With the increasing market demand for optical complex surface parts,the application of multi-axis ultraprecision single-point diamond turning is increasing.A tool path generation method is very important to decrease m...With the increasing market demand for optical complex surface parts,the application of multi-axis ultraprecision single-point diamond turning is increasing.A tool path generation method is very important to decrease manufacturing time,enhance surface quality,and reduce cost.Compared with the tool path generation of the traditional multi-axis milling,that of the ultra-precision single-point diamond turning requires higher calculation accuracy and efficiency.This paper reviews the tool path generation of ultra-precision diamond turning,considering several key issues:cutter location(CL)points calculation,the topological form of tool path,interpolation mode,and G code optimization.展开更多
A new idea for designing wheel patterns is presented so as to solve theproblems about machining accuracy of workpiece and wear of honing wheel in ultra-precision planehoning. The influence factors on motion principle ...A new idea for designing wheel patterns is presented so as to solve theproblems about machining accuracy of workpiece and wear of honing wheel in ultra-precision planehoning. The influence factors on motion principle and pattern structures are analyzed andoptimization machining parameters are obtained. By calculating effective cutting length on thesurface of workpiece cut by wheel's abrasive and the orbit of one point on the surface of workpiececontacting with wheel, the wear coefficient of different kinds of wheels and accuracy coefficient ofworkpiece machined by corresponding wheels are obtained. Furthermore, the simulation results showthat the optimal pattern structure of wheel turns out to have lower wheel wear and higher machiningaccuracy.展开更多
The effects of the nonuniform cutting force and elastic recovery of processed materials in ultra-precision machining are too complex to be treated using traditional cutting theories,and it is necessary to take account...The effects of the nonuniform cutting force and elastic recovery of processed materials in ultra-precision machining are too complex to be treated using traditional cutting theories,and it is necessary to take account of factors such as size effects,the undeformed cutting thickness,the tool blunt radius,and the tool rake angle.Therefore,this paper proposes a new theoretical calculation model for accurately predicting the cutting force in ultra-precision machining,taking account of such factors.The model is first used to analyze the material deformation of the workpiece and the cutting force distribution along the cutting edge of a diamond tool.The size of the strain zone in different cutting deformation zones is then determined by using the distribution of strain work per unit volume and considering the characteristics of the stress distribution in these different deformation zones.Finally,the cutting force during ultra-precision machining is predicted precisely by calculating the material strain energy in different zones.A finite element analysis and experimental data on ultra-precision cutting of copper and aluminum are used to verify the predictions of the theoretical model.The results show that the error in the cutting force between the calculation results and predictions of the model is less than 14%.The effects of the rake face stress distribution of the diamond tool,the close contact zone,and material elastic recovery can be fully taken into account by the theoretical model.Thus,the proposed theoretical calculation method can effectively predict the cutting force in ultra-precision machining.展开更多
Based on the study of existing typical micro-milling tools and the actual demand for micro-milling tools, the P3 design principle and design flow for ultra-hard micro-milling tool were introduced to give basic guidanc...Based on the study of existing typical micro-milling tools and the actual demand for micro-milling tools, the P3 design principle and design flow for ultra-hard micro-milling tool were introduced to give basic guidance for the optimization of micro-milling tools. Then, according to the P3 design flow, the manufacturing process of polycrystalline diamond(PCD) micro-milling tool was proposed, and the PCD micro-milling tool with diameter of 0.5 mm was developed. Finally, the micro-milling test on the slot was carried out to study the milling performance of PCD micromilling tool.展开更多
In this article, the results obtained from a study carried out on the some elements-incorporated diamond-like carbon (DLC) films are reported. All the films were deposited using plasma-based ion implantation (PBII) te...In this article, the results obtained from a study carried out on the some elements-incorporated diamond-like carbon (DLC) films are reported. All the films were deposited using plasma-based ion implantation (PBII) technique. The deposited films were annealed at 400℃, 650℃ and 900℃ in an air atmosphere for 1 hour. The effects of adding hydrogen, silicon/oxygen and silicon/nitrogen into the DLC film on chemical composition, friction coefficient and corrosion resistance were investigated. The films coated micro end mills performance was also assessed. The results indicate that all the films showed almost constant atomic contents of C, Si, O and N until annealing at 400℃. However, the films were completely destroyed at 650℃ with the increased Si and O contents, while the C content decreased. The incorporation of silicon/oxygen and silicon/nitrogen into the DLC exhibited lower values of friction coefficients than the hydrogenated DLC (DLC and H-DLC) before and after annealing at 400℃, whereas all the films presented the same values of friction coefficients after annealing at 650℃ due to the completely destroy of the films. Furthermore, the incorporation of silicon/nitrogen into the DLC also exhibited better corrosion resistance and unbroken micro end mills performance on their surfaces. Thus, the incorporation of silicon/nitrogen into the DLC film can be considered beneficial in improving the micro end mills performance.展开更多
The aim of this work is to simulate thermal deformation of tool system and investigate the influence of cutting parameters on it in single-point diamond turning(SPDT) of aluminum alloy. The experiments with various cu...The aim of this work is to simulate thermal deformation of tool system and investigate the influence of cutting parameters on it in single-point diamond turning(SPDT) of aluminum alloy. The experiments with various cutting parameters were conducted. Cutting temperature was measured by FLIR A315 infrared thermal imager. Tool wear was measured by scanning electron microscope(SEM). The numerical model of heat flux considering tool wear generated in cutting zone was established. Then two-step finite element method(FEM) simulations matching the experimental conditions were carried out to simulate the thermal deformation. In addition, the tests of deformation of tool system were performed to verify previous simulation results. And then the influence of cutting parameters on thermal deformation was investigated. The results show that the temperature and thermal deformation from simulations agree well with the results from experiments in the same conditions. The maximum thermal deformation of tool reaches to 7 μm. The average flank wear width and cutting speed are the dominant factors affecting thermal deformation, and the effective way to decrease the thermal deformation of tool is to control the tool wear and the cutting speed.展开更多
Ultra-precision machining has been well known as a very precise and effective way to prototype and fabricate different types of components with microstructures.In this paper,an ultra-precision micro-milling method has...Ultra-precision machining has been well known as a very precise and effective way to prototype and fabricate different types of components with microstructures.In this paper,an ultra-precision micro-milling method has been presented to produce a micro-step pillar array as an embossing mold for semiconductor application.Theoretical analysis on machining mechanics indicates that work material property,machining strategy,and cutting tool geometry largely afFect machining distortion on the machined microstructure.Experimental investigation has been conducted on micromachining of the micro-step pillar array using different types of cutting tools and work materials.Experimental results demonstrate that the material property,cutting tool edge radius,and cutting force play a significant role in the machined micro-structure accuracy and surface finish,while grain boundary of brass has no significant effect on the micro-milling performance.The best outcome among the tests done is achieved when using brass as work material and cutting with a straight-edge single crystalline diamond tool.The main reasons to achieve this outcome are based on:the brass material having a higher elastic modulus and the diamond tool having a smaller cutting edge radius,which contributes to better machinability of brass.One micro-step pillar array has been successfully obtained with very precise feature and dimensional accuracy using brass work material and single-crystal diamond tool.It is believed that the outcomes of this study would largely benefit the research community and end-users.展开更多
In this paper, a series of experiments were performed by high speed milling of Ti-6.5Al-2Zr-1Mo-1V (TA15) by use of polycrystalline diamond (PCD) tools. The characteristics of high speed machining (HSM) dynamic millin...In this paper, a series of experiments were performed by high speed milling of Ti-6.5Al-2Zr-1Mo-1V (TA15) by use of polycrystalline diamond (PCD) tools. The characteristics of high speed machining (HSM) dynamic milling forces were investi- gated. The effects of the parameters of the process, i.e., cutting speed, feed per tooth, and depth of axial cut, on cutting forces were studied. The cutting force signals under different cutting speed conditions and different cutting tool wear stages were analyzed by frequency spectrum analysis. The trend and frequency domain aspects of the dynamic forces were evaluated and discussed. The results indicate that a characteristic frequency in cutting force power spectrum does in fact exist. The amplitudes increase with the increase of cutting speed and tool wear level, which could be applied to the monitoring of the cutting process.展开更多
The vibration disturbance from an external environment affects the machining accuracy of ultra-precision machining equipment.Most active vibration-isolation systems(AVIS)have been developed based on static loads.When ...The vibration disturbance from an external environment affects the machining accuracy of ultra-precision machining equipment.Most active vibration-isolation systems(AVIS)have been developed based on static loads.When a vibration-isolation load changes dynamically during ultra-precision turning lathe machining,the system parameters change,and the efficiency of the active vibration-isolation system based on the traditional control strategy deteriorates.To solve this problem,this paper proposes a vibration-isolation control strategy based on a genetic algorithm-back propagation neural network-PID control(GA-BP-PID),which can automatically adjust the control parameters according to the machining conditions.Vibration-isolation simulations and experiments based on passive vibration isolation,a PID algorithm,and the GA-BP-PID algorithm under dynamic load machining conditions were conducted.The experimental results demonstrated that the active vibration-isolation control strategy designed in this study could effectively attenuate vibration disturbances in the external environment under dynamic load conditions.This design is reasonable and feasible.展开更多
聚焦离子束(focused Ion beam,FIB)作为一种用于金刚石微铣刀的特种加工方式,其引发的损伤程度直接关联到刀具的加工性能和寿命。课题组采用LAMMPS软件进行分子动力学(Molecular Dynamics,MD)模拟,结合SRIM软件的分析结果,探究单晶金刚...聚焦离子束(focused Ion beam,FIB)作为一种用于金刚石微铣刀的特种加工方式,其引发的损伤程度直接关联到刀具的加工性能和寿命。课题组采用LAMMPS软件进行分子动力学(Molecular Dynamics,MD)模拟,结合SRIM软件的分析结果,探究单晶金刚石亚表层损伤的形成机理和入射离子能量对损伤深度和范围的影响。模拟结果表明:随着入射离子能量的提升,离子束在材料内的渗透深度及引起的非晶层和点缺陷损伤均有所增加;进一步的研究发现损伤形成过程中材料局部温度的上升可能诱发自退火现象,且与离子入射能量成正比,该现象对于理解聚焦离子束加工引起的损伤有着至关重要的意义;而势能的变化与损伤形成之间的显著对应关系揭示了第一邻近原子的势能明显高于第二邻近原子,进而高于Other类型原子,这一发现有助于深入理解损伤形成的微观过程。因此,精确控制入射能量是实现金刚石材料高精度聚焦离子束加工的关键,且对自退火效应和势能变化的研究对损伤监控与控制同样重要。展开更多
基金supports of the Funds for the National Natural Science Foundation of China [grant numbers 51575386,51275344]
文摘With the increasing market demand for optical complex surface parts,the application of multi-axis ultraprecision single-point diamond turning is increasing.A tool path generation method is very important to decrease manufacturing time,enhance surface quality,and reduce cost.Compared with the tool path generation of the traditional multi-axis milling,that of the ultra-precision single-point diamond turning requires higher calculation accuracy and efficiency.This paper reviews the tool path generation of ultra-precision diamond turning,considering several key issues:cutter location(CL)points calculation,the topological form of tool path,interpolation mode,and G code optimization.
基金This project is supported by Foundation of Xiamen Univer sity of China for Scholars Return from Abroad (No.08003).
文摘A new idea for designing wheel patterns is presented so as to solve theproblems about machining accuracy of workpiece and wear of honing wheel in ultra-precision planehoning. The influence factors on motion principle and pattern structures are analyzed andoptimization machining parameters are obtained. By calculating effective cutting length on thesurface of workpiece cut by wheel's abrasive and the orbit of one point on the surface of workpiececontacting with wheel, the wear coefficient of different kinds of wheels and accuracy coefficient ofworkpiece machined by corresponding wheels are obtained. Furthermore, the simulation results showthat the optimal pattern structure of wheel turns out to have lower wheel wear and higher machiningaccuracy.
基金This work was supported by the National Natural Science Foundation of China(Grant No.51305278)the Liaoning Revitalization Talents Program,China(GrantNo.XLYC2007133)the Natural Science Foundation of Liaoning Province,China(GrantNo.2020-MS-213).
文摘The effects of the nonuniform cutting force and elastic recovery of processed materials in ultra-precision machining are too complex to be treated using traditional cutting theories,and it is necessary to take account of factors such as size effects,the undeformed cutting thickness,the tool blunt radius,and the tool rake angle.Therefore,this paper proposes a new theoretical calculation model for accurately predicting the cutting force in ultra-precision machining,taking account of such factors.The model is first used to analyze the material deformation of the workpiece and the cutting force distribution along the cutting edge of a diamond tool.The size of the strain zone in different cutting deformation zones is then determined by using the distribution of strain work per unit volume and considering the characteristics of the stress distribution in these different deformation zones.Finally,the cutting force during ultra-precision machining is predicted precisely by calculating the material strain energy in different zones.A finite element analysis and experimental data on ultra-precision cutting of copper and aluminum are used to verify the predictions of the theoretical model.The results show that the error in the cutting force between the calculation results and predictions of the model is less than 14%.The effects of the rake face stress distribution of the diamond tool,the close contact zone,and material elastic recovery can be fully taken into account by the theoretical model.Thus,the proposed theoretical calculation method can effectively predict the cutting force in ultra-precision machining.
基金Supported by the National Natural Science Foundation of China(No.50935003)Science and Technology Support Project of Jiangsu Province,China(No.BE2012172)
文摘Based on the study of existing typical micro-milling tools and the actual demand for micro-milling tools, the P3 design principle and design flow for ultra-hard micro-milling tool were introduced to give basic guidance for the optimization of micro-milling tools. Then, according to the P3 design flow, the manufacturing process of polycrystalline diamond(PCD) micro-milling tool was proposed, and the PCD micro-milling tool with diameter of 0.5 mm was developed. Finally, the micro-milling test on the slot was carried out to study the milling performance of PCD micromilling tool.
文摘In this article, the results obtained from a study carried out on the some elements-incorporated diamond-like carbon (DLC) films are reported. All the films were deposited using plasma-based ion implantation (PBII) technique. The deposited films were annealed at 400℃, 650℃ and 900℃ in an air atmosphere for 1 hour. The effects of adding hydrogen, silicon/oxygen and silicon/nitrogen into the DLC film on chemical composition, friction coefficient and corrosion resistance were investigated. The films coated micro end mills performance was also assessed. The results indicate that all the films showed almost constant atomic contents of C, Si, O and N until annealing at 400℃. However, the films were completely destroyed at 650℃ with the increased Si and O contents, while the C content decreased. The incorporation of silicon/oxygen and silicon/nitrogen into the DLC exhibited lower values of friction coefficients than the hydrogenated DLC (DLC and H-DLC) before and after annealing at 400℃, whereas all the films presented the same values of friction coefficients after annealing at 650℃ due to the completely destroy of the films. Furthermore, the incorporation of silicon/nitrogen into the DLC also exhibited better corrosion resistance and unbroken micro end mills performance on their surfaces. Thus, the incorporation of silicon/nitrogen into the DLC film can be considered beneficial in improving the micro end mills performance.
基金Project(51175122)supported by the National Natural Science Foundation of China
文摘The aim of this work is to simulate thermal deformation of tool system and investigate the influence of cutting parameters on it in single-point diamond turning(SPDT) of aluminum alloy. The experiments with various cutting parameters were conducted. Cutting temperature was measured by FLIR A315 infrared thermal imager. Tool wear was measured by scanning electron microscope(SEM). The numerical model of heat flux considering tool wear generated in cutting zone was established. Then two-step finite element method(FEM) simulations matching the experimental conditions were carried out to simulate the thermal deformation. In addition, the tests of deformation of tool system were performed to verify previous simulation results. And then the influence of cutting parameters on thermal deformation was investigated. The results show that the temperature and thermal deformation from simulations agree well with the results from experiments in the same conditions. The maximum thermal deformation of tool reaches to 7 μm. The average flank wear width and cutting speed are the dominant factors affecting thermal deformation, and the effective way to decrease the thermal deformation of tool is to control the tool wear and the cutting speed.
文摘Ultra-precision machining has been well known as a very precise and effective way to prototype and fabricate different types of components with microstructures.In this paper,an ultra-precision micro-milling method has been presented to produce a micro-step pillar array as an embossing mold for semiconductor application.Theoretical analysis on machining mechanics indicates that work material property,machining strategy,and cutting tool geometry largely afFect machining distortion on the machined microstructure.Experimental investigation has been conducted on micromachining of the micro-step pillar array using different types of cutting tools and work materials.Experimental results demonstrate that the material property,cutting tool edge radius,and cutting force play a significant role in the machined micro-structure accuracy and surface finish,while grain boundary of brass has no significant effect on the micro-milling performance.The best outcome among the tests done is achieved when using brass as work material and cutting with a straight-edge single crystalline diamond tool.The main reasons to achieve this outcome are based on:the brass material having a higher elastic modulus and the diamond tool having a smaller cutting edge radius,which contributes to better machinability of brass.One micro-step pillar array has been successfully obtained with very precise feature and dimensional accuracy using brass work material and single-crystal diamond tool.It is believed that the outcomes of this study would largely benefit the research community and end-users.
基金Project (No.IRT0837) supported by the Program for Changjiang Scholars and Innovative Research Team in University of China
文摘In this paper, a series of experiments were performed by high speed milling of Ti-6.5Al-2Zr-1Mo-1V (TA15) by use of polycrystalline diamond (PCD) tools. The characteristics of high speed machining (HSM) dynamic milling forces were investi- gated. The effects of the parameters of the process, i.e., cutting speed, feed per tooth, and depth of axial cut, on cutting forces were studied. The cutting force signals under different cutting speed conditions and different cutting tool wear stages were analyzed by frequency spectrum analysis. The trend and frequency domain aspects of the dynamic forces were evaluated and discussed. The results indicate that a characteristic frequency in cutting force power spectrum does in fact exist. The amplitudes increase with the increase of cutting speed and tool wear level, which could be applied to the monitoring of the cutting process.
基金supported by the National Natural Science Foundation of China(Grant Nos.62073184,52105490).
文摘The vibration disturbance from an external environment affects the machining accuracy of ultra-precision machining equipment.Most active vibration-isolation systems(AVIS)have been developed based on static loads.When a vibration-isolation load changes dynamically during ultra-precision turning lathe machining,the system parameters change,and the efficiency of the active vibration-isolation system based on the traditional control strategy deteriorates.To solve this problem,this paper proposes a vibration-isolation control strategy based on a genetic algorithm-back propagation neural network-PID control(GA-BP-PID),which can automatically adjust the control parameters according to the machining conditions.Vibration-isolation simulations and experiments based on passive vibration isolation,a PID algorithm,and the GA-BP-PID algorithm under dynamic load machining conditions were conducted.The experimental results demonstrated that the active vibration-isolation control strategy designed in this study could effectively attenuate vibration disturbances in the external environment under dynamic load conditions.This design is reasonable and feasible.
文摘聚焦离子束(focused Ion beam,FIB)作为一种用于金刚石微铣刀的特种加工方式,其引发的损伤程度直接关联到刀具的加工性能和寿命。课题组采用LAMMPS软件进行分子动力学(Molecular Dynamics,MD)模拟,结合SRIM软件的分析结果,探究单晶金刚石亚表层损伤的形成机理和入射离子能量对损伤深度和范围的影响。模拟结果表明:随着入射离子能量的提升,离子束在材料内的渗透深度及引起的非晶层和点缺陷损伤均有所增加;进一步的研究发现损伤形成过程中材料局部温度的上升可能诱发自退火现象,且与离子入射能量成正比,该现象对于理解聚焦离子束加工引起的损伤有着至关重要的意义;而势能的变化与损伤形成之间的显著对应关系揭示了第一邻近原子的势能明显高于第二邻近原子,进而高于Other类型原子,这一发现有助于深入理解损伤形成的微观过程。因此,精确控制入射能量是实现金刚石材料高精度聚焦离子束加工的关键,且对自退火效应和势能变化的研究对损伤监控与控制同样重要。