Structure,Adhesion Strength and Corrosion Resistance of Vacuum Arc Multi-Period NbN/Cu Coatings

resistance,and adhesive strength of vacuum-arc multi-period NbN/Cu coatings is studied.It was found that in thin layers(about 8 nm,in a constant rotation mode),regardless of the change in the pressure of the nitrogen atmosphere,a metastableδ-NbN phase forms(cubic crystal lattice of the NaCl type).At a layer thickness of^40 nm or more,a phase composition changes from the metastableδ-NbN to the equilibriumε-NbN phase with a hexagonal crystal lattice.In the presence of theε-NbN phase in the niobium nitride layers,the highest adhesive strength is achieved with a value of LС5=96.5 N.Corrosion resistance tests have shown that for all the studied samples the corrosion process has mainly an anodic reaction.The highest corrosion resistance was shown by coatings obtained at a pressure of 7·10-4 Torr,with the smallest bias potential of-50 V and the smallest layer thickness;with a thickness of such a coating of about 10 microns,its service life in the environment of the formation of chloride ions is about a year.

溅射方式对NbN薄膜结构及热稳定性的影响

用射频磁控溅射和直流磁控溅射的方法分别在Si(100)衬底和Cu膜间制备了30nm的NbN薄膜,Cu/NbN/Si样品在高纯氮气保护下退火至700℃。用四探针电阻测试仪(FPP)、AFM、SEM、XRD、AES研究了溅射方式对NbN薄膜扩散阻挡性能的影响。退火前XRD结果表明,直流溅射制备的NbN薄膜为典型的晶态结构,射频溅射制备的薄膜为典型的非晶态结构。高温退火后的XRD、SEM、FPP、AES研究结果表明非晶态结构的NbN薄膜有更好的扩散阻挡性能,700℃时仍能很好地阻挡Cu原子的扩散。