A Into-Plane Rotating Micromirror Actuated by a Hybrid Electrostatic Driving Structure

A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabricated in SOI substrate by using a bulk-and-surface mixed silicon micromachining process. As demonstrated by experiment, the novel driving structure can actuate the mirror to achieve large-range continuous rotation as well as spontaneous 90°rotation induced by the pull-in effect. The continuous rotating range of the micromirror is increased to about 46° at an increased yielding voltage. The measured yielding voltages of the mirrors with torsional springs of 1 and 0.5μm in thickness are 390 - 410V and 140 - 160V, respectively. The optical insertion loss has also been measured to be --1.98dB when the mirror serves as an optical switch.

Analytical modeling of static behavior of electrostatically actuatednano/micromirrors considering van der Waals forces

In this paper, the effect of van der Waals （vdW） force on the pull-in behavior of electrostatically actuated nano/micromirrors is investigated. First, the minimum po- tential energy principle is utilized to find the equation gov- erning the static behavior of nano/micromirror under electro- static and vdW forces. Then, the stability of static equilib- rium points is analyzed using the energy method. It is found that when there exist two equilibrium points, the smaller one is stable and the larger one is unstable. The effects of dif- ferent design parameters on the mirror＇s pull-in angle and pull-in voltage are studied and it is found that vdW force can considerably reduce the stability limit of the mirror. At the end, the nonlinear equilibrium equation is solved numer- ically and analytically using homotopy perturbation method （HPM）. It is observed that a sixth order perturbation approx- imation can precisely model the mirror＇s behavior. The re- suits of this paper can be used for stable operation design and safe fabrication of torsional nano/micro actuators.

Fringe optimization for structured illumination super-resolution microscope with digital micromirror device

Structured illumination microscopy(SIM)is a promising super-resolution technique for imaging subcellular structures and dynamics due to its compatibility with most commonly usedffuorescent labeling methods.Structured illumination can be obtained by either laser interference or projection of fringe patterns.Here,we proposed a fringe projector composed of a compact multiwavelength LEDs module and a digital micromirror device(DMD)which can be directly attached to most commercial invertedffuorescent microscopes and update it into a SIM system.The effects of the period and duty cycle of fringe patterns on the modulation depth of the structured lightfield were studied.With the optimized fringe pattern,1:6×resolution improvement could be obtained with high-end oil objectives.Multicolor imaging and dynamics of subcellular organelles in live cells were also demonstrated.Our method provides a low-cost solution for SIM setup to expand its wide range of applications to most research labs in thefield of life science and medicine.

Superpixel-Based Complex Field Modulation Using a Digital Micromirror Device for Focusing Light through Scattering Media

We present a digital micromirror device（DMD） based superpixel method for focusing light through scattering media by modulating the complex field of incident light. Firstly, we numerically and experimentally investigate focusing light through a scattering sample using the superpixel methods with different target complex fields.Then, single-point and multiple-point focusing experiments are performed using this superpixel-based complex modulation method. In our experiment, up to 71.5% relative enhancement is realized. The use of the DMDbased superpixel method for the control of the complex field of incident light opens an avenue to improve the enhancement of focusing light through scattering media.

Model Order Reduction for Coupled Dynamic Characterization of Torsional Micromirrors

Numerical solutions could not perform rapid system-level simulation of the behavior of micro-electro-mechanical systems（MEMS） and analytic solutions for the describing partial differential equations are only available for simple geometries.Model order reduction（MOR） can extract approximate low-order model from the original large scale system.Conventional model order reduction algorithm is based on first-order system model,however,most structure mechanical MEMS systems are naturally second-order in time.For the purpose of solving the above problem,a direct second-order system model order reduction approach based on Krylov subspace projection for the coupled dynamic study of electrostatic torsional micromirrors is presented.The block Arnoldi process is applied to create the orthonormal vectors to construct the projection matrix,which enables the extraction of the low order model from the discretized system assembled through finite element analysis.The transfer functions of the reduced order model and the original model are expanded to demonstrate the moment-matching property of the second-order model reduction algorithm.The torsion and bending effect are included in the finite element model,and the squeeze film damping effect is considered as well.An empirical method considering relative error convergence is adopted to obtain the optimal choice of the order for the reduced model.A comparison research between the full model and the reduced model is carried out.The modeling accuracy and computation efficiency of the presented second-order model reduction method are confirmed by the comparison research results.The research provides references for MOR of MEMS.

Design and Fabrication of 2-DOF Micromirror Array Based on Electro-Thermal Actuators

With surface- and bulk-micromachining, an 8 × 8 mirrors array is designed, fabricated and tested, which is based on electro-thermal actuators and can be addressed individually. The micromirror is square shaped, 4-corner-actuated. Its dimension is 200 μm × 200 μm. The substrate below it is caved away to ensure a tilt at an angle as large as possible. To protect the etch-sensitive features on the front side of the wafer undamaged during wet deep silicon etch on the backside, the wax protective coating process is used. Mirror actuated by powering an alternative pair of heaters will tilt in 2-DOF. If its 4 cantilevers/heaters are powered synchronously, it will move in a piston mode. The effective arrays are more than 80% out of the three finished wafers. When the ramp voltage frequency applied to a pair of neighboring cantilevers is 5 Hz at 10 V, the average tilting angle can be ± 8°.

Bifurcation-Based Stability Analysis of Electrostatically Actuated Micromirror as a Two Degrees of Freedom System

Torsional micromirror devices have been widely used in micro displays,RF switches,optical communications,and optical coherence tomography systems.In order to study the stability of electrostatically driven torsional micromirror system with double bottom plates and two voltage sources,a dimensionless,two degrees of freedom(2-DoF)dynamic model was constructed.Governed by the dimensionless phase space model equation,the pull-in and bifurcation phenomena were analyzed using the Hamiltonian method and numerical simulation.In particular,the influence of the damping coefficient and the torsion-bending coupling effect on the phase trajectory was investigated.Furthermore,the conditions that can lead to pull-in were numerically determined for saddle-node,pitchfork and Hopf bifurcations in the framework of 2-DoF system.Result showed that the dynamic pull-in voltage as predicted by the proposed 2-DoF system model is considerably lower than that by the one degree of freedom(1-DoF)system model.It was also confirmed that the pull-in voltage varies with the damping coefficient and/or the ratio of the two voltages applied to the bottom plates of the micromirror.The modelling method and stability analysis presented in this paper shall provide valuable insight to the design and control of electrostatically actuated micromirror systems.

Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System

In this paper,we present a twisting control scheme with proportional-integral-derivative(PID)sliding surface for a two-axis electrostatic torsional micromirror,and the utilization of the proposed scheme in a laser scanning system.The experimental results of set-point regulation verify that the proposed scheme provides enhanced transient response and positioning performance as compared to traditional sliding mode control.To evaluate the tracking performance of the closed-loop system,triangular waves with different frequencies are used as desired traces.With the proposed scheme the experimental results verified that the closed-loop controlled micromirror follows the given triangular trajectories precisely.A micromirror-based laser scanning system is developed to obtain images.When compared with open-loop control,the experimental results demonstrated that the proposed scheme is able to reduce the distortion of the raster scan,and improve the imaging performance in the presence of cross-coupling effect.

Arbitrary amplitude femtosecond pulse shaping via a digital micromirror device

An ultrafast spectrum programmable femtosecond laser may enhance the performance of a wide variety of scientific applications,e.g.,multi-photon imaging.In this paper,we report a digital micromirror device(DMD)-based ultrafast pulse shaper,i.e.,DUPS,for femtosecond laser arbitrary amplitude shaping-the first time a programmable binary device reported to shape the amplitudes of ultrafast pulses spectrum at up to 32 kHz rate over a broad wavelength range.The DUPS is highly effcient,compact,and low cost based on the use of a DMD in combination with a transmission grating.Spatial and temporal dispersion introduced by the DUPS is compensated by a quasi-4-f setup and a grating pair,respectively.Femtosecond pulses with arbitrary spectrum shapes,including rectangular,sawtooth,triangular,double-pulse,and exponential profile,have been demonstrated in our experiments.A feedback operation process is implemented in the DUPS to ensure a robust and repeatable shaping process.The total effciency of the DUPS for amplitude shaping is measured to be 27%.

Design and Simulation of Silicon-based NiCrAu MEMS Torsion Micromirror with Tilted Back-electrode

Torsion micromirror is a key structure of optical devices in micro-electro-mechanical system(MEMS), such as MEMS optical switches, MEMS variable optical attenuator, MEMS scanning micromirror array and so on. A silicon-based NiCrAu MEMS torsion micromirror is theoretically analyzed. It is shown that in order to have 15° rotation, the driven voltage should be about 20V and the thickness of the supporting beam must be controlled in the range of submicron orders of magnitude. This very thin beam makes the structure more unstable and unreliable, and also makes the fabrication more complicated. Based on parallel back-electrode analysis and testing, a tilted back-electrode has been designed to replace the parallel back-electrode in order to decrease the driven voltage and difficulty of fabricating processing. By theoretical analysis and simulation, a conclusion can be drown that the thickness can be improved from submicron to micron by using tilted back-electrode when using the same driven voltage. Tilted back-electrode is very effective to improve the stability and reliability of the micromirror structure.

Macro Model Study for Nonlinear Spring of Tense Torsion Bar in Gap-Closing Type Electrostatic Micromirror

Nonlinear spring characteristics of the tense torsion bar in the gap-closing type electrostatic micromirror are examined. The macro model is introduced for the experimental study. The tension applied in the torsion bar is well controlled using the electromagnetic attraction. This controllability is suited for clearing the nonlinear nature. The tension is confirmed to have the effect to widen the controllable angle range of the mirror suppressing the pull-in. The pull-in angle is observed to increases to about 74% of the mechanical limit angle at the tension of 0,96 N. This is significantly larger than 44% of the case with the linear spring. The larger resonant frequency is maintained. The hardening of the spring can keep the balance with the electrostatic force over the limit of the linear spring. The observed features are explained reasonably with the combination of twisting and bending displacements of the torsion bar.

Estimation-free spatial-domain image reconstruction of structured illumination microscopy

Structured illumination microscopy(SIM)achieves super-resolution(SR)by modulating the high-frequency information of the sample into the passband of the optical system and subsequent image reconstruction.The traditional Wiener-filtering-based reconstruction algorithm operates in the Fourier domain,it requires prior knowledge of the sinusoidal illumination patterns which makes the time-consuming procedure of parameter estimation to raw datasets necessary,besides,the parameter estimation is sensitive to noise or aberration-induced pattern distortion which leads to reconstruction artifacts.Here,we propose a spatial-domain image reconstruction method that does not require parameter estimation but calculates patterns from raw datasets,and a reconstructed image can be obtained just by calculating the spatial covariance of differential calculated patterns and differential filtered datasets(the notch filtering operation is performed to the raw datasets for attenuating and compensating the optical transfer function(OTF)).Experiments on reconstructing raw datasets including nonbiological,biological,and simulated samples demonstrate that our method has SR capability,high reconstruction speed,and high robustness to aberration and noise.

车载环境下MEMS微镜长期可靠性及控制方法

作为一种新型微光机电系统,MEMS微镜可完成微尺度下的光调控工作,在光电通信、医疗成像、民用投影、雷达探测等领域应用广泛.近年来,以微镜为核心部件的MEMS激光雷达因其体积小和功耗低等优势,有望成为更具竞争力的辅助驾驶传感器之一.然而,鉴于车载应用特殊性,MEMS微镜在温湿、电磁、振动和冲击等复杂多物理场耦合环境下的各类可靠性问题严重制约了MEMS激光雷达的工程应用.本文立足MEMS微镜可靠性研究领域,综述其在高频振动、温湿循环、电磁耦合等极端环境下的分层翘曲、结构断裂、静电吸合、短路烧毁等复杂失效形式及失效机制,总结了MEMS微镜常见动力学建模理论及控制方法,讨论并展望了MEMS激光雷达车规化面临的主要挑战和发展趋势.

高频压电MEMS微镜设计与仿真

阵列化微镜设计可以实现微镜的高频工作。本文采用将驱动器隐藏在六边形镜面下方的设计方案来实现微镜阵列单元的制备,减小了微镜尺寸。在镜面内部引入了柔性结构匀散应力,降低微镜应力断裂风险,提高了微镜的可靠性,采用六边形密排的方式可以实现大于90%的占空比。所设计的微镜可以实现倾斜、偏转和活塞3种工作自由度,工作频率达到了23 000 Hz以上,共振偏转角度可以达到6.5°。对比传统的微镜阵列设计,本文设计提高了空间利用率和致动效率。

MEMS静电驱动微镜阵列的设计与工艺研究

基于微机电系统(MEMS)工艺,设计并制作了一种应用于光通信领域的二维准静态驱动微镜阵列(MMA)。相比于梳齿驱动,平行板电容式静电微镜更易于形成高占空比的阵列排布,有利于作为光开关矩阵应用在全光交换中。通过设计弹性系数小的“竖蛇形”双扭转轴结构,有效降低了微镜的驱动电压;并采用硅—玻璃阳极键合工艺来实现平板电容结构,将绝缘的玻璃作为电极基底与绝缘体上硅(SOI)硅器件层键合,不仅实现了良好的电隔离,提高了器件的稳定性,且能很好地与阵列扩展兼容。制备出的1×4微镜阵列可实现X/Y方向的二维(2D)准静态驱动,测试结果与有限元仿真结果基本吻合。结果表明,微镜内、外轴可分别在26.5V和29.5V的直流电压驱动下达到±2°机械转角,微镜响应时间为5ms。

基于Au/In键合的静电扭转微镜的设计与工艺研究

采用Au/In键合技术并引入凸点层设计,制备了用于光通信领域的二维平行板式静电扭转微镜阵列。相较于其他键合技术,Au/In键合实现了低温键合并与硅通孔技术相容。此外,相对于梳齿驱动,采用平行板电容的扭转微镜有助于实现更高的占空比,便于阵列制造。凸点层的设计提升了键合强度,平均键合强度达8.97 MPa。微镜的实测结果与有限元仿真基本一致,内、外轴分别在13.7 V和18.2 V的直流电压下实现了0.7°的机械转角。

基于纳米微晶玻璃的空间悬浮显示

本文介绍了基于纳米微晶玻璃的空间悬浮显示的研究。使用纳米微晶玻璃作为悬浮显示的承载介质,并设计其实验系统,引入峰值信噪比的图像评价指标,测量激光功率对图像质量的影响,实现高清晰度、高分辨率的空间悬浮显示。

基于MEMS微镜幅频特性的机械动力学教学实验设计

该文依托华为资助项目搭建了MEMS微镜的幅频特性实验,并将其应用于机械动力学教学实践。首先,通过MEMS微镜的工作原理阐明了相关的机械动力学理论知识。其次,对MEMS微镜幅频特性实验进行了详细论述,包括实验平台构成、微镜角度的光电检测方法、实验数据处理及工程应用。最后,阐述了实验在机械动力学教学中作用,包括激发学习热情、课程思政、提升工程实践和融合创新能力等。

Stability analysis of quasicrystal torsion micromirror actuator based.on the strain gradient theory

Electrostatic torsional micromirrors are widely applied in the fields·of micro-optical switches,optical attenuators,optical scanners,and optical displays.In previous lectures,most of the micromirrors were twisted along the urtiaxial or biaxial direction,which limited the range of light reflection.In this·paper,a quasicrystal torsional micromirror that can be deflected in any direction is designed and the dynamic model of the electrostatically driven micromirror is established.The static and dynamic phenomena and pull-in characteristics are analyzed through the numerical solution of the strain gradient theory.The results of three kinds of mirror deflection directions are compared and analyzed.The results show the significant differences in the torsion models with different deflection axis directions.When the deflection angle along the oblique axis reaches 45°,the instability voltage is the smallest.The pull-in instability voltage increases with the increment ofphonon-phason coupling elastic modulus and phason elastic modulus.The perrriittivity of quasicrystal,the strain gradient parameter,and the air damping influence the torsion of the micromirror dynaniic system.A larger pull-in instability voltage generates with the decrease of surface distributed forces.

High-speed playback of spatiotemporal division multiplexing holographic 3D video stored in a solid-state drive using a digital micromirror device

We propose a high-speed playback method for the spatiotemporal division multiplexing electroholographic three-dimensional(3D)video stored in a solid-state drive(SSD)using a digital micromirror device.The spatiotemporal division multiplexing electroholography prevents deterioration in the reconstructed 3D video from a 3D object comprising many object points.In the proposed method,the stored data is remarkably reduced using the packing technique,and the computer-generated holograms are played back at high speed.Consequently,we successfully reconstructed a clear 3D video of a 3D object comprising approximately 1,100,000 points at 60 frames per second by reducing the reading time of the stored data from an SSD.