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表面波等离子体暴露下铜表面的氧化特性(英文)
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作者 吉田圭佑 妻鹿义治 +3 位作者 川添博光 松野隆 山田刚治 竹内新 《材料与冶金学报》 CAS 2011年第1期58-60,69,共4页
Surface wave plasma(SWP) is a kind of low temperature plasma which can be utilized for material development.In this research,argon and oxygen were used as a working gas for an SWP experiment and the influence of the p... Surface wave plasma(SWP) is a kind of low temperature plasma which can be utilized for material development.In this research,argon and oxygen were used as a working gas for an SWP experiment and the influence of the plasma irradiation on a copper surface was examined.Particular,relation between the spatial characteristics of SWP and wetting characteristics was examined.As a result,it was found that spatial characteristics of the SWP affected the wetting characteristics and the oxidation characteristics. 展开更多
关键词 surface wave plasma material surface reformation wetting characteristics
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