Dynamic Accuracy Design Method of Ultra-precision Machine Tool

Ultra-precision machine tool is the most important physical tool to machining the workpiece with the frequency domain error requirement, in the design process of which the dynamic accuracy design(DAD) is indispensable and the related research is rarely available. In light of above reasons, a DAD method of ultra-precision machine tool is proposed in this paper, which is based on the frequency domain error allocation.The basic procedure and enabling knowledge of the DAD method is introduced. The application case of DAD method in the ultra-precision flycutting machine tool for KDP crystal machining is described to show the procedure detailedly. In this case, the KDP workpiece surface has the requirements in four different spatial frequency bands, and the emphasis for this study is put on the middle-frequency band with the PSD specifications. The results of the application case basically show the feasibility of the proposed DAD method. The DAD method of ultra-precision machine tool can effectively minimize the technical risk and improve the machining reliability of the designed machine tool. This paper will play an important role in the design and manufacture of new ultra-precision machine tool.

Numerical simulation for elastic recovery of ultra-precision machined surface of OFHC copper

Based on the development of a coupled thermo-mechanical plane strain large deformation orthogonal cutting model, the numerical simulation for elastic recovery process of ultra-precision machined surface of oxygen-free high-conductivity(OFHC) copper was performed. The simulation results indicate that the spring-back of machined surface is less than 10nm when the depth of cut reaches the same order of cutting edge radius. But with the decrement of cutting edge radius or depth of cut, the elastic recovery will reduce due to the decline of extrusion between diamond cutting tools edge and chip or machined surface.

Nanoindentation tests on single crystal copper thin film with an AFM

Nanoindentation tests performed in a commercial atomic force microscope have been utilized to directly measure the elastic modulus and the hardness of single crystal copper thin films fabricated by the vacuum vapor deposition technique. Nanoindentation tests were conducted at various indentation depths to study the effect of indentation depths on the mechanical properties of thin films. The results were interpreted by using the Oliver-Pharr method with which direct observation and measurement of the contact area are not required. The elastic modulus of the single crystal copper film at various indentation depths was determined as (67.0±(6.9) GPa) on average which is in reasonable agreement with the results reported in literature. The indentation hardness constantly increases with decreasing indentation depth, indicating a strong size effect.

Preparation of Tungsten Film and Its Tribological Properties under Boundary Lubrication Conditions

Tungsten film(W film) is deposited by using the ion beam assisted deposition(IBAD) on the 316 L substrate surface in this experiment. The micro structure and nano-hardness of the film are investigated by scanning electron microscopy(SEM) and nano-indentation tester. The tribological behavior of W film under lubrication by oil with ZDDP and MoDTC is evaluated by a SRV test machine. The tribo-film formed on the worn surfaces is investigated by X-ray photoelectron spectroscopy(XPS) to find out the tribological mechanisms between the W film and the two additional additives. The result shows that the W film lubricated by ZDDP and MoDTC-blended base oil has synergistic effects on the friction reduction property, while the anti-wear property is mainly caused by the hard surface of W film.

3D PLLA/Nano-hydroxyapatite Scaffolds with Hierarchical Porous Structure Fabricated by Low-temperature Deposition Manufacturing

A new Precision Extrusion nozzle based ball screw transmission was developed. 3D hierarchical porous PLLA/nano-Hydroxyapatite（PLLA/nHA） scaffolds were fabricated by low-temperature deposition manufacturing. Scaffolds with macropores of 200-500 rtm and micropores about 10 pm were fabricated through a thorough study and control of the processing parameters, in which the processing path and speed of material extrusion determine the macropores and there is a suitable temperature zone for fabricating qualified macropores. Micropore morphology can be controlled by adjusting supercooling of solvent crystallization or adding water into the solvent system. The compressive modulus of the scaffolds in air and phosphate buffer solution was measured, which increased with HA addition. In-vitro cell culture results showed a ~ood biocomoatibilitv of PLLA/HA scaffolds with the ore-osteoblastic MC3T3-E1 cells.

Molecular dynamics simulation on mechanical property of carbon nanotube torsional deformation

In this paper torsional deformation of the carbon nanotubes is simulated by molecular dynamics method. The Brenner potential is used to set up the simulation system. Simulation results show that the carbon nanotubes can bear larger torsional deformation, for the armchair type （10,10） single wall carbon nanotubes, with a yielding phenomenon taking place when the torsional angle is up to 63°（1.1rad）. The influence of carbon nanotube helicity in torsional deformation is very small. The shear modulus of single wall carbon nanotubes should be several hundred GPa, not 1 GPa as others reports.

Nanomechanical behaviors of (110) and (111) CdZnTe crystals investigated by nanoindentation

The nanomechanical behaviors of （110） and （111 ） CdZnTe crystals were investigated by nanoindentation. It was found that the indenter tip was adhered by the removed materials in scanning testing area although the scanning force on the tested surface was very small （1000 nN）, which would affect the testing result of nanoindentation, so the indenter was clean before nanoindentation test. The experimemtal results showed that the hardness and Young＇s modulus decreased with the increase of indentation loads on the same plane. Because of the anisotropy of the CdZnTe crystal, the average hardness of （110） plane is 35% lower than that of （111） plane, and there are about 30% difference of the hardness along different crystallographic directions on the same plane. The hardness in 0° and 120° testing directions was the same due to the threefold symmetry of a Berkovich indenter. And the anisotropy affected the surface quality during machining of CdZnTe crystal.

SEGMENTATION ALGORITHM BASED ON EDGE-SEARCHING FOR MULTI-LINEAR STRUCTURED LIGHT IMAGES

Aiming at the problem that the existence of disturbances on the edges of light-stripe makes the segmentation of the light-stripes images difficult, a new segmentation algorithm based on edge-searching is presented. It firstly calculates every edge pixel＇s horizontal coordinate grads to produce the corresponding grads-edge, then uses a designed length-variable l D template to scan the light-stripes＇ grads-edges. The template is able to find the disturbances with different width utilizing the distributing character of the edge disturbances. The found disturbances are eliminated finally. The algorithm not only can smoothly segment the light-stripes images, but also eliminate most disturbances on the light-stripes＇ edges without damaging the light-stripes images＇ 3D information. A practical example of using the proposed algorithm is given in the end. It is proved that the efficiency of the algorithm has been improved obviously by comparison.

ADAPTIVE CONTROL APPROACH FOR PERIODIC RATE RIPPLES IN INERTIAL GUIDANCE TEST EQUIPMENT

The rate performance of inertial guidance test equipment (IGTE) affects the performance testing of inertia devices and navigation systems. Periodic rate ripples caused by periodic disturbances have a great effect on the rate performance of rotation test tables. The mechanism caused by the rate ripple in IGTE is analyzed. Based on the nonlinear self-adaptive control system approach, a control system scheme is proposed to eliminate the period disturbances for its uncertainty. Experimental results show that the periodic rate ripple can efficiently be controlled.

Use of Virtual Medium in Designing of the CGH Wave Front Generator for Aspheric Testing

Design method and procedures of computer-generated hologram （CGH） used for aspheric test are in- troduced in detail. For CGH phase calculation, virtual medium which has zero refractive index at given wavelength is used to model ideal aspheric wavefront. Reflective Fresnel zones located in a ring area concentric to the CGH structure is designed to reduce or eliminate alignment errors. Substrate figure error, pattern distortion, etching and duty cycle variations that influence the reconstructed wavefront are quantitatively analyzed in theory and corresponding error equations are obtained to guide the tolerance distribution during CGH fabricating. A design example is given and the uncertainty of t achieves λ20.

Flow characteristics by particle image velocimetry in liquefied natural gas vaporizer model with several baffles

Shell-and-tube vaporizers are the most commonly used and dominated types of vaporizers in liquefied natural gas （LNG） realm. Due to efficient performance, shell-side flow in this type of vaporizers has received considerable attention and has been investigated extensively. However, the detailed flow structure in the shell needs to be determined for reliable and effective design. Therefore, the objective of this study was to clarify the flow structure in shell by particle image velocimetry （PIV）. Experiments were conducted using two types of model; 15% baffle cut having inlet and outlet positions !n the direction of 90° to the cut and 30% baffle cut having inlet and outlet positions in the direction of 180° to the cut. Each test section is 169 mm in inner diameter and 344.6 mm in length. The flow features were characterized in different baffle cuts with regards to the velocity vector field and velocity distribution. The results show that the flow characteristics of 15% baffle cut type vaporizer are comparable to those of 30% baffle cut type vaporizer.

Unscented Particle Filter Algorithm for Ballistic Target Tracking

At present, the ballistic Target tracking has a higher demand in convergence rate and tracking precision of filter algorithm. In the paper, a filter algorithm was improved based on particle filter. The algorithm was carried out from the aspects such as particle degradation and particle diversity lack. A novel ballistic coefficient parameter model was built, and was expanded to the state vector for filtering. Finally, the improved algorithm was simulated by MATLAB software. The simulation results show that the algorithm can obtain better convergence speed and tracking precision.

IMPROVED FABRICATION METHOD FOR CARBON NANOTUBE PROBE OF ATOMIC FORCE MICROSCOPY(AFM)

An improved arc discharge method is developed to fabricate carbon nanotube probe of atomic force microscopy （AFM） here. First, silicon probe and carbon nanotube are manipulated under an optical microscope by two high precision microtranslators. When silicon probe and carbon nanotube are very close, several tens voltage is applied between them. And carbon nanotube is divided and attached to the end of silicon probe, which mainly due to the arc welding function. Comparing with the arc discharge method before, the new method here needs no coat silicon probe with metal film in advance, which can greatly reduce the fabrication＇s difficulty. The fabricated carbon nanotube probe shows good property of higher aspect ratio and can more accurately reflect the true topography of silicon grating than silicon probe. Under the same image drive force, carbon nanotube probe had less indentation depth on soft triblock copolymer sample than silicon probe. This showed that carbon nanotube probe has lower spring constant and less damage to the scan sample than silicon probe.

Study on rate ripple and its adaptive suppression method in inertia guidance test equipment

This paper discusses causes of the rate ripple in inertia guidance test equipment IGET, systematically analyses their effects an the rate ripple in IGTE. The analysis result shows： The rate ripple caused by the periodic errors of inductosyn and angular encoder is higher at high speed than that caused by magnetic ripple torque and friction torque, and it cannot be eliminated by adjusting control parameters of the system. And based on the nonlinear adaptive control system theory, the paper puts forward a new control system scheme to eliminate the rate ripple caused by the periodic errors of inductosyn and angular encoder, develops the adaptive control rules and makes simulation and test. Experimental result shows a significant improvement on those tables for the period disturbs under the system scheme designed. By this plan, with the input of rate 200°/s, the rate ripple falls from 5°/s to 0. 4°/s within about 6s adaptive adjustment time, being a twelfth of before adaptation, which can not be reached by common classical controls. The experimental results conform with the simulation, which proves the validity and practicability of the plan.

Research on Positioning Error Compensation for Micro Milling Machine Tool

Micro milling has many advantages in fabricating three-dimensional(3D) structure in micrometer scale. The micro milling machine tool with high positioning accuracy is of great importance for getting micro structure with high profile precision and good surface quality. Meanwhile, the method of position error compensation is a good way to improve the accuracy of the micro milling machine tools. In this paper,a software method is adopted to compensate the positioning error and improve the positioning accuracy. According to error cancellation theory,the compensation values are generated and compensation tables are built to adjust the positioning error in the NC system based on Industrial Motion and Automation Control( IMAC). The positioning accuracy of linear motor is ± 0. 3 μm without backlash after compensation. In order to verify the effectiveness of compensation on the machining performance,concave spherical surfaces are processed on the micro milling machine tool. The experimental results show that the profile radius error of the spherical surface machined with compensation decreases more than 60%.

Fabrication of 3D structure by combining AFM and chemical etching on crystalline silicon surface

AFM is used for forming silicon dioxide as a layer (mask) on the silicon wafer surface (100) during the cutting process in ambient atmosphere. The silicon dioxide is made through reaction of silicon and oxygen in the atmosphere. As a result of the anisotropic behavior of single crystalline silicon, the etching rates in alkaline solution depend greatly on the various crystal orientations. The anisotropic etching behaviors in KOH solution and reasons of crystalline silicon are described. Effect of etching conditions such as etching temperature and KOH concentration of the alkaline solution on height of the micro-protuberances has been described.

An improved fabrication method for carbon nanotube probe

An improved arc discharge method is developed to fabricate the carbon nanotube probe. In this method, the silicon probe and the carbon nanotube were manipulated under an optical microscope. When the silicon probe and the carbon nanotube were very close, 30-60 V dc or ae was applied between them, and the carbon nanotube was divided and attached to the end of the silicon probe. Comparing with the arc discharge method, the new method need not coat the silicon probe with metal in advance, which can greatly reduce the fabrication difficulty and cost. The fabricated carbon nanotube probe exhibits the good property of high aspect ratio and can reflect the true topography more accurately than the silicon probe.

Carbon nanotubes as tips for atomic force microscopy

Ordinary AFM probes'characters prevent the AFM' s application in various scopes. Carbon nanotubes represent ideal AFM probe materials for their higher aspect ratio, larger Young's modulus, unique chemical structure, and well-defined electronic property. Carbon nanotube AFM probes are obtained by using a new method of attaching carbon nanotubes to the end of ordinary AFM probes, and are then used for doing AFM experiments. These experiments indicated that carbon nanotube probes have higher elastic deformation, higher resolution and higher durability. And it was also found that carbon nanotube probes ean accurately reflect the morphology of deep narrow gaps, while ordinary probes can not reflect.

Design and experimental study of a micro-groove grinding wheel with spray cooling effect

The effectiveness of grinding fluid supply has a crucial impact on grinding quality and efficiency in high speed grinding. In order to improve the cooling and lubrication, through in-depth research of self-inhaling internal cooling method and intermittent grinding mechanism, a new spray cooling method used in high speed grinding is proposed. By referring to the structure of bowl- shaped dispersion disk, the grinding wheel matrix with atomization ability is designed; through studying heat transfer of droplet collision and the influence of micro-groove on the boiling heat transfer, grinding segment with micro-groove is designed to enhance the heat flux of coolant and achieve maximum heat transfer between droplets and grinding contact zone. High-speed grinding experiments on GH4169 with the developed grinding wheel are carried out. The results show that with the micro-groove grinding wheel just 5.4% of pump outlet flow rate and 0.5% of spindle energy is needed to reduce the grinding temperature to 200℃, which means the developed grinding wheel makes cooling high efficient and low energy consuming.

Misalignment error calibration of faro retro probe for laser tracker system

A technique to calibrate faro retro probe using laser tracker system （LTS） is presented. The deep-access retro probe enables LTS to perform three-dimensional （3D） measurements of surface hidden features. It has been shown that misalignment errors are the key contributor to measuring errors of retro probe. A device for measuring misalignment errors of retro probe is invented. Theoretical analysis and experiment show that using this technique to calibrate retro probe, the misalignment errors of retro probe can be eliminated effectvelv and quickly.