Although grating fabrication technologies on solid materials are well developed,grating fabrication on free standing films is rather more difficult.We propose a new film grating fabrication method based on UV-nanoimpr...Although grating fabrication technologies on solid materials are well developed,grating fabrication on free standing films is rather more difficult.We propose a new film grating fabrication method based on UV-nanoimprint lithography.This method combines the grating fabrication technique using nanoimprint lithography with thin film preparation technology.It involves the fabrication of a PMMA grating by UV-nanoimprint lithography,followed by the preparation of a thin metal film on the PMMA grating and the patterning of the tensile film specimen through photolithography.After dissolving the PMMA layer,the tensile film specimen becomes a free standing structure.To identify the quality of the thin film specimen as well as the grating,the specimen is loaded with uniaxial tensile stress.The Moirémethod is adopted to measure the full-field deformation and the mechanical parameters of the film specimen.The successful results verify the potential of this method in grating fabrication on other film-like specimens.展开更多
Focused ion beam(FIB)milling technique is used to fabricate specimen grating with frequency of 1000 lines/mmon the surface of optical fiber,and in-situ tensile tests are carried out by using a scanning electron micros...Focused ion beam(FIB)milling technique is used to fabricate specimen grating with frequency of 1000 lines/mmon the surface of optical fiber,and in-situ tensile tests are carried out by using a scanning electron microscope(SEM).The SEM scanning Moiréis formed by the superposition of the specimen grating and SEM scanning lines.The displacement field and strain field are obtained by taking advantage of the SEM Moirémethod combining with random phase-shifting technique.The tensile properties of the optical fibers are measured according to the stress-strain curve.The experimental results of the SEM Moirémethod based on FIB grating demonstrate a good agreement with the parameters obtained from commercial tensile testing machine.展开更多
基金Supported by the National Basic Research Program of China under Grant Nos 2010CB631005 and 2011CB606105the National Natural Science Foundation of China under Grant Nos 11172151 and 90916010the Specialized Research Fund for the Doctoral Program of Higher Education under Grant No 20090002110048.
文摘Although grating fabrication technologies on solid materials are well developed,grating fabrication on free standing films is rather more difficult.We propose a new film grating fabrication method based on UV-nanoimprint lithography.This method combines the grating fabrication technique using nanoimprint lithography with thin film preparation technology.It involves the fabrication of a PMMA grating by UV-nanoimprint lithography,followed by the preparation of a thin metal film on the PMMA grating and the patterning of the tensile film specimen through photolithography.After dissolving the PMMA layer,the tensile film specimen becomes a free standing structure.To identify the quality of the thin film specimen as well as the grating,the specimen is loaded with uniaxial tensile stress.The Moirémethod is adopted to measure the full-field deformation and the mechanical parameters of the film specimen.The successful results verify the potential of this method in grating fabrication on other film-like specimens.
基金Supported by the National Basic Research Program of China under Grant Nos 2010CB631005 and 2011CB606105the National Natural Science Foundation of China under Grant Nos 11172151 and 90916010.
文摘Focused ion beam(FIB)milling technique is used to fabricate specimen grating with frequency of 1000 lines/mmon the surface of optical fiber,and in-situ tensile tests are carried out by using a scanning electron microscope(SEM).The SEM scanning Moiréis formed by the superposition of the specimen grating and SEM scanning lines.The displacement field and strain field are obtained by taking advantage of the SEM Moirémethod combining with random phase-shifting technique.The tensile properties of the optical fibers are measured according to the stress-strain curve.The experimental results of the SEM Moirémethod based on FIB grating demonstrate a good agreement with the parameters obtained from commercial tensile testing machine.
