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沟道宽度对65nm金属氧化物半导体器件负偏压温度不稳定性的影响研究 被引量:2
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作者 崔江维 郑齐文 +6 位作者 余德昭 周航 苏丹丹 马腾 魏莹 余学峰 郭旗 《电子学报》 EI CAS CSCD 北大核心 2018年第5期1128-1132,共5页
随着MOS器件尺寸缩小,可靠性效应成为限制器件寿命的突出问题.PMOS晶体管的负偏压温度不稳定性(NBTI)是其中关键问题之一.NBTI效应与器件几何机构密切相关.本文对不同宽长比的65nm工艺PMOSFET晶体管开展了NBTI试验研究.获得了NBTI效应... 随着MOS器件尺寸缩小,可靠性效应成为限制器件寿命的突出问题.PMOS晶体管的负偏压温度不稳定性(NBTI)是其中关键问题之一.NBTI效应与器件几何机构密切相关.本文对不同宽长比的65nm工艺PMOSFET晶体管开展了NBTI试验研究.获得了NBTI效应引起的参数退化与器件结构的依赖关系,试验结果表明65nm PMOSFET的NBTI损伤随沟道宽度减小而增大.通过缺陷电荷分析和仿真的方法,从NBTI缺陷产生来源和位置的角度,揭示了产生该结果的原因.指出浅槽隔离(STI)区域的电场和缺陷电荷是导致该现象的主要原因.研究结果为器件可靠性设计提供了参考. 展开更多
关键词 65nm 负偏压温度不稳定性 沟道宽度
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总剂量效应致0.13μm部分耗尽绝缘体上硅N型金属氧化物半导体场效应晶体管热载流子增强效应
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作者 周航 郑齐文 +5 位作者 崔江维 余学峰 郭旗 任迪远 余德昭 苏丹丹 《物理学报》 SCIE EI CAS CSCD 北大核心 2016年第9期234-241,共8页
空间科学的进步对航天用电子器件提出了更高的性能需求,绝缘体上硅(SOI)技术由此进入空间科学领域,这使得器件的应用面临深空辐射环境与地面常规可靠性的双重挑战.进行SOI N型金属氧化物半导体场效应晶体管电离辐射损伤对热载流子可靠... 空间科学的进步对航天用电子器件提出了更高的性能需求,绝缘体上硅(SOI)技术由此进入空间科学领域,这使得器件的应用面临深空辐射环境与地面常规可靠性的双重挑战.进行SOI N型金属氧化物半导体场效应晶体管电离辐射损伤对热载流子可靠性的影响研究,有助于对SOI器件空间应用的综合可靠性进行评估.通过预辐照和未辐照、不同沟道宽长比的器件热载流子试验结果对比,发现总剂量损伤导致热载流子损伤增强效应,机理分析表明该效应是STI辐射感生电场增强沟道电子空穴碰撞电离率所引起.与未辐照器件相比,预辐照器件在热载流子试验中的衬底电流明显增大,器件的转移特性曲线、输出特性曲线、跨导特性曲线以及关键电学参数V_T,GM_(max),ID_(SAT)退化较多.本文还对宽沟道器件测试中衬底电流减小以及不连续这一特殊现象进行了讨论. 展开更多
关键词 绝缘体上硅 电离辐射 热载流子
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Hot-Carrier Effects on Total Dose Irradiated 65 nm n-Type Metal-Oxide-Semiconductor Field-Effect Transistors 被引量:1
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作者 郑齐文 崔江维 +3 位作者 周航 余德昭 余学峰 郭旗 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第7期117-119,共3页
The influence of total dose irradiation on hot-carrier reliability of 65 nm n-type metal-oxide-semiconductor field- effect transistors (nMOSFETs) is investigated. Experimental results show that hot-carrier degradati... The influence of total dose irradiation on hot-carrier reliability of 65 nm n-type metal-oxide-semiconductor field- effect transistors (nMOSFETs) is investigated. Experimental results show that hot-carrier degradations on ir- radiated narrow channel nMOSFETs are greater than those without irradiation. The reason is attributed to radiation-induced charge trapping in shallow trench isolation (STI). The electric field in the pinch-off region of the nMOSFET is enhanced by radiation-induced charge trapping in STI, resulting in a more severe hot-carrier effect. 展开更多
关键词 of NM in Hot-Carrier Effects on Total Dose Irradiated 65 nm n-Type Metal-Oxide-Semiconductor Field-Effect Transistors STI on IS
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Analysis of functional failure mode of commercial deep sub-micron SRAM induced by total dose irradiation
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作者 郑齐文 崔江维 +5 位作者 周航 余德昭 余学峰 陆妩 郭旗 任迪远 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第10期380-385,共6页
Functional failure mode of commercial deep sub-micron static random access memory(SRAM) induced by total dose irradiation is experimentally analyzed and verified by circuit simulation. We extensively characterize th... Functional failure mode of commercial deep sub-micron static random access memory(SRAM) induced by total dose irradiation is experimentally analyzed and verified by circuit simulation. We extensively characterize the functional failure mode of the device by testing its electrical parameters and function with test patterns covering different functional failure modes. Experimental results reveal that the functional failure mode of the device is a temporary function interruption caused by peripheral circuits being sensitive to the standby current rising. By including radiation-induced threshold shift and off-state leakage current in memory cell transistors, we simulate the influence of radiation on the functionality of the memory cell. Simulation results reveal that the memory cell is tolerant to irradiation due to its high stability, which agrees with our experimental result. 展开更多
关键词 total dose irradiation static random access memory functional failure mode
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Total dose responses and reliability issues of 65 nm NMOSFETs
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作者 余德昭 郑齐文 +3 位作者 崔江维 周航 余学峰 郭旗 《Journal of Semiconductors》 EI CAS CSCD 2016年第6期129-135,共7页
In this paper,total dose responses and reliability issues of MOSFETs fabricated by 65 nm CMOS technology were examined. "Radiation-induced narrow channel effect" is observed in a narrow channel device.Similar to tot... In this paper,total dose responses and reliability issues of MOSFETs fabricated by 65 nm CMOS technology were examined. "Radiation-induced narrow channel effect" is observed in a narrow channel device.Similar to total dose responses of NMOSFETs,narrow channel NMOSFEs have larger hot-carrier-induced degradation than wide channel devices.Step Time-Dependent Dielectric Breakdown(TDDB) stresses are applied,and narrow channel devices have higher breakdown voltage than wide channel devices,which agree with "weakest link" theory of TDDB.Experimental results show that linear current,transconductance,saturated drain current and subthreshold swing are superposed degenerated by total dose irradiation and reliability issues,which may result in different lifetime from that considering total dose irradiation reliability issues separately. 展开更多
关键词 total dose responses reliability lifetime
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