The mechanical response of shock-loaded microelectromechanical systems (MEMS) is simulated to formulate guidelines for the design of dynamically reliable MEMS. MEMS are modeled as microstructures supported on elastic ...The mechanical response of shock-loaded microelectromechanical systems (MEMS) is simulated to formulate guidelines for the design of dynamically reliable MEMS. MEMS are modeled as microstructures supported on elastic substrates, and the shock loads are represented as pulses of acceleration applied by the package on the substrate over a finite time duration. For typical MEMS and shock loads, the response of the substrate is closely approximated by rigid-body motion. Results indicate that modeling the shock force as a quasi-static force for MEMS with low-natural frequencies may lead to erroneous results. A criterion is obtained to distinguish between the dynamic and quasi-static responses of the MEMS.展开更多
To improve the reliability and accuracy of the global po- sitioning system （GPS）/micro electromechanical system （MEMS）- inertial navigation system （INS） integrated navigation system, this paper proposes two diff...To improve the reliability and accuracy of the global po- sitioning system （GPS）/micro electromechanical system （MEMS）- inertial navigation system （INS） integrated navigation system, this paper proposes two different methods. Based on wavelet threshold denoising and functional coefficient autoregressive （FAR） model- ing, a combined data processing method is presented for MEMS inertial sensor, and GPS attitude information is also introduced to improve the estimation accuracy of MEMS inertial sensor errors. Then the positioning accuracy during GPS signal short outage is enhanced. To improve the positioning accuracy when a GPS signal is blocked for long time and solve the problem of the tra- ditional adaptive neuro-fuzzy inference system （ANFIS） method with poor dynamic adaptation and large calculation amount, a self-constructive ANFIS （SCANFIS） combined with the extended Kalman filter （EKF） is proposed for MEMS-INS errors modeling and predicting. Experimental road test results validate the effi- ciency of the proposed methods.展开更多
文摘The mechanical response of shock-loaded microelectromechanical systems (MEMS) is simulated to formulate guidelines for the design of dynamically reliable MEMS. MEMS are modeled as microstructures supported on elastic substrates, and the shock loads are represented as pulses of acceleration applied by the package on the substrate over a finite time duration. For typical MEMS and shock loads, the response of the substrate is closely approximated by rigid-body motion. Results indicate that modeling the shock force as a quasi-static force for MEMS with low-natural frequencies may lead to erroneous results. A criterion is obtained to distinguish between the dynamic and quasi-static responses of the MEMS.
基金supported by the National Natural Science Foundation of China (60902055)
文摘To improve the reliability and accuracy of the global po- sitioning system （GPS）/micro electromechanical system （MEMS）- inertial navigation system （INS） integrated navigation system, this paper proposes two different methods. Based on wavelet threshold denoising and functional coefficient autoregressive （FAR） model- ing, a combined data processing method is presented for MEMS inertial sensor, and GPS attitude information is also introduced to improve the estimation accuracy of MEMS inertial sensor errors. Then the positioning accuracy during GPS signal short outage is enhanced. To improve the positioning accuracy when a GPS signal is blocked for long time and solve the problem of the tra- ditional adaptive neuro-fuzzy inference system （ANFIS） method with poor dynamic adaptation and large calculation amount, a self-constructive ANFIS （SCANFIS） combined with the extended Kalman filter （EKF） is proposed for MEMS-INS errors modeling and predicting. Experimental road test results validate the effi- ciency of the proposed methods.
