Over the past several decades, the technology of micro-electromechanical system（MEMS） has advanced. A clear need of miniaturization and integration of electronics components has had new solutions for the next genera...Over the past several decades, the technology of micro-electromechanical system（MEMS） has advanced. A clear need of miniaturization and integration of electronics components has had new solutions for the next generation of wireless communications. The aluminum nitride（AlN） MEMS contour-mode resonator（CMR）has emerged and become promising and competitive due to the advantages of the small size, high quality factor and frequency, low resistance, compatibility with integrated circuit（IC） technology, and the ability of integrating multi-frequency devices on a single chip. In this article, a comprehensive review of AlN MEMS CMR technology will be presented, including its basic working principle, main structures, fabrication processes, and methods of performance optimization. Among these, the deposition and etching process of the AlN film will be specially emphasized and recent advances in various performance optimization methods of the CMR will be given through specific examples which are mainly focused on temperature compensation and reducing anchor losses. This review will conclude with an assessment of the challenges and future trends of the CMR.展开更多
This paper presents and analyzes a notch observed in MEMS （micro electric mechanical system） filter characterization using the difference method. The difference method takes advantage of the cancellation of parasiti...This paper presents and analyzes a notch observed in MEMS （micro electric mechanical system） filter characterization using the difference method. The difference method takes advantage of the cancellation of parasitic feed-through, which could potentially obscure the relatively small motional signal and lead to failure in character- ization of the MEMS components. In this paper, typical clamped-clamped beam MEMS filters are fabricated and characterized with the difference method. Using the difference method a better performance is obtained but a notch is induced as a potential problem. Analysis is performed and reveals the mismatch of the two differential excitation signals in measurement circuit contributes to the notch. The relevant circuit design rule is also proposed to avoid the notch in the difference method.展开更多
This paper presents an SOI（silicon on insulator） MEMS（micro-electro-mechanical systems） vibratory gyroscope that was fabricated using bulk micromachining processes.In the gyroscope architecture,a frame structure t...This paper presents an SOI（silicon on insulator） MEMS（micro-electro-mechanical systems） vibratory gyroscope that was fabricated using bulk micromachining processes.In the gyroscope architecture,a frame structure that nests the proof mass is used to decouple the drive motion and sense motion.This approach ensures that the drive motion is well aligned with the designed drive axis,and minimizes the actual drive motion component along the sense detection axis.The thickness of the structural layer of the device is 100μm,which induces a high elastic stiffness in the thickness direction,so it can suppress the high-order out-of-plane resonant modes to reduce deviation.In addition,the dynamics of the gyroscope indicate that higher driving mass brings about higher sensing displacements.The thick structural layer can improve the output of the device by offering a sufficient mass weight and large sensing capacitance.The preliminary test results of the vacuum packaged device under atmospheric pressure will be provided.The scale factor is 1.316×10^-4 V/（deg/s）,the scale factor nonlinearity and asymmetry are 1.87%and 0.36%,the zero-rate offset is 7.74×10^4 V,and the zero-rate stability is 404 deg/h,respectively.展开更多
基金Project supported by National Natural Science Foundation (Nos. 61274001, 61234007, 61504130)the Nurturing and Development Special Projects of Beijing Science and Technology Innovation Base’s Financial Support (No. Z131103002813070)the National Defense Science and Technology Innovation Fund of CAS (No. CXJJ-14-M32)
文摘Over the past several decades, the technology of micro-electromechanical system（MEMS） has advanced. A clear need of miniaturization and integration of electronics components has had new solutions for the next generation of wireless communications. The aluminum nitride（AlN） MEMS contour-mode resonator（CMR）has emerged and become promising and competitive due to the advantages of the small size, high quality factor and frequency, low resistance, compatibility with integrated circuit（IC） technology, and the ability of integrating multi-frequency devices on a single chip. In this article, a comprehensive review of AlN MEMS CMR technology will be presented, including its basic working principle, main structures, fabrication processes, and methods of performance optimization. Among these, the deposition and etching process of the AlN film will be specially emphasized and recent advances in various performance optimization methods of the CMR will be given through specific examples which are mainly focused on temperature compensation and reducing anchor losses. This review will conclude with an assessment of the challenges and future trends of the CMR.
基金Project supported by the National Natural Science Foundation of China(Nos.61274001,61006073,61234007)the National Hi-Tech Research and Development Program of China(No.2006AA04Z339)
文摘This paper presents and analyzes a notch observed in MEMS （micro electric mechanical system） filter characterization using the difference method. The difference method takes advantage of the cancellation of parasitic feed-through, which could potentially obscure the relatively small motional signal and lead to failure in character- ization of the MEMS components. In this paper, typical clamped-clamped beam MEMS filters are fabricated and characterized with the difference method. Using the difference method a better performance is obtained but a notch is induced as a potential problem. Analysis is performed and reveals the mismatch of the two differential excitation signals in measurement circuit contributes to the notch. The relevant circuit design rule is also proposed to avoid the notch in the difference method.
基金supported by the National Natural Science Foundation of China(Nos.6127400l,61006073,61234007)
文摘This paper presents an SOI（silicon on insulator） MEMS（micro-electro-mechanical systems） vibratory gyroscope that was fabricated using bulk micromachining processes.In the gyroscope architecture,a frame structure that nests the proof mass is used to decouple the drive motion and sense motion.This approach ensures that the drive motion is well aligned with the designed drive axis,and minimizes the actual drive motion component along the sense detection axis.The thickness of the structural layer of the device is 100μm,which induces a high elastic stiffness in the thickness direction,so it can suppress the high-order out-of-plane resonant modes to reduce deviation.In addition,the dynamics of the gyroscope indicate that higher driving mass brings about higher sensing displacements.The thick structural layer can improve the output of the device by offering a sufficient mass weight and large sensing capacitance.The preliminary test results of the vacuum packaged device under atmospheric pressure will be provided.The scale factor is 1.316×10^-4 V/（deg/s）,the scale factor nonlinearity and asymmetry are 1.87%and 0.36%,the zero-rate offset is 7.74×10^4 V,and the zero-rate stability is 404 deg/h,respectively.
