We develope a simple method to stabilize the beam during propagation. Combination of the self-developed control module and the large diameter mirrors reconstruct the beam stabilization system, and some important proce...We develope a simple method to stabilize the beam during propagation. Combination of the self-developed control module and the large diameter mirrors reconstruct the beam stabilization system, and some important procedures are presented, such as calibration arid average filter. The results show that the horizontal pointing and vertical pointing are stabilized to within 8.43 and 7.59 μrad, and the beam horizontal position and vertical position are stabilized to within 2.16 and 2.11 μm respectively. The regulating time is within 84 ms. Thus the method presented is effective for the current stabilization system applied in lithography tools.展开更多
基金the National Science and Technology Major Project of China(No.2011ZX02402)the International Science & Technology Cooperation Program of China(No.2011DFR10010)
文摘We develope a simple method to stabilize the beam during propagation. Combination of the self-developed control module and the large diameter mirrors reconstruct the beam stabilization system, and some important procedures are presented, such as calibration arid average filter. The results show that the horizontal pointing and vertical pointing are stabilized to within 8.43 and 7.59 μrad, and the beam horizontal position and vertical position are stabilized to within 2.16 and 2.11 μm respectively. The regulating time is within 84 ms. Thus the method presented is effective for the current stabilization system applied in lithography tools.
