.Hzl/2W-1 for MW, LW and VLW. The crosstalks of the MW channel, LW channel, and VLW channel are almost 0, 0.25, and 0.6, respectively.

Surface plasmon-enhanced dual-band infrared absorber for VO_x-based microbolometer application

We propose a periodic structure as an extra absorption layer（i.e., absorber） based on surface plasmon resonance effects, enhancing dual-band absorption in both middle wavelength infrared（MWIR） and long wavelength infrared（LWIR）regions. Periodic gold disks are selectively patterned onto the top layer of suspended SiN/VO_2/SiN sandwich-structure.We employ the finite element method to model this structure in COMSOL Multiphysics including a proposed method of modulating the absorption peak. Simulation results show that the absorber has two absorption peaks at wavelengths λ =4.8 μm and λ = 9 μm with the absorption magnitudes more than 0.98 and 0.94 in MWIR and LWIR regions, respectively. In addition, the absorber achieves broad spectrum absorption in LWIR region, in the meanwhile, tunable dual-band absorption peaks can be achieved by variable heights of cavity as well as diameters and periodicity of disk. Thus, this designed absorber can be a good candidate for enhancing the performance of dual band uncooled infrared detector, furthermore, the manufacturing process of cavity can be easily simplified so that the reliability of such devices can be improved.

Improvement of tunnel compensated quantum well infrared detector

To reduce the difficulty of the epitaxy caused by multiple quantum well infrared photodetector(QWIP)with tunnel compensation structure,an improved structure is proposed.In the new structure,the superlattices are located between the tunnel junction and the barrier as the infrared absorption region,eliminating the effect of doping concentration on the well width in the original structure.Theoretical analysis and experimental verification of the new structure are carried out.The experimental sample is a two-cycle device,each cycle contains a tunnel junction,a superlattice infrared absorption region and a thick barrier.The photosurface of the detector is 200×200μm^2 and the light is optically coupled by 45°oblique incidence.The results show that the optimal operating voltage of the sample is-1.1 V,the dark current is 2.99×10^-8A,and the blackbody detectivity is1.352×10^8 cm·Hz^1/2·W^-1at 77 K.Our experiments show that the new structure can work normally.

MOCVD Ga_xIn_(1-x)As_(1-y)Sb_y Alloys and the Infrared Detector

Ga_xIn_(1-x)As_(1-y)Sb_y alloys have been grown by atmospheric pressure MOCVD on n-GaSb(Te-doped) substrate.The sohd composition was determined by using electron microprobe.The alloys of GalnAsSb with composition in miscibility gap were successfully grown.The optical properties of Ga_xIn_(1-x)As_(1-y)Sb_y lavers were characterized by the photoluminescence and the infrared absorption.The spectral responses of p^+-GaInAsSb/p-Ga_xIn_(1-x)As_(1-y)Sb_y/n-GaSb detectors showed wavelength cut off at 2.4μm and detectivity- D~*=5×10~8 cmHz^(1/2)/W at room temperature.

128×128 element PtSi infrared CCD image sensor

A new 128×128 element PtSi Schottky barrier infrared image sensor with ITCCD readout structure and PtSi thin film optical cavity detector structure has been fabricated,which has 50μm×50 μm pixels,a fill factor of 40 percent,the nonuniformity of 5% or less and the dynamic range of over or equal to 50 dB.The noise equivalent temperature difference is 0.2 K with f/1.0 optics at 300 K background. In this paper,the principle of operation,design consideration and fabrication technology for the device are described.

Thermal and mechanical characterizations of a substrate-free focal plane array

We propose a substrate-free focal plane array （FPA） and the microcantilevers extend from a supporting frame. in this paper. The solid substrate is completely removed, Using finite element analysis, the thermal and mechanical characterizations of the substrate-free FPA are presented. Because of the large decrease in thermal conductance, the supporting frame is temperature dependent, which brings out a unique feature： the lower the thermal conductance of the supporting frame is, the higher the energy conversion efficiency in the substrate-free FPA will be. The results from the finite element analyses are consistent with our measurements： two types of substrate-free FPAs with pixel sizes of 200×200 and 60×60 um^2 are implemented in the proposed infrared detector. The noise equivalent temperature difference （NETD） values are experimentally measured to be 520 and 300 mK respectively. Further refinements are considered in various aspects, and the substrate-free FPA with a pixel size of 30×30 um^2 has a potential of achieving an NETD value of 10 mK.

Preparation of LPE GaInAsSb Epilayers and Its Photodiodes for Detection of 1．8～2．1μm

Growth of GaInAsSb epilayer by liquid phase epitaxy (LPE) was reported. The LPE system with a hor-izontal sliding graphite boat was employed. The Te-doped (100) GaSb wafer was chosen as substrate. Thephysical properties of the GalnAsSb / GaSb heterostructure were investigated by double crystal X-ray rock-ing diffraction and photoluminescence. The p-GaInAsSb/ n-GaSb photodiode was made by using theseheterostructure materials .The detectivity of the photodiode D* is 4.65 ×10￣9 cm . Hz￣(1 /2) W￣(-1).

Dielectric Characteristics of Ba_(0.65)Sr_(0.35)TiO_3 Thin Films by Sol-Gel Method

Ferroelectric Ba0.65Sr0.35TiO3 （BST） thin films on the Pt/Ti/SiO2/Si substrate have been successfully prepared by sol-gel. Such films have approximately 300 nm thicknesses with a remnant polarization of about 2.95 μ℃/cm^2 and a coercive field of about 21.5 kV/cm. The investigations of X-ray diffraction and atomic force microscopy show that the BST films annealed at 650 ℃ exhibit a tetragonal structure and that the films dominantly consist of large column or grains of about 89 nm in diameter. The curves of the temperature dependence of dielectric coefficient in different frequencies display the curie transition at the temperature around 23 ℃. The dielectric loss tangent of BST thin fdms at 100 kHz is less than 0.04. As a result, the BST thin films are more applicable for fabrication of infrared detector compared with the BST thin films reported previously.

Spectral selectivity in infrared thermal detection

A review is made of the physics and technology of spectrally selective thermal detectors,especially those operating at non-cryogenic temperatures.The background radiation noise fluctuations are rederived for arbitrary spectral characteristics.Infrared absorption due to phonons and free carriers is discussed followed by a review of published works on artificial infrared absorption materials such as patterned grids,nanoparticles,plasmonic structures,metamaterials and others.Subsequently,the literature of the spectral characteristics of broadband thermal detectors and spectrally selective thermal detectors is reviewed.Finally,the authors speculate on the directions that future research and development in the area will take regarding architectures,sensitivity and spectral characteristics.

Energy band design for p-type tensile strained Si/SiGe multi-quantum well infrared photodetector

The band structure of the confined states is calculated for Si/SiGe multi-quantum well infrared photodetector(M-QWIP).The influence of the Ge component in pseudosubstrate on the energy band structure of Si/Si0.54Ge0.46 multi-quantum wells(MQWs) is investigated.It is found that the high energy levels in the MQWs move up while the low energy levels move down as the Ge component in pseudosubstrate increases.The influence of the barrier width on the energy band structure of MQWs is also studied based on the 6 × 6 k.p method.The results show that the Si barrier between 5 nm and 10 nm is optimized to enhance the intersubband absorption in the MQWs.

Review of Geostationary Interferometric Infrared Sounder

To measure the global atmospheric three-dimensional distribution and change of temperature and humidity is one of the key areas in atmospheric remote sensing detection; it is also a new research and development direction in the field of meteorological satellite application. As a main element of China second generation of geostationary meteorological satellite Fengyun 4 （FY-4）, which was launched on Dec. 11, 2016, the Geostationary Interferometric Infrared Sounder （GIIRS） is the first interferometric infrared sounder working on the international geostationary orbit. It is used for vertical atmospheric sounding and gains atmospheric temperature, humidity, and disturbances. The combination of Fourier transform spectrometer technology and infrared detectors makes GIIRS have high spectral resolution and large coverage over spatial areas. With this kind of instrument, meteoro- logical satellites can improve the capabilities for severe weather event monitoring and numerical weather prediction. Here a concise review of the GIIRS development project, including its history, missions and functions, technical design, key technologies, system integration, calibration and in-orbit operation status, etc., is presented.

New CMOS readout circuit with background suppression and CDS for infrared focal plane array applications

A high injection, large dynamic range, stable detector bias, small area and low power consumption CMOS readout circuit with background current suppression and correlated double sampling (CDS) for a high-resolution infrared focal plane array applications is proposed. The detector bias error in this structure is less than 0.1 mV. The input resistance is ideally zero, which is important to obtain high injection efficiency. Unit-cell occupies 10 μm × 15 μm area and consumes less than 0.4 mW power. Charge storag...

Design and modeling of high‑performance mid‑wave infrared InAsSb‑based nBn photodetector using barrier band engineering approaches

We report a new nBn photodetector(nBn-PD)design based on the InAlSb/AlSb/InAlSb/InAsSb material systems for midwavelength infrared(MWIR)applications.In this structure,delta-doped compositionally graded barrier(δ-DCGB)layers are suggested,the advantage of which is creation of a near zero valence band ofset in nBn photodetectors.The design of theδ-DCGB nBn-PD device includes a 3µm absorber layer(n-InAs0.81Sb0.19),a unipolar barrier layer(AlSb),and 0.2μm contact layer(n-InAs0.81Sb0.19)as well as a 0.116µm linear grading region(InAlSb)from the contact to the barrier layer and also from the barrier to the absorber layer.The analysis includes various dark current contributions,such as the Shockley-Read-Hall(SRH),trap-assisted tunneling(TAT),Auger,and Radiative recombination mechanisms,to acquire more precise results.Consequently,we show that the method used in the nBn device design leads to difusion-limited dark current so that the dark current density is 2.596×10^(−8)A/cm^(2)at 150 K and a bias voltage of−0.2 V.The proposed nBn detector exhibits a 50%cutof wavelength of more than 5µm,the peak current responsivity is 1.6 A/W at a wavelength of 4.5µm and a−0.2 V bias with 0.05 W/cm2 backside illumination without anti-refective coating.The maximum quantum efciency at 4.5µm is about 48.6%,and peak specifc detectivity(D*)is of 3.37×10^(10)cm⋅Hz1/2/W.Next,to solve the refection concern in this nBn devices,we use a BaF_(2)anti-refection coating layer due to its high transmittance in the MWIR window.It leads to an increase of almost 100%in the optical response metrics,such as the current responsivity,quantum efciency,and detectivity,compared to the optical response without an anti-refection coating layer.

CVD preparation of vertical graphene nanowalls/VO_(2)(B)composite films with superior thermal sensitivity in uncooled infrared detector

Vanadium dioxide with superior thermal sensitivity is one of the most preferred materials used in microbolometer,and the B phase of VO_(2) is particularly prominent.However,conventional VO_(2)(B)undergoes low temperature-coefficient of resistance(TCR)values and large resistances.In this paper,simple controllable composite films of vertical graphene nanowalls/VO_(2)(B)(i.e.,VGNWs/VO_(2)(B))with a suitable square resistance(12.98 kU)and a better temperature-coefficient of resistance(TCR)(-3.2%/K)were prepared via low pressure chemical vapor deposition.The VGNWs can provide a fast channel for electron transport and enhance the conductivity of VO_(2)(B).This preparation method can provide a low cost,facile and simple pathway for the design and fabrication of high performance VO_(2)(B)thin films with superior electrical properties for its application in uncooled infrared detectors.