Palladium membranes were prepared on an α-alumina support bymetal-organic compound chemical vapor deposition (MOCVD) method frompalladium (II) acetate precursor. Permeation properties of hydrogenand helium gas were s...Palladium membranes were prepared on an α-alumina support bymetal-organic compound chemical vapor deposition (MOCVD) method frompalladium (II) acetate precursor. Permeation properties of hydrogenand helium gas were studied as a function of the number of times ofdeposition of palladium on the peeling off phenomenon of palladium,which is common in electroless plated membrane, was observed. Silicawas introduced into the pores to prevent the palladium grain frompeeling off. The palladium-silica conjugated membrane does not showthe peeling off phenomenon and can withstand the high temperature upto 800 deg. C which is the upper limit of our apparatus.展开更多
文摘Palladium membranes were prepared on an α-alumina support bymetal-organic compound chemical vapor deposition (MOCVD) method frompalladium (II) acetate precursor. Permeation properties of hydrogenand helium gas were studied as a function of the number of times ofdeposition of palladium on the peeling off phenomenon of palladium,which is common in electroless plated membrane, was observed. Silicawas introduced into the pores to prevent the palladium grain frompeeling off. The palladium-silica conjugated membrane does not showthe peeling off phenomenon and can withstand the high temperature upto 800 deg. C which is the upper limit of our apparatus.
