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GaN基低温无金欧姆接触电极制备及应用 被引量:1
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作者 李祈昕 周泉斌 +1 位作者 刘晓艺 王洪 《光学与光电技术》 2018年第6期71-77,共7页
制备了一种与Si-CMOS工艺线兼容的AlGaN/GaN HEMTs低温无金欧姆接触电极,分析了欧姆前刻槽深度和退火合金条件对Si基AlGaN/GaN异质结无金欧姆接触特性的影响。系统研究了具有不同欧姆前刻槽深度、不同退火条件的AlGaN/GaN异质结的Ti/Al/... 制备了一种与Si-CMOS工艺线兼容的AlGaN/GaN HEMTs低温无金欧姆接触电极,分析了欧姆前刻槽深度和退火合金条件对Si基AlGaN/GaN异质结无金欧姆接触特性的影响。系统研究了具有不同欧姆前刻槽深度、不同退火条件的AlGaN/GaN异质结的Ti/Al/Ti/TiW无金电极的电流-电压特性、接触电阻率以及电极表面形貌。并利用低温退火的Ti/Al/Ti/TiW无金工艺制备了AlGaN/GaN异质结MISHEMT器件。实验结果表明,采用该无金工艺可得到比接触电阻率为5.44×10-5Ω·cm2、表面形态平整的欧姆接触电极,所制备的AlGaN/GaN异质结MISHEMT器件,在VGS=0V时的源漏饱和电流(IDSS)为345.7mA/mm,对未掺杂AlGaN/GaN HEMTs器件的低温无金欧姆接触的实现具有指导意义。 展开更多
关键词 氮化镓基高电子迁移率晶体管 无金欧姆接触 低温合金 欧姆前刻槽 退火工艺
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Effects of p-type GaN thickness on optical properties of Ga N-based light-emitting diodes
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作者 徐明升 张恒 +1 位作者 周泉斌 王洪 《Optoelectronics Letters》 EI 2016年第4期249-252,共4页
The influence of p-type Ga N(p Ga N) thickness on the light output power(LOP) and internal quantum efficiency(IQE) of light emitting diode(LED) was studied by experiments and simulations. The LOP of Ga N-based LED inc... The influence of p-type Ga N(p Ga N) thickness on the light output power(LOP) and internal quantum efficiency(IQE) of light emitting diode(LED) was studied by experiments and simulations. The LOP of Ga N-based LED increases as the thickness of p Ga N layer decreases from 300 nm to 100 nm, and then decreases as the thickness decreases to 50 nm. The LOP of LED with 100-nm-thick pG a N increases by 30.9% compared with that of the conventional LED with 300-nm-thick p Ga N. The variation trend of IQE is similar to that of LOP as the decrease of Ga N thickness. The simulation results demonstrate that the higher light efficiency of LED with 100-nm-thick p Ga N is ascribed to the improvements of the carrier concentrations and recombination rates. 展开更多
关键词 发光二极管 GA 厚度 光学性质 P型 光输出功率 载流子浓度 LED
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