This paper reports that DLC （diamond like carbon）/Ti and DLC films were prepared by using pulsed laser arc deposition. R-ray diffraction, Auger electron spectroscopy, Raman spectroscopy, atomic force microscopy, nan...This paper reports that DLC （diamond like carbon）/Ti and DLC films were prepared by using pulsed laser arc deposition. R-ray diffraction, Auger electron spectroscopy, Raman spectroscopy, atomic force microscopy, nanoindenter, spectroscopic ellipsometer, surface profiler and micro-tribometer were employed to study the structure and tribological properties of DLC/Ti and DLC films. The results show that DLC/Ti film, with I（D）/I（G） 0.28 and corresponding to 76% sp3 content calculated by Raman spectroscopy, uniform chemical composition along depth direction, 98 at% content of carbon, hardness 8.2 GPa and Young＇s modulus 110.5 GPa, compressive stress 6.579 GPa, thickness 46 nm, coefficient of friction 0.08, and critical load 95mN, exhibits excellent mechanical and tribological properties.展开更多
基金Project supported by the National Key Basic Research Program of China （Grant No 2003CB716201） and the National Natural Science Foundation of China （Grant No 50575121） and Electro-Mechmaic Technology Advancing Foundation of NSK Ltd of Japan.
文摘This paper reports that DLC （diamond like carbon）/Ti and DLC films were prepared by using pulsed laser arc deposition. R-ray diffraction, Auger electron spectroscopy, Raman spectroscopy, atomic force microscopy, nanoindenter, spectroscopic ellipsometer, surface profiler and micro-tribometer were employed to study the structure and tribological properties of DLC/Ti and DLC films. The results show that DLC/Ti film, with I（D）/I（G） 0.28 and corresponding to 76% sp3 content calculated by Raman spectroscopy, uniform chemical composition along depth direction, 98 at% content of carbon, hardness 8.2 GPa and Young＇s modulus 110.5 GPa, compressive stress 6.579 GPa, thickness 46 nm, coefficient of friction 0.08, and critical load 95mN, exhibits excellent mechanical and tribological properties.
