Recent research on microstructural characteristics and oxidation behavior of Ti(1-x)AlxN thin film were surveyed. The Ti(1-x)AlxN coatings have three different phase regions, Bl structure for lower x value, wurtzite s...Recent research on microstructural characteristics and oxidation behavior of Ti(1-x)AlxN thin film were surveyed. The Ti(1-x)AlxN coatings have three different phase regions, Bl structure for lower x value, wurtzite structure for higher x value and unidentified structure for medium x value. Based upon the selective oxidation mechanism the oxidation results of Ti(1-x)AlxN thin film with different Ti/Al ratio were predicated.展开更多
文摘Recent research on microstructural characteristics and oxidation behavior of Ti(1-x)AlxN thin film were surveyed. The Ti(1-x)AlxN coatings have three different phase regions, Bl structure for lower x value, wurtzite structure for higher x value and unidentified structure for medium x value. Based upon the selective oxidation mechanism the oxidation results of Ti(1-x)AlxN thin film with different Ti/Al ratio were predicated.