Lithium niobate(LN)metasurfaces have emerged as a new platform for manipulating electromagnetic waves.Here,we report a fabrication technique for LN nano-grating metasurfaces by combining focused ion beam(FIB)milling w...Lithium niobate(LN)metasurfaces have emerged as a new platform for manipulating electromagnetic waves.Here,we report a fabrication technique for LN nano-grating metasurfaces by combining focused ion beam(FIB)milling with inductively coupled plasma reactive ion etching(ICP-RIE).Steep sidewalls with angles larger than 80°are achieved.Sharp quasi-bound states in the continuum are observed from our metasurfaces.The measured transmission spectra show good agreement with the numerical simulations,confirming the high quality of the fabricated metasurfaces.Our technique can be applied to fabricate the LN metasurfaces with sharp resonances for various applications in optical communications,on-chip photonics,laser physics,sensing,and so on.展开更多
基金supported by the National Key R&D Program of China(Nos.2017YFA0305100,2017YFA0303800,and 2019YFA0705000)National Natural Science Foundation of China(Nos.92050114,12174202,91750204,61775106,11904182,12074200,and 11774185)+5 种基金Guangdong Major Project of Basic and Applied Basic Research(No.2020B0301030009)111 Project(No.B07013)PCSIRT(No.IRT0149)Open Research Program of Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang ProvinceFundamental Research Funds for the Central Universities(Nos.010-63201003,010-63201008,010-63201009,and 01063211001)Tianjin Youth Talent Support Program。
文摘Lithium niobate(LN)metasurfaces have emerged as a new platform for manipulating electromagnetic waves.Here,we report a fabrication technique for LN nano-grating metasurfaces by combining focused ion beam(FIB)milling with inductively coupled plasma reactive ion etching(ICP-RIE).Steep sidewalls with angles larger than 80°are achieved.Sharp quasi-bound states in the continuum are observed from our metasurfaces.The measured transmission spectra show good agreement with the numerical simulations,confirming the high quality of the fabricated metasurfaces.Our technique can be applied to fabricate the LN metasurfaces with sharp resonances for various applications in optical communications,on-chip photonics,laser physics,sensing,and so on.
