We design and fabricate an unbalanced Mach–Zehnder interferometer(MZI)via electron beam lithography and inductively coupled plasma etching on lithium niobate thin film.The single unbalanced MZI exhibits a maximum ext...We design and fabricate an unbalanced Mach–Zehnder interferometer(MZI)via electron beam lithography and inductively coupled plasma etching on lithium niobate thin film.The single unbalanced MZI exhibits a maximum extinction ratio of 32.4 dB and a low extra loss of 1.14 dB at the telecommunication band.Furthermore,tunability of the unbalanced MZI by harnessing the thermo-optic and electro-optic effect is investigated,achieving a linear tuning efficiency of 42.8 pm/℃ and 55.2 pm/V,respectively.The demonstrated structure has applications for sensing and filtering in photonic integrated circuits.展开更多
基金supported by the National Natural Science Foundation of China(Nos.12074252,62022058,62005159,and 11734011)National Key Research and Development Program of China(Nos.2017YFA0303701 and 2018YFA0306301)+2 种基金Shanghai Municipal Science and Technology Major Project(No.2019SHZDZX01-ZX06)Shanghai Rising-Star Program(No.20QA1405400)Shanghai Jiao Tong University(No.21X010200828)。
文摘We design and fabricate an unbalanced Mach–Zehnder interferometer(MZI)via electron beam lithography and inductively coupled plasma etching on lithium niobate thin film.The single unbalanced MZI exhibits a maximum extinction ratio of 32.4 dB and a low extra loss of 1.14 dB at the telecommunication band.Furthermore,tunability of the unbalanced MZI by harnessing the thermo-optic and electro-optic effect is investigated,achieving a linear tuning efficiency of 42.8 pm/℃ and 55.2 pm/V,respectively.The demonstrated structure has applications for sensing and filtering in photonic integrated circuits.
