The studies were made on the preparation processes of the rare earth metal and alloy target materials and their characterization. In this work the rare earth metals were prepared by electrolysis of the oxide in molten...The studies were made on the preparation processes of the rare earth metal and alloy target materials and their characterization. In this work the rare earth metals were prepared by electrolysis of the oxide in molten salt for Nd metal and metallothermic reduction of the fluorides for Gd, Tb, Dy metals. After vacuum refining and distillation purification these rare earth metals were used for manufacturing the element targets, mosaic targets and as the starting materials of preparing the rare earth-transition metal (RE-TM) alloy targets. The four kinds of Dy-FeCo, NdDy-FeCo, Tb-FeCo and GdTb-FeCo alloy targets with diameter of 100 mm and thickness of 3 mm were prepared using powder metallurgical technique. The oxygen content and microstructure of the prepared RE-TM cast alloys and sintered targets were analyzed. The features and requirements of the RE-TM alloy sputtering target materials were also discussed.展开更多
基金Former the Ministry of Metallurgical Industry of China (BJ95-06-01)
文摘The studies were made on the preparation processes of the rare earth metal and alloy target materials and their characterization. In this work the rare earth metals were prepared by electrolysis of the oxide in molten salt for Nd metal and metallothermic reduction of the fluorides for Gd, Tb, Dy metals. After vacuum refining and distillation purification these rare earth metals were used for manufacturing the element targets, mosaic targets and as the starting materials of preparing the rare earth-transition metal (RE-TM) alloy targets. The four kinds of Dy-FeCo, NdDy-FeCo, Tb-FeCo and GdTb-FeCo alloy targets with diameter of 100 mm and thickness of 3 mm were prepared using powder metallurgical technique. The oxygen content and microstructure of the prepared RE-TM cast alloys and sintered targets were analyzed. The features and requirements of the RE-TM alloy sputtering target materials were also discussed.
