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Design of interdigitated transducers for acoustofluidic applications 被引量:2
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作者 Shuren Song Qi Wang +1 位作者 Jia Zhou Antoine Riaud 《Nanotechnology and Precision Engineering》 CAS CSCD 2022年第3期36-54,共19页
Interdigitated transducers(IDTs)were originally designed as delay lines for radars.Half a century later,they have found new life as actuators for microfluidic systems.By generating strong acoustic fields,they trigger ... Interdigitated transducers(IDTs)were originally designed as delay lines for radars.Half a century later,they have found new life as actuators for microfluidic systems.By generating strong acoustic fields,they trigger nonlinear effects that enable pumping and mixing of fluids,and moving particles without contact.However,the transition from signal processing to actuators comes with a range of challenges concerning power density and spatial resolution that have spurred exciting developments in solid-state acoustics and especially in IDT design.Assuming some familiarity with acoustofluidics,this paper aims to provide a tutorial for IDT design and characterization for the purpose of acoustofluidic actuation.It is targeted at a diverse audience of researchers in various fields,including fluid mechanics,acoustics,and microelectronics. 展开更多
关键词 acoustic field Surface acoustic wave TRANSDUCER Finite-element analysis SIMULATION acoustical properties LAB-ON-A-CHIP acoustic wave attenuation
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