A 1.2 V,3.1%3σ-accuracy thermal sensor analog front-end circuit in 12 nm CMOS process

This paper presents a 1.2 V high accuracy thermal sensor analog front-end circuit with 7 probes placed around the microprocessor chip.This analog front-end consists of a BGR(bandgap reference),a DEM(dynamic element matching)control,and probes.The BGR generates the voltages linear changed with temperature,which are followed by the data read out circuits.The superior accuracy of the BGR’s output voltage is a key factor for sensors fabricated via the FinFET digital process.Here,a 4-stage folded current bias structure is proposed,to increase DC accuracy and confer immunity against FinFET process variation due to limited device length and low current bias.At the same time,DEM is also adopted,so as to filter out current branch mismatches.Having been fabricated via a 12 nm FinFET CMOS process,200 chips were tested.The measurement results demonstrate that these analog front-end circuits can work steadily below 1.2 V,and a less than 3.1%3σ-accuracy level is achieved.Temperature stability is 0.088 mV/℃across a range from-40 to 130℃.

A Monolithic Integrated CMOS Thermal Vacuum Sensor

The monolithic integrated micro sensor is an important direction in the fields of integrated circuits and micro sensors. In this paper,a monolithic thermal vacuum sensor based on a micro-hotplate （MHP） and operating under constant bias voltage conditions was designed. A new monolithic integrating mode was proposed,in which the dielectric and passiva- tion layers in standard CMOS processes were used as sensor structure layers,gate polysilicon as the sacrificial layer,and the second polysilicon layer as the sensor heating resistor. Then, the fabricating processes were designed and the monolithic thermal vacuum sensor was fabricated with a 0. 6μm mixed signal CMOS process followed by sacrificial layer etching technology. The measurement results show that the fabricated monolithic vacuum sensor can measure the pressure range of 2- 10^5 Pa and the output voltage is adjustable.

Indoor Human Detection Based on Thermal Array Sensor Data and Adaptive Background Estimation

Low Resolution Thermal Array Sensors are widely used in several applications in indoor environments. In particular, one of these cheap, small and unobtrusive sensors provides a low-resolution thermal image of the environment and, unlike cameras;it is capable to detect human heat emission even in dark rooms. The obtained thermal data can be used to monitor older seniors while they are performing daily activities at home, to detect critical situations such as falls. Most of the studies in activity recognition using Thermal Array Sensors require human detection techniques to recognize humans passing in the sensor field of view. This paper aims to improve the accuracy of the algorithms used so far by considering the temperature environment variation. This method leverages an adaptive background estimation and a noise removal technique based on Kalman Filter. In order to properly validate the system, a novel installation of a single sensor has been implemented in a smart environment: the obtained results show an improvement in human detection accuracy with respect to the state of the art, especially in case of disturbed environments.

On the Temperature Profile of the Thermally Excited Resonant Silicon Micro Structural Pressure Sensor

According to the sensing structure of a practical silicon resonant pressure micro sensor whose preliminary sensing unit is a square silicon diaphragm and the final sensing unit is a silicon beam resonator, its operating mechanism is analyzed. The thermal resistor acts as the excited unit, and the piezoresistive unit acts as the detector, for the above micro sensor. By using the amplitude and phase conditions, the self exciting closed loop system is investigated based on the operating mechanism for the abov...

THEORETICAL AND EXPERIMENTAL RESEARCH ON THERMAL SENSOR FOR ROBOT

A thermal sensor for material identification is proposed. This paper describes the model,design, and testing of the sensor. Some factors of the detector which affect the performancesof the sensor are discussed. A new concept called the thermal sense characteristic parameter isadvanced, and the relationship between the thermal sense characteristic parameter and theresponse of the sensor is given. A method for computing thermal sense characteristic param-eter from the response of the sensor is indicated. Based on our developed sensor, the correc-tion rates of the testing results of the seven materials (copper, aluminum, steel, rubber, PCB,polyflon, paper) from 130 identifications are 100%.

Micro thermal shear stress sensor based on vacuum anodic bonding and bulk-micromachining

This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element. By using vacuum anodic bonding and bulk-si anisotropic wet etching process instead of the sacrificial-layer technique, a cavity, functioned as the adiabatic vacuum chamber, 200μm×200μm×400μm, is placed between the silicon nitride diaphragm and glass （Corning 7740）. This method totally avoid adhesion problem which is a major issue of the sacrificial-layer technique.

热-结构耦合作用下压电式力传感器热应力分析

针对极端环境下高温传感器的可靠性受限于热应力,导致传感器零漂和温漂甚至失效的问题,提出了一种基于热-结构耦合的高温压电式力传感器热应力计算方法及其有限元模型。基于平衡方程和热-弹性理论,建立了传感器热弹性力学物理方程,分析了封装材料和温度对压电式力传感器热应力的影响规律。通过分析高温环境下压电式力传感器的热应力分布,确定传感器应力集中位置。对传感器热应力进行溯源,得到封装材料和晶组材料的热膨胀系数不一致导致热失配应力产生。将随机振动功率谱密度转换为加速度时域信号,利用多物理场耦合方法,分析得到传感器的最大热应力为134.61 MPa,小于材料的屈服强度300 MPa,验证了传感器在高温、高压和随机振动综合环境下具有良好的可靠性。通过研究氧化铝和氧化锆绝缘层对传感器最大热应力的影响,研究结果表明,温度为420℃时氧化铝绝缘层传感器的最大热应力比无绝缘层传感器的最大热应力小9.18 MPa,比氧化锆绝缘层传感器最大热应力小79.31 MPa,该工作可为高温环境下减小传感器热应力措施提供一定的参考。

Packaging Effects on Fiber Bragg Grating Sensor Performance

In this paper, the effects of packaging material and structure of fiber Bragg grating sensor performance are investigated. The effects of thermal expansion coefficient of different embedding materials on the temperature sensitivities of the FBG sensors are studied both theoretically and experimentally with good agreement, which provides a means for selection of FBG packaging material to achieve desired temperature sensitivity. We also demonstrate a 4-point bending structured FBG lateral force sensor that measures up to 242N force with well-preserved reflection spectrum, whereas for 3-point bending structure, multiple-peaks start to occur when applied force reaches 72N.

Real-time quality control of data from Sea-Wing underwater glider installed with Glider Payload CTD sensor

Profiles observed by Sea-Wing underwater gliders are widely applied in scientific research. However, the quality control(QC) of these data has received little attention. The mismatch between the temperature probe and conductivity cell response times generates erroneous salinities, especially across a strong thermocline. A sensor drift may occur owing to biofouling and biocide leakage into the conductivity cell when a glider has operated for several months. It is therefore critical to design a mature real-time QC procedure and develop a toolbox for the QC of Sea-Wing glider data. On the basis of temperature and salinity profiles observed by several Sea-Wing gliders each installed with a Sea-Bird Glider Payload CTD sensor, a real-time QC method including a thermal lag correction, Argo-equivalent real-time QC tests, and a simple post-processing procedure is proposed. The method can also be adopted for Petrel gliders.

Transparent ZnO/glass surface acoustic wave based high performance ultraviolet light sensors

Surface acoustic wave （SAW） resonators are a type of ultraviolet （UV） light sensors with high sensitivity, and they have been extensively studied. Transparent SAW devices are very useful and can be developed into various sensors and microfluidics for sensing/monitoring and lab-on-chip applications. We report the fabrication of high sensitivity SAW UV sensors based on piezoelectric （PE） ZnO thin films deposited on glass substrates. The sensors were fabricated and their performances against the post-deposition annealing condition were investigated. It was found that the UV-light sensitivity is improved by more than one order of magnitude after annealing. The frequency response increases significantly and the response becomes much faster. The optimized devices also show a small temperature coefficient of frequency and excellent repeatability and stability, demonstrating its potential for UV-light sensing application.

A non-destructive method to measure the thermal properties of frozen soils during phase transition

Frozen soils cover about 40% of the land surface on the earth and are responsible for the global energybalances affecting the climate. Measurement of the thermal properties of frozen soils during phasetransition is important for analyzing the thermal transport process. Due to the involvement of phasetransition, the thermal properties of frozen soils are rather complex. This paper introduces the uses of amultifunctional instrument that integrates time domain reflectometry （TDR） sensor and thermal pulsetechnology （TPT） to measure the thermal properties of soil during phase transition. With this method,the extent of phase transition （freezing/thawing） was measured with the TDR module; and the correspondingthermal properties were measured with the TPT module. Therefore, the variation of thermalproperties with the extent of freezing/thawing can be obtained. Wet soils were used to demonstrate theperformance of this measurement method. The performance of individual modules was first validatedwith designed experiments. The new sensor was then used to monitor the properties of soils duringfreezingethawing process, from which the freezing/thawing degree and thermal properties weresimultaneously measured. The results are consistent with documented trends of thermal propertiesvariations. 2015 Institute of Rock and Soil Mechanics, Chinese Academy of Sciences. Production and hosting byElsevier B.V. All rights reserved.

A 2-Dimensional Micro Flow Sensor with Wide Range Flow Sensing Properties

A new silicon micro flow sensor with multiple temperature sensing elements was proposed and numerically simulated in considering wide range flow measuring properties.The micro flow sensor has three pairs of temperature sensing elements with a central heater compared with typical sensor which has only a temperature sensing element on each side of a central heater.A numerical analysis of the micro flow sensor by Finite Difference Formulation for Heat Transfer Equation was performed.The nearest pair of temperature sensor showed very good linear sensitivity between 0 to 0.4m/s flow and saturated from 0.75m/s flow.However the furthest pair of temperature sensor showed some flow sensitivity even though the flow rate of 2.0m/s.Thus,this suggested new micro flow meter with multiple temperature sensing elements could be used as a thermal mass flow sensor which has accuracy sensitivity for very wide flow range.

Effects of rapid thermal annealing on the room-temperature NO_2-sensing properties of WO_3 thin films under LED radiation

WO3 thin films were sputtered onto alumina substrates by DC facing-target magnetron sputtering. One sample was rapid-thermal-annealed （RTA） at 600 ℃ in a gas mixture of N2：O2 = 4 ： 1, and as a comparison, another was conventionally thermal-annealed at 600 ℃ in air. The morphology of both was investigated by scanning electron microscopy （SEM） and atomic force microscopy （AFM）, and the crystallization structure and phase identification were characterized by X-ray diffraction （XRD）. The NO2-sensing measurements were taken under LED light at room temperature. The sensitivity of the RTA-treated sample was found to be high, up to nearly 100, whereas the sensitivity of the conventionally thermal-annealed sample was about five under the same conditions. From the much better selectivity and response-recovery characteristics, it can be concluded that compared to conventional thermal annealing, RTA has a greater effect on the NO2-sensing properties of WO3 thin films.

基于电介质超材料的中红外超窄带吸波器

电介质超材料因具有极低欧姆损耗受到广泛关注.提出一种基于电介质超材料的中红外超窄带吸波器,该吸波器由顶层电介质微结构、中间层电介质膜和基底金属构成.研究结果表明:该吸波器在中红外波段存在带宽为2.40nm的吸收峰;电场主要分布于顶层硅微结构之间的间隙,导致吸收损耗功率显著降低,进而实现吸收带宽压缩;作为传感器时,在中红外波段该吸波器的品质因数可达80.可见,该吸波器可应用于中红外热辐射光源和高性能传感器.

The Effect of Temperature and Doping Level on the Characteristics of Piezoresistive Pressure Sensor

Piezoresistive pressure sensors based on silicon have a large thermal drift because of their high sensitivity to temperature. The study of the effect of the temperature and doping level on characteristics of these sensors is essential to define the parameters that cause the output characteristics drift. In this study, we adopted the model of Kanda to determine the effect of the temperature and of doping level on the piezoresistivity of the Silicon monocrystal. This is to represent P(N,T) and for p-type silicon as functions of impurity concentration for different temperatures. This allows us to see the effect of temperature and doping concentration on the output characteristics of the sensor. Finally, we study the geometric influence parameters and doping on these characteristics to optimize the sensor performance. This study allows us to predict the sensor behavior against temperature and to minimize this effect by optimizing the doping concentration.

基于双螺旋式加热器的柔性MEMS流量传感器

针对传统流量传感器的量程限制,提出了一种基于双螺旋结构加热器的柔性基底微机电系统(MEMS)热式流量传感器。在基底上打出均匀通孔阵列以降低热传导损耗,两对测温电阻对称分布在加热器两侧,以获得较宽量程,在微小流量与大流量下均表现出较高灵敏度。采用基于惠斯通电桥的检测电路实现输出电压的测量,同时保持加热器与环境温度恒定温差200 K,对电阻自热进行补偿。传感器工作温度-100~400℃,量程为0~60 m/s;低流速下灵敏度约为12.75 V/(m·s^(-1)),分辨率可达0.001 mm/s,高流速下灵敏度约为1.4 mV/(m·s^(-1)),功耗低至1.3 mW。

基于动态高分辨图像的粮仓玉米温度变化监测方法

为了监测粮仓内玉米的温度变化情况,为后续的储藏条件提供理论参考,提出了一种基于动态高分辨率图像的玉米粮仓温度变化监测方法。采用热成像传感器进行玉米粮仓基础数据采集,数据由H3C R4900 G3服务器处理和存储。运用绝对定标方法计算干扰率以消除传感器干扰,生成高分辨率图像,并进行几何校正。然后通过影像分割提取差异性特征,影像分割将图像划分为不同区域后提取纹理特征确定监测范围,经多尺度分割和区域整合得到影像像斑,依据像斑差异性参数求解公式确定像斑整合条件。最后在多维特征下进行动态高分辨率监测玉米粮仓温度变化,通过设定卷积滤波中心、卷积层特征表达式等一系列计算得到影像像斑特征,从而实现温度变化监测。实验结果表明:该方法能够有效地监测粮仓玉米温度变化,为后续的粮仓存储提供了有价值的参考。

循环老化三元锂离子电池热失控气体毒性研究

为研究高能量密度锂离子电池循环老化过程中热失控特性变化及释放气体的毒性危害,对不同循环老化程度的三元锂离子电池进行热滥用实验,利用气体传感器阵列,基于有效剂量分数模型对热失控气体毒性危害进行定量分析。结果表明,高镍含量三元锂离子电池循环性能差,200次循环老化后,电池健康状态低于70%。老化电池更容易进入热失控状态,热失控反应更剧烈但释放能量少,释放气体燃烧效率低。在密闭空间内,电池热失控释放窒息性气体危害性比刺激性气体更高,150次循环老化电池的窒息性气体毒性累积效应比新鲜电池早638 s达到临界值1。随老化程度增加,最终电池的刺激性气体毒性即时效应与气体致死毒性即时效应降低,与新鲜电池相比,100次循环老化后,电池的刺激性气体毒性即时效应降低0.34,气体致死毒性即时效应降低0.19。研究结果可为老化电池安全性评估及热失控预警提供数据支撑。