A one-dimensional self-consistent fluid model was developed for radio frequency glow discharge in helium at near atmospheric pressure, and was employed to study the gas breakdown characteristics in terms of breakdown ...A one-dimensional self-consistent fluid model was developed for radio frequency glow discharge in helium at near atmospheric pressure, and was employed to study the gas breakdown characteristics in terms of breakdown voltage. The effective secondary electron emission coefficient and the effective electric field for ions were demonstrated to be important for determining the breakdown voltage of radio frequency glow discharge at near atmospheric pressure. The constant of A was estimated to be 64:t=4 cm-lTorr-1, which was proportional to the first Townsend coefficient and could be employed to evaluate the gas breakdown voltage. The reduction in the breakdown voltage of radio frequency glow discharge with excitation frequency was studied and attributed to the electron trapping effect in the discharge gap.展开更多
基金supported by National Natural Science Foundation of China (Nos. 10835004, 10905010)Shanghai Shuguang Program (No. 08SG31)the Fundamental Research Funds for the Central Universities of China
文摘A one-dimensional self-consistent fluid model was developed for radio frequency glow discharge in helium at near atmospheric pressure, and was employed to study the gas breakdown characteristics in terms of breakdown voltage. The effective secondary electron emission coefficient and the effective electric field for ions were demonstrated to be important for determining the breakdown voltage of radio frequency glow discharge at near atmospheric pressure. The constant of A was estimated to be 64:t=4 cm-lTorr-1, which was proportional to the first Townsend coefficient and could be employed to evaluate the gas breakdown voltage. The reduction in the breakdown voltage of radio frequency glow discharge with excitation frequency was studied and attributed to the electron trapping effect in the discharge gap.