Controllable annulus micro-/nanostructures on copper fabricated by femtosecond laser with spatial doughnut distribution

In this study,we propose an effective method for the fabrication of annulus micro-/nanostructures by a femtosecond laser doughnut beam.Compared with the traditional Bessel annulus beam shaping system,this method greatly compresses the light propagation path.It is theoretically and experimentally demonstrated that the obtained axial section of the peak envelope in the processing area is two waists of the isosceles triangle.By moving the relative position of the sample,annulus microstructures with different diameters on copper sheet could be fabricated.In addition,laser induced periodic surface structures with controllable direction are fabricated by this optical system.

飞秒激光直写掩模制作硅表面微柱阵列

提出了一种使用飞秒激光直写掩模加工微柱阵列的方法。利用高重复频率飞秒激光的热氧化效应在硅表面制作出二氧化硅点阵列,然后经氢氧化钾刻蚀得到微柱阵列。相比于传统的制作微柱阵列的方法,使用飞秒激光直写掩模制作微柱阵列的方法工艺简单,成本更低。此外,探究了激光功率、曝光时间和氢氟酸蚀刻对掩模尺寸的影响。这种微柱阵列在减反、传感等领域具有很好的应用价值。