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基于HfO_(2)插层的Ga_(2)O_(3)基金属-绝缘体-半导体结构日盲紫外光电探测器 被引量:1
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作者 董典萌 汪成 +5 位作者 张清怡 张涛 杨永涛 夏翰驰 王月晖 吴真平 《物理学报》 SCIE EI CAS CSCD 北大核心 2023年第9期161-170,共10页
作为一种新兴的超宽带隙半导体, Ga_(2)O_(3)在开发高性能的日盲紫外光电探测器方面具有独特的优势.金属-半导体-金属结构因其制备方法简单、集光面积大等优点在Ga_(2)O_(3)日盲紫外光电探测器中得到了广泛的应用.本文在传统的金属-半导... 作为一种新兴的超宽带隙半导体, Ga_(2)O_(3)在开发高性能的日盲紫外光电探测器方面具有独特的优势.金属-半导体-金属结构因其制备方法简单、集光面积大等优点在Ga_(2)O_(3)日盲紫外光电探测器中得到了广泛的应用.本文在传统的金属-半导体-金属结构Ga_(2)O_(3)日盲紫外光电探测器的基础上,利用原子层沉积技术引入高介电性和绝缘性的氧化铪(HfO_(2))作为绝缘层和钝化层,制备出带有HfO_(2)插层的金属-绝缘体-半导体结构的Ga_(2)O_(3)日盲紫外光电探测器,显著降低了暗电流,提升了光暗电流比,同时提高了器件的比探测率和响应速度,为未来Ga_(2)O_(3)在高性能弱光探测器件制备提供了一种新通用策略. 展开更多
关键词 氧化镓 紫外探测 金属-绝缘体-半导体 表面钝化
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Paper-based amorphous Ga_(2)O_(3)solar-blind photodetector with improved flexibility and stability
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作者 夏翰驰 张涛 +4 位作者 王月晖 祁亚平 张帆 吴真平 张杨 《Chinese Optics Letters》 SCIE EI CAS CSCD 2023年第10期66-71,共6页
Flexible devices provide advantages such as conformability,portability,and low cost.Paper-based electronics offers a number of advantages for many applications.It is lightweight,inexpensive,and biodegradable,making it... Flexible devices provide advantages such as conformability,portability,and low cost.Paper-based electronics offers a number of advantages for many applications.It is lightweight,inexpensive,and biodegradable,making it an ideal choice for disposable electronics.In this work,we propose a novel configuration of photodetectors using paper as flexible substrates and amorphous Ga_(2)O_(3)as the active materials,respectively.The photoresponse characteristics are investigated systematically.A decent responsivity yield and a specific detectivity of up to 66 mA/W and 3×10^(12)Jones were obtained at a low operating voltage of 10 V.The experiments also demonstrate that neither the twisting nor bending deformation can bring obvious performance degradation to the device.This work presents a candidate strategy for the application of conventional paper substrates to low-cost flexible solar-blind photodetectors,showing the potential of being integrated with other materials to create interactive flexible circuits. 展开更多
关键词 amorphous Ga_(2)O_(3) flexible photodetector solar-blindness paper
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