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Effect of Heat-treatment on Crystalline Phase and UV Absorption of 60CeO_2-40TiO_2 Thin Films by Magnetron Sputtering 被引量:5
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作者 NI Jiamiao ZHAO Xiujian ZHAO Qingnan 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2012年第5期881-885,共5页
60CeO2-40TiO2 thin films were deposited on soda-lime silicate glass substrates by R.F. magnetron sputtering. The effects of heat-treatment on the UV-absorption of the thin films were studied on the 60CeO2-40TiO2 thin ... 60CeO2-40TiO2 thin films were deposited on soda-lime silicate glass substrates by R.F. magnetron sputtering. The effects of heat-treatment on the UV-absorption of the thin films were studied on the 60CeO2-40TiO2 thin film with the largest UV cut-off wavelength. The sample films with CeO2:TiO2=60:40 were heated at 773 K, 873 K, 973 K for 30 min. These films are characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), and X-ray photoelectron spectroscopy and spectrometer (XPS). XRD analysis proves that the addition of TiO2 to CeO2 changed the crystalline state of CeO2. But the UV absorption effect of CeO2-TiO2 films with CeO2 crystallite phase is inferior to that of the amorphous phase CeO2-TiO2 films. XPS analysis also indicates that the amorphous phase CeO2-TiO2 films have the most Ce3+ content in these films. Amorphous phase and crystalline phase of the CeO2-TiO2 films have different effects on UV absorption of the thin films. 展开更多
关键词 CeO2-TiO2 thin films UV absorption CeO2 crystallite phase radio frequency magnetron sputtering
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