This paper reports that the 150-keV Mn ions are implanted into CaN thin film grown on A1203 by metalorganic chemical vapour deposition. The X-ray diffraction reciprocal spacing mapping is applied to study the lattice ...This paper reports that the 150-keV Mn ions are implanted into CaN thin film grown on A1203 by metalorganic chemical vapour deposition. The X-ray diffraction reciprocal spacing mapping is applied to study the lattice parameter variation upon implantation and post-annealing. After implantation, a significant expansion is observed in the perpendicular direction. The lattice strain in perpendicular direction strongly depends on ion fluence and implantation geometry and can be partially relaxed by post-annealing. While in the parallel direction, the lattice parameter approximately keeps the same as the unimplanted GaN, which is independent of ion fluence, implantation geometry and post-annealing temperature.展开更多
AlxGa1-xN/GaN heterostructures are grown on c-sapphire with the Al composition x from 0.2 to 0.4 and thicknesses from 20nm to 30nm. The lattice parameters a and c are determined from 2θ/ω scan. The AIGaN layers are ...AlxGa1-xN/GaN heterostructures are grown on c-sapphire with the Al composition x from 0.2 to 0.4 and thicknesses from 20nm to 30nm. The lattice parameters a and c are determined from 2θ/ω scan. The AIGaN layers are found to be under tensile strain by using x-ray diffraction. Vegard＇s law induces a large deviation in Al composition determination by only considering the linear relationship between one lattice parameter （α or c） and Al composition. The accurate determination of Al composition is only possible with consideration of both the lattice parameters α and c, by assuming the tetragonal distortion in the AlGaN layer. Additionally, the results obtained from x-ray diffraction are verified by Rutherford backscattering.展开更多
The epitaxial growth features of YBa2Cu3O7-x (YBCO) films on (100) SrTiO3 substrates have been studied by Rutherford backscattering spectrometry and axial channeling technique. A typical minimum yield value, Xmin, of ...The epitaxial growth features of YBa2Cu3O7-x (YBCO) films on (100) SrTiO3 substrates have been studied by Rutherford backscattering spectrometry and axial channeling technique. A typical minimum yield value, Xmin, of Ba yielded in channeling spectrum is 4.6 % for the film of 166 nm. Only (00L) peaks appeared in X ray diffraction patterns of the films. The results indicate that the YBCO films have good epitaxial growth quality with c- axis orientation perpendicular to the substrate surface. Simulation of RB process in films and substrates have also been performed using RUMP program, and analysis shows that compositions of the films are uniform with near (123) stoichiometry. The higher interface yields in the aligned spectrum reveal that there are extra defects in the interface layer owing to lattice mismatch and interface interaction.展开更多
基金Supported by the National Natural Science Foundation of China under Grant No 10375004, and the Key Laboratory of Heavy Ion Physics （Peking University）, Ministry of Education of China.
基金Supported by the National Natural Science Foundation of China under Grant No 10375004, and the Key Laboratory of Heavy Ion Physics, Ministry of Education of China.
基金Project supported by the National Natural Science Foundation of China (Grant No. 11005005)the National Basic Research Program of China (Grant No. 2010CB832904)the Bilateral Cooperation between China and Flanders (Grant No. BIL02-02)
文摘This paper reports that the 150-keV Mn ions are implanted into CaN thin film grown on A1203 by metalorganic chemical vapour deposition. The X-ray diffraction reciprocal spacing mapping is applied to study the lattice parameter variation upon implantation and post-annealing. After implantation, a significant expansion is observed in the perpendicular direction. The lattice strain in perpendicular direction strongly depends on ion fluence and implantation geometry and can be partially relaxed by post-annealing. While in the parallel direction, the lattice parameter approximately keeps the same as the unimplanted GaN, which is independent of ion fluence, implantation geometry and post-annealing temperature.
基金Supported by the Key Laboratory of Heavy Ion Physics, Ministry of Education of China, and by the National Natural Science Foundation under Grant No 10375004.
文摘AlxGa1-xN/GaN heterostructures are grown on c-sapphire with the Al composition x from 0.2 to 0.4 and thicknesses from 20nm to 30nm. The lattice parameters a and c are determined from 2θ/ω scan. The AIGaN layers are found to be under tensile strain by using x-ray diffraction. Vegard＇s law induces a large deviation in Al composition determination by only considering the linear relationship between one lattice parameter （α or c） and Al composition. The accurate determination of Al composition is only possible with consideration of both the lattice parameters α and c, by assuming the tetragonal distortion in the AlGaN layer. Additionally, the results obtained from x-ray diffraction are verified by Rutherford backscattering.
基金The Project Supported by National Natural Science Foundation of China
文摘The epitaxial growth features of YBa2Cu3O7-x (YBCO) films on (100) SrTiO3 substrates have been studied by Rutherford backscattering spectrometry and axial channeling technique. A typical minimum yield value, Xmin, of Ba yielded in channeling spectrum is 4.6 % for the film of 166 nm. Only (00L) peaks appeared in X ray diffraction patterns of the films. The results indicate that the YBCO films have good epitaxial growth quality with c- axis orientation perpendicular to the substrate surface. Simulation of RB process in films and substrates have also been performed using RUMP program, and analysis shows that compositions of the films are uniform with near (123) stoichiometry. The higher interface yields in the aligned spectrum reveal that there are extra defects in the interface layer owing to lattice mismatch and interface interaction.
