A novel double-foot piezoelectric linear motor is proposed.The kinematic model of the motor under stepping motion is presented.The motor mainly consists of a stator with four piezoelectric stacks,a mover,a holding mec...A novel double-foot piezoelectric linear motor is proposed.The kinematic model of the motor under stepping motion is presented.The motor mainly consists of a stator with four piezoelectric stacks,a mover,a holding mechanism,and a preloading mechanism to achieve large stroke with high resolution.Finite element simulations are carried out to analyze the motion characteristics of the motor.A prototype is fabricated and a serial experiments are conducted to validate the feasibility of the motor principle.Experimental results indicate that the motor can move at a speed of 670.22μm/s with a driving frequency of 120 Hz and a voltage of 120 V.The resolution of the proposed motor is 3.6μm while the resolution of the single-step motion is 0.1μm.展开更多
Conventional servomotor and stepping motor face challenges in nanometer positioning stages due to the complex structure, motion transformation mechanism, and slow dynamic response, especially directly driven by linear...Conventional servomotor and stepping motor face challenges in nanometer positioning stages due to the complex structure, motion transformation mechanism, and slow dynamic response, especially directly driven by linear motor. A new butterfly-shaped linear piezoelectric motor for linear motion is presented. A two-degree precision position stage driven by the proposed linear ultrasonic motor possesses a simple and compact configuration, which makes the system obtain shorter driving chain. Firstly, the working principle of the linear ultrasonic motor is analyzed. The oscillation orbits of two driving feet on the stator are produced successively by using the anti-symmetric and symmetric vibration modes of the piezoelectric composite structure, and the slider pressed on the driving feet can be propelled twice in only one vibration cycle. Then with the derivation of the dynamic equation of the piezoelectric actuator and transient response model, start-upstart-up and settling state characteristics of the proposed linear actuator is investigated theoretically and experimentally, and is applicable to evaluate step resolution of the precision platform driven by the actuator. Moreover the structure of the two-degree position stage system is described and a special precision displacement measurement system is built. Finally, the characteristics of the two-degree position stage are studied. In the closed-loop condition the positioning accuracy of plus or minus 〈0.5 μm is experimentally obtained for the stage propelled by the piezoelectric motor. A precision position stage based the proposed butterfly-shaped linear piezoelectric is theoretically and experimentally investigated.展开更多
基金supported by the National Natural Science Foundations of China (Nos.51505161,51375224)the Guangzhou Municipal University Research Projects (No.1201610315)
文摘A novel double-foot piezoelectric linear motor is proposed.The kinematic model of the motor under stepping motion is presented.The motor mainly consists of a stator with four piezoelectric stacks,a mover,a holding mechanism,and a preloading mechanism to achieve large stroke with high resolution.Finite element simulations are carried out to analyze the motion characteristics of the motor.A prototype is fabricated and a serial experiments are conducted to validate the feasibility of the motor principle.Experimental results indicate that the motor can move at a speed of 670.22μm/s with a driving frequency of 120 Hz and a voltage of 120 V.The resolution of the proposed motor is 3.6μm while the resolution of the single-step motion is 0.1μm.
基金Supported by National Basic Research Program of China(973 Program,Grant No.2015CB057500)National Natural Science Foundation of China(Grant Nos.50305035,51575259)Research Fund of State Key Laboratory of Mechanics and Control of Mechanical Structures,China(Grant No.0315K01)
文摘Conventional servomotor and stepping motor face challenges in nanometer positioning stages due to the complex structure, motion transformation mechanism, and slow dynamic response, especially directly driven by linear motor. A new butterfly-shaped linear piezoelectric motor for linear motion is presented. A two-degree precision position stage driven by the proposed linear ultrasonic motor possesses a simple and compact configuration, which makes the system obtain shorter driving chain. Firstly, the working principle of the linear ultrasonic motor is analyzed. The oscillation orbits of two driving feet on the stator are produced successively by using the anti-symmetric and symmetric vibration modes of the piezoelectric composite structure, and the slider pressed on the driving feet can be propelled twice in only one vibration cycle. Then with the derivation of the dynamic equation of the piezoelectric actuator and transient response model, start-upstart-up and settling state characteristics of the proposed linear actuator is investigated theoretically and experimentally, and is applicable to evaluate step resolution of the precision platform driven by the actuator. Moreover the structure of the two-degree position stage system is described and a special precision displacement measurement system is built. Finally, the characteristics of the two-degree position stage are studied. In the closed-loop condition the positioning accuracy of plus or minus 〈0.5 μm is experimentally obtained for the stage propelled by the piezoelectric motor. A precision position stage based the proposed butterfly-shaped linear piezoelectric is theoretically and experimentally investigated.
