This study proposes a novel design and micromachining process for a dual-cantilever accelerometer.Comb and curved-surface structures are integrated into the sensing structure to modulate the squeeze-film damping,thus ...This study proposes a novel design and micromachining process for a dual-cantilever accelerometer.Comb and curved-surface structures are integrated into the sensing structure to modulate the squeeze-film damping,thus effectively optimizing the response frequency bandwidth.Owing to the high stress concentration on the dual-cantilever integrated with a fully sensitive piezoresistive Wheatstone bridge,a high sensitivity to acceleration is achieved.In addition,the dual-cantilever accelerometer is fabricated using a specifically developed low-cost and high-yield(111)-silicon single-side bulk-micromachining process.The test results show that the proposed dualcantilever accelerometer exhibits a sensitivity of 0.086—0.088 mV/g/3.3 V and a nonlinearity of±(0.09%—0.23%)FS(full-scale).Based on dynamic characterization,an adequate frequency bandwidth of 2.64 kHz is verified.Furthermore,a resonant frequency of 4.388 kHz is measured,and a low quality factor(Q)of 7.62 is obtained,which agrees well with the design for air-damping modulation.The achieved high performance renders the proposed dual-cantilever accelerometer promising in applications such as automotive and consumer electronics.展开更多
基金National Key R&D Program of China(Nos.2016YFA0200800 and 2016YFA0200803)National Natural Science Foundation of China(Nos.61674160 and 61834007)。
文摘This study proposes a novel design and micromachining process for a dual-cantilever accelerometer.Comb and curved-surface structures are integrated into the sensing structure to modulate the squeeze-film damping,thus effectively optimizing the response frequency bandwidth.Owing to the high stress concentration on the dual-cantilever integrated with a fully sensitive piezoresistive Wheatstone bridge,a high sensitivity to acceleration is achieved.In addition,the dual-cantilever accelerometer is fabricated using a specifically developed low-cost and high-yield(111)-silicon single-side bulk-micromachining process.The test results show that the proposed dualcantilever accelerometer exhibits a sensitivity of 0.086—0.088 mV/g/3.3 V and a nonlinearity of±(0.09%—0.23%)FS(full-scale).Based on dynamic characterization,an adequate frequency bandwidth of 2.64 kHz is verified.Furthermore,a resonant frequency of 4.388 kHz is measured,and a low quality factor(Q)of 7.62 is obtained,which agrees well with the design for air-damping modulation.The achieved high performance renders the proposed dual-cantilever accelerometer promising in applications such as automotive and consumer electronics.
