High-Q lithium niobate(LN) optical micro-resonators are an excellent platform for future applications in optical communications, nonlinear optics, and quantum optics. To date, high-Q factors are typically achieved in ...High-Q lithium niobate(LN) optical micro-resonators are an excellent platform for future applications in optical communications, nonlinear optics, and quantum optics. To date, high-Q factors are typically achieved in LN using either dielectric masks or femtosecond laser ablation, while the more standard and commonly available lift-off metallic masks are often believed to lead to rough sidewalls and lowered Q factors. Here, we show that LN microring resonators with strong light confinement and intrinsic Q factors over 1 million can be fabricated using optimized lift-off metallic masks and dry etching processes, corresponding to a waveguide propagation loss of ~0.3 d B=cm. The entire process is fully compatible with wafer-scale production and could be transferred to other photonic materials.展开更多
基金supported by the National Natural Science Foundation of China(No.61922092)Research Grants Council,University Grants Committee(No.City U 21208219)City University of Hong Kong(Nos.9667182,9610402,and 9610455)。
文摘High-Q lithium niobate(LN) optical micro-resonators are an excellent platform for future applications in optical communications, nonlinear optics, and quantum optics. To date, high-Q factors are typically achieved in LN using either dielectric masks or femtosecond laser ablation, while the more standard and commonly available lift-off metallic masks are often believed to lead to rough sidewalls and lowered Q factors. Here, we show that LN microring resonators with strong light confinement and intrinsic Q factors over 1 million can be fabricated using optimized lift-off metallic masks and dry etching processes, corresponding to a waveguide propagation loss of ~0.3 d B=cm. The entire process is fully compatible with wafer-scale production and could be transferred to other photonic materials.
