Design Principle of High-precision Flexure Mechanisms Based on Parasitic-motion Compensation

In design of flexure mechanism, diminishing the parasitic-motion is a key point to improve the accuracy. However, most of existing topics concentrate on improving the accuracy of linear-motion flexure mechanisms via compensating the parasitic error, but few research the multi-dimensional flexure mechanisms. A general design principle and method for high-precision flexure mechanisms based on the parasitic-motion compensation is presented, and the proposed method can compensate the parasitic rotation in company with translation, or the parasitic translation in company with rotation, or both. The crucial step for the method is that the parasitic motion of a flexure mechanism is formulated and evaluated in terms of its compliance. The overall compliance matrix of a general flexure mechanism is formulated by using screw theory firstly, then the criteria for the parasitic motions is introduced by analyzing the characteristics of the resultant compliance matrix as well as with aid of the concept of instantaneous rotation center. Subsequently, a compliance-based compensation approach for reducing parasitic-motion is addressed as the most important part. The design principles and procedure are further discussed to help with improving the accuracy of flexure mechanisms, and case studies are provided to illustrate this method. Finally, an analytical verification is provided to demonstrate that the symmetry design philosophy widely used in flexure design can effectively improve accuracy in terms of the proposed method. The proposed compensation method can be well used to diminish the parasitic-motion of multi-dimensional flexure mechanisms.

A simple compliance modeling method for flexure hinges

Various types of flexure hinges have been introduced and implemented in a variety of fields due to their superior performances.The Castigliano’s second theorem,the Euler–Bernoulli beam theory based direct integration method and the unit-load method have been employed to analytically describe the elastic behavior of flexure hinges.However,all these methods require prior-knowledge of the beam theory and need to execute laborious integration operations for each term of the compliance matrix,thus highly decreasing the modeling efficiency and blocking practical applications of the modeling methods.In this paper,a novel finite beam based matrix modeling(FBMM)method is proposed to numerically obtain compliance matrices of flexure hinges with various shapes.The main concept of the method is to treat flexure hinges as serial connections of finite micro-beams,and the shearing and torsion effects of the hinges are especially considered to enhance the modeling accuracy.By means of matrix calculations,complete compliance matrices of flexure hinges can be derived effectively in one calculation process.A large number of numerical calculations are conducted for various types of flexure hinges with different shapes,and the results are compared with the ones obtained by conventional modeling methods.It demonstrates that the proposed modeling method is not only efficient but also accurate,and it is a more universal and more robust tool for describing elastic behavior of flexure hinges.

Base force element method (BFEM) on complementary energy principle for linear elasticity problem

Using the concept of base forces as state variables,a new finite element method-the base force element method (BFEM) on complementary energy principle for linear elasticity problems is presented.Firstly,an explicit expression of compliance matrix for an element is derived through base forces by dyadic vectors.Then,the explicit control equations of finite element method of complementary energy principle are derived using Lagrange multiplier method.Thereafter,the base forces element procedure for linear elasticity is developed.Finally,several examples are analyzed to illustrate the reliability and accuracy of the formulation and the procedure.